PI P-54 Series User manual

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone [phone], Fax [phone], Email [email protected], www.pi.ws
PZ244E
P-54x Nanopositioner
User Manual
Version: 1.2.0
Date: 27.07.2020
This document describes the following products:

P-541.2 / P-542.2
XY nanopositioning system with large aperture
P-541.2xx, 100 µm × 100 µm
P-542.2xx, 200 µm × 200 µm
P-541.2DD, 45 µm × 45 µm, direct drive

P-541.Z
Nanopositioner Z stage with large aperture
P-541.ZCD, 100 µm, direct position measuring
P-541.ZSL, 100 µm
P-541.Z0L, 150 µm

P-541.T
Nanopositioner and tip/tilt stage with large
aperture
P-541.TCD, 100 µm / 0.8 mrad, parallel
metrology
P-541.TSL, 100 µm / 0.8 mrad
P-541.T0L, 150 µm / 1.2 mrad
Model-specific properties:
Integrated sensor:
Capacitive sensors: 2CD, 2CL, 2DD, ZCD, TCD
Strain gauge sensors: 2SL, ZSL, TSL
Without sensor: 20L, Z0L, T0L
Sensor / voltage connector:
D-sub 25W3 (m): 2CD, 2DD, TCD
D-sub 7W2 (m): ZCD
LEMO: 2CL, 2SL, 20L, ZSL, Z0L, TSL, T0L

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list: https://www.physikinstrumente.com/en/about-pi/patents
© 2020 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 27.07.2020
Document number: PZ244E, CBo, Version 1.2.0
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Group of this User Manual ...................................................... 1
1.2 Symbols and Typographic Conventions ..................................................................... 1
1.3 Definition of Terms..................................................................................................... 2
1.4 Figures ........................................................................................................................ 2
1.5 Other Applicable Documents ..................................................................................... 3
1.6 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 7
3Product Description 9
3.1 Model Overview ......................................................................................................... 9
3.2 Product View ............................................................................................................ 10
3.3 Product Labeling....................................................................................................... 11
3.4 Scope of Delivery...................................................................................................... 11
3.5 Suitable Electronics .................................................................................................. 12
3.6 Accessories ............................................................................................................... 12
3.7 Technical Features.................................................................................................... 13
3.7.1 PICMA® Piezo Actuators .............................................................................. 13
3.7.2 Flexure Guides ............................................................................................. 13
3.7.3 Position Sensors........................................................................................... 13
3.7.4 ID Chip (Models with D-sub Connector Only) ............................................. 14
4Unpacking 15
5Installation 17
5.1 General Notes on Installation................................................................................... 17
5.2 Connecting the P-54x to the Protective Earth Conductor........................................ 18
5.3 Mounting the P-54x.................................................................................................. 20
5.4 Fixing the Load.......................................................................................................... 21
5.5 Connecting the P-54x to the Electronics .................................................................. 24
6Starting and Operating 25
6.1 General Notes on Starting and Operating................................................................ 25
6.2 Operating the P-54x (All Models Except the P-541.T0L) .......................................... 27
Contents

6.3 Operating the P-541.T0L .......................................................................................... 27
6.4 Discharging the P-54x............................................................................................... 28
7Maintenance 29
7.1 General Notes on Maintenance ............................................................................... 29
7.2 Cleaning the P-54x.................................................................................................... 29
8Troubleshooting 31
9Customer Service 33
10 Technical Data 35
10.1 Specifications............................................................................................................ 35
10.1.1 Data Table.................................................................................................... 35
10.1.2 Maximum Ratings........................................................................................ 38
10.1.3 Ambient Conditions and Classifications ...................................................... 39
10.2 Dimensions ............................................................................................................... 40
10.3 Torque for Stainless Steel Screws (A2-70)................................................................ 42
10.4 Pin Assignment ......................................................................................................... 42
11 Old Equipment Disposal 47

1 About this Document
P-54x Nanopositioner PZ244E Version: 1.2.0 1
In this Chapter
Objective and Target Group of this User Manual.......................................................................... 1
Symbols and Typographic Conventions......................................................................................... 1
Definition of Terms ........................................................................................................................ 2
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 3
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Group of this User Manual
This user manual contains the information required for using the P-54x as intended ("x" stands
for the different models (p. 9)).
Basic knowledge of control technology, drive technologies, and suitable safety measures is
assumed.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
Failure to comply could lead to minor injury.
Precautionary measures for avoiding the risk.
NOTICE
Dangerous situation
Failure to comply could cause damage to equipment.
Precautionary measures for avoiding the risk.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 1.2.0 PZ244E P-54x Nanopositioner
Symbol/
Label
Meaning
1.
2.
Action consisting of several steps with strict sequential order

Action consisting of one or more steps without relevant sequential
order.

Bullet
p. 5
Cross-reference to page 5
RS-232
Label on the product indicating an operating element (example:
RS-232 interface socket)
Warning signs attached to the product that refer to detailed
information in this manual.
1.3 Definition of Terms
Term Explanation
Positioner
Electrically driven mechanics (here: P-54x) with one or more motion
axes
Electronics
Piezo amplifier or piezo controller that supplies the operating voltage
for positioners or piezo actuators
Piezo amplifier
Electronics without sensor evaluation for open-loop operating of
positioners and piezo actuators
Piezo controller
Electronics with sensor evaluation for closed-loop operating of
positioners and piezo actuators
1.4 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.

1 About this Document
P-54x Nanopositioner PZ244E Version: 1.2.0 3
1.5 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in
separate manuals.
Product Document
E-503 Piezo Amplifier Module
PZ62E User Manual
E-505 Piezo Amplifier Module
E-610 Piezo Amplifier / Servo Controller (OEM
Module)
PZ70E User Manual
PZ72E User Manual
E-621 Piezo Amplifier/Servo Controller Module
PZ160E User Manual
E-625 Piezo Servo Controller (Benchtop
Device)
PZ166E User Manual
E-663 Piezo Amplifier
PZ69 User Manual
E-712 Digital Piezo Controller (Modular
System)
PZ195E User Manual
E-727.x • E-727.xAP Digital Multi-Channel
Piezo Controller
E727T0005 User Manual
E-727.xF Digital Multi-Channel Piezo Controller
E-754 Digital Piezo Controller
E754T0001 User Manual
PIMikroMove SM148E Software Manual
P-5xx / P-6xx / P-7xx Piezo Positioning Systems
PZ240EK Short Instructions
The latest versions of the user manuals are available for download (p. 3) on our website.
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 33).
Downloading manuals
1. Open the website www.pi.ws.
2. Search the website for the product number (e.g., P-541) or the product family (e.g.,
nanopositioner).
3. Click the corresponding product to open the product detail page.
4. Click the Downloads tab.
The manuals are shown under Documentation. Software manuals are shown under
General Software Documentation.
5. Click the desired manual and fill out the inquiry form.
The download link will then be sent to the email address entered.

2 Safety
P-54x Nanopositioner PZ244E Version: 1.2.0 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions ........................................................................................................... 5
Organizational Measures ............................................................................................................... 7
2.1 Intended Use
The P-54x is a laboratory device as defined by DIN EN 61010-1. It is intended for indoor use and
use in an environment that is free of dirt, oil, and lubricants.
According to its design, the P-54x is intended for fine positioning as well as moving small objects
quickly and precisely. The specifications for the P-54x apply to horizontal mounting. Depending
on the version, moving is done as follows:
Model Motion Axis
.2xx
In two axes horizontally
X, Y
.Zxx
In one axis vertically
Z
.Txx In one axis vertically and in two axes rotationally Z, θX, θY
The P-54x can only be used as intended in conjunction with suitable electronics (p. 12) available
from PI. The electronics are not in the P-54x's scope of delivery.
The electronics must provide the required operating voltages. To ensure proper performance of
the servo control system, the electronics must also be able to read out and process the signals
from the position sensors.
2.2 General Safety Instructions
The P-54x is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the P-54x.
Use the P-54x for its intended purpose only, and only when it is in perfect technical
condition.
Read the user manual.
Eliminate any malfunctions that may affect safety immediately.
The operator is responsible for the correct installation and operation of the P-54x.
2
Safety

2 Safety
6 Version: 1.2.0 PZ244E P-54x Nanopositioner
The P-54x is driven by piezo actuators. Temperature changes and compressive stresses can
induce charges in piezo actuators. After disconnection from the electronics, piezo actuators can
remain charged for several hours. Touching or short-circuiting the contacts in the connector of
the P-54x can lead to minor injuries from electric shock. The piezo actuators can be destroyed
by an abrupt contraction.
Do not open the P-54x.
Discharge the positioner's piezo actuators before installing:
Connect the positioner to the switched-off PI electronics equipped with an internal
discharge resistor.
Do not pull the plug connector out of the electronics during operation.
Positioners with D-sub plug connector:
Touching the contacts in the plug connector can lead to an electric shock (max. 130 V DC) and
minor injuries.
Do not touch the contacts in the plug connector.
Use screws to secure the positioner's connector against being pulled out of the
electronics.
If a protective earth conductor is not or not properly connected, dangerous touch voltages can
occur on the P-54x in the case of malfunction or failure of the system. If there are touch
voltages, touching the P-54x can result in minor injuries from electric shock.
Connect the P-54x to a protective earth conductor (p. 18) before starting.
Do not remove the protective earth conductor during operation.
If the protective earth conductor has to be removed temporarily (e.g., in the case of
modifications), reconnect the P-54x to the protective earth conductor before restarting.
Mechanical forces can damage or misalign the P-54x.
Avoid impacts that affect the P-54x.
Do not drop the P-54x.
Do not exceed the maximum permissible stress and load capacities according to the
specifications (p. 35).
Do not touch any sensitive parts (e.g., platform) when handling the P-54x.
The P-54x is maintenance-free and achieves its positioning accuracy as a result of the optimal
alignment of mechanical components and piezo actuators. Loosened screws cause a loss in
positioning accuracy.
Loosen screws only when instructed in this manual.
Do not open the P-54x.