PI P-56 Series User manual

Physik Instrumente (PI) GmbH & Co. KG · Auf der Römerstr. 1 76228 Karlsruhe, Germany
Phone [phone] · Fax [phone] · E-mail [e-mail]
PZ248E
P-56x Nanopositioners
User Manual
Version: 1.0.0
Date: 22.11.2013
This document describes the following
products:
P-561
PIMars XYZ Nanopositioning System
P-561.3CD/.3CL, 100 µm × 100 µm × 100 µm
P-561.3DD, 45 µm × 45 µm × 15 µm, Direct
Drive
P-562
PIMars XYZ Nanopositioning System
P-562.3CD/.3CL, 200 µm × 200 µm × 200 µm
P-563
PIMars XYZ Nanopositioning System
P-563.3CD/.3CL, 300 µm × 300 µm × 300 µm
.3CD/.3DD with Sub-D connector
.3CL with LEMO connectors

Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®,
NanoCube®, NanoAutomation®, Picoactuator®, PInano®
The products described in this document are in part protected by the following patents:
German patent no. 10021919C2
German patent no. 10234787C1
German patent no. 10348836B3
German patent no. 102005015405B3
German patent no. 102007011652B4
US patent no. 7,449,077
Japanese patent no. 4667863
Chinese patent no. ZL03813218.4
© 2013 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text,
photographs and drawings in this manual are protected by copyright. With regard
thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights. Use of said
text, photographs and drawings is permitted only in part and only upon citation of the
source.
Original instructions
First printing: 22.11.2013
Document number: PZ248E, CBo, Version 1.0.0
Subject to change without notice. This manual is superseded by any new release. The
latest release is available for download (p. 3) on our website.

1About this Document 1
1.1 Goal and Target Audience of this User Manual ...................................................1
1.2 Symbols and Typographic Conventions...............................................................1
1.3 Other Applicable Documents................................................................................3
1.4 Downloading Manuals ..........................................................................................3
2Safety 5
2.1 Intended Use ........................................................................................................5
2.2 General Safety Instructions..................................................................................5
2.3 Organizational Measures......................................................................................7
3Product Description 9
3.1 Model Overview....................................................................................................9
3.2 Product View.......................................................................................................10
3.3 Product Labeling.................................................................................................11
3.4 Scope of Delivery ...............................................................................................12
3.5Recommended Piezo Controllers.......................................................................13
3.6 Technical Features.............................................................................................13
3.6.1 PICMA® Piezo Actuators .................................................................13
3.6.2 Flexure Guides .................................................................................14
3.6.3 Capacitive Sensors...........................................................................14
3.6.4 ID Chip (Only Models With Sub-D Connector).................................14
4Unpacking 15
5Installation 17
5.1 General Notes on Installation.............................................................................17
5.2 Connecting the P-56x to the Protective Earth Conductor ..................................19
5.3 Mounting the P-56x ............................................................................................21
5.4 Affixing the Load.................................................................................................23
5.5 Connecting the Adapter Cable to the P-56x (Only P-56x.3CL Models).............25
6Start-Up and Operation 27
6.1 General Notes on Start-Up and Operation.........................................................27
6.2 Operating the P-56x ...........................................................................................29
6.3 Discharging the P-56x ........................................................................................30
Contents

7Maintenance 31
7.1 General Notes on Maintenance..........................................................................31
7.2 Packing the P-56x for Transport.........................................................................31
7.3 Cleaning the P-56x.............................................................................................33
8Troubleshooting 35
9Customer Service 37
10 Technical Data 39
10.1 Specifications......................................................................................................39
10.1.1 Data Table........................................................................................39
10.1.2 Maximum Ratings.............................................................................40
10.2 Ambient Conditions and Classifications .............................................................41
10.3 Dimensions.........................................................................................................42
10.4 Torque for Stainless Steel Screws (A2-70)........................................................43
10.5 Pin Assignment...................................................................................................44
11 Old Equipment Disposal 47
12 EC Declaration of Conformity 49

1 About this Document
P-56x Nanopositioners PZ248E Version: 1.0.0 1
In this Chapter
Goal and Target Audience of this User Manual ............................................................ 1
Symbols and Typographic Conventions........................................................................ 1
Other Applicable Documents......................................................................................... 3
Downloading Manuals................................................................................................... 3
1.1 Goal and Target Audience of this User Manual
This user manual contains the necessary information for the intended use of the P-56x
(x stands for the different models, p. 9).
Basic knowledge of control technology, drive technologies and suitable safety
measures is assumed.
The latest versions of the user manuals are available for download (p. 3) on our
website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injury.
Actions to take to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
1 About this Document

1 About this Document
2Version: 1.0.0 PZ248E P-56x Nanopositioners
INFORMATION
Information for easier handling, tricks, tips, etc.
Symbol/
Label Meaning
1.
2. Action consisting of several steps whose sequential
order must be observed
Action consisting of one or several steps whose
sequential order is irrelevant
List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the product
(example: socket of the RS-232 interface)
Warning signs affixed to the product that refer to
detailed information in this manual.

1 About this Document
P-56x Nanopositioners PZ248E Version: 1.0.0 3
1.3 Other Applicable Documents
The devices and software tools which are mentioned in this documentation are
described in their own manuals.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Product Document
E-500 modular piezo controller PZ62E
E-509.C3A control module for capacitive sensors PZ77E
E-503 3-channel amplifier PZ62E
E-505 single-channel high-performance amplifier PZ62E
E-517 interface and display module PZ214E
E-712 digital piezo controller PZ195E
E-725 digital piezo controller PZ197E
E-761 digital piezo controller PZ164E
P-5xx / P-6xx / P-7xx piezo positioning systems PZ240EK Short Instructions
1.4 Downloading Manuals
INFORMATION
If a manual is missing on our website or if there are problems in downloading:
Contact our customer service department (p. 37).
The current versions of the manuals are found on our website. For some products
(e.g. Hexapod systems and electronics that are delivered with a CD), access to the
manuals is password-protected. The password is stored on the CD.

1 About this Document
4Version: 1.0.0 PZ248E P-56x Nanopositioners
Download freely accessible manuals
1. Open the website http://www.pi-portal.ws.
2. Click Downloads.
3. Click the corresponding category (e.g. P Piezo Actuators, Nanopositioning
& Scanning Systems)
4. Click the corresponding product code (e.g. P-561).
5. Click Documents.
The available manuals are displayed.
6. Click the desired manual and save it on the hard disk of your PC or on a data
storage medium.
Download password-protected manuals
1. Carry out steps 1 to 5 of the download process for freely accessible manuals.
2. Insert the product CD in the PC drive.
3. Switch to the Manuals directory on the CD.
4. In the Manuals directory, open the Release News (file including releasenews
in the file name).
5. Find the user name and password in the User login for software download
section in the Release News.
6. In the User login area on the left margin in the website, enter the user name
and the password in the corresponding fields.
7. Click Login.
The available manuals are displayed.
8. Click the desired manual and save it on the hard disk of your PC or on a data
storage medium.

2 Safety
P-56x Nanopositioners PZ248E Version: 1.0.0 5
In this Chapter
Intended Use ................................................................................................................. 5
General Safety Instructions........................................................................................... 5
Organizational Measures............................................................................................... 7
2.1 Intended Use
The P-56x is a laboratory device as defined by DIN EN 61010-1. It is intended to be
used in interior spaces and in an environment which is free of dirt, oil, and lubricants.
Based on its design and realization, the P-56x is intended for fine positioning as well
as the fast and precise motion of small objects. The specifications of the P-56x apply
to horizontal mounting. The motion takes place in three axes horizontally and
vertically.
The intended use of the P-56x is only possible in combination with suitable drive and
control electronics (p. 13) available from PI. The electronics is not included in the
scope of delivery of the P-56x.
The electronics must provide the required operating voltages. To ensure proper
performance of the servo-control system, the electronics must be able to read out and
process the signals from the capacitive sensors.
2.2 General Safety Instructions
The P-56x is built according to state-of-the-art technology and recognized safety
standards. Improper use can result in personal injury and/or damage to the P-56x.
Only use the P-56x for its intended purpose, and only use it if it is in a good
working order.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect
safety.
The operator is responsible for the correct installation and operation of the P-56x.
2 Safety

2 Safety
6Version: 1.0.0 PZ248E P-56x Nanopositioners
The P-56x is driven by piezo actuators. Temperature changes and compressive
stresses can induce charges in piezo actuators. After being disconnected from the
electronics, piezo actuators can also stay charged for several hours. Touching or
short-circuiting the contacts in the connector of the P-56x can lead to minor injuries.
In addition, the piezo actuators can be destroyed by an abrupt contraction.
Do not open the P-56x.
Discharge the piezo actuators of the stage before installation:
Connect the stage to the switched-off PI controller, which is equipped with an
internal discharge resistor.
Do not pull out the connector from the electronics during operation.
For stages with Sub-D connector:
Touching the contacts in the connector can lead to an electric shock (max. 130 V DC)
and minor injuries.
Do not touch the contacts in the connector.
Secure the connector of the stage with screws against being pulled out of the
controller.
If a protective earth conductor is not or not properly connected, dangerous touch
voltages can occur on the P-56x in the case of malfunction or failure of the system.
If touch voltages exist, touching the P-56x can result in minor injuries from electric
shock.
Connect the P-56x to a protective earth conductor (p. 19) before start-up.
Do not remove the protective earth conductor during operation.
If the protective earth conductor has to be removed temporarily (e. g. in the
case of modifications), reconnect the P-56x to the protective earth conductor
before starting it up again.
Mechanical forces can damage or misalign the P-56x.
Avoid impacts that affect the P-56x.
Do not drop the P-56x.
Do not exceed the maximum permissible stress and load capacities according
to the specifications (p. 39).
Only hold the P-56x externally by the base body.

2 Safety
P-56x Nanopositioners PZ248E Version: 1.0.0 7
The P-56x is maintenance-free and achieves its positioning accuracy as a result of the
optimum alignment of mechanical components and piezo actuators. Loosened screws
cause a loss in positioning accuracy.
Only loosen screws according to the instructions in this manual.
Do not open the P-56x.
2.3 Organizational Measures
User manual
Always keep this user manual available by the P-56x.
The latest versions of the user manuals are available for download (p. 3) on
our website.
Add all information given by the manufacturer to the user manual, for example
supplements or Technical Notes.
If you pass the P-56x on to other users, also turn over this user manual as
well as other relevant information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing
information due to an incomplete user manual can result in minor injury and
property damage.
Only install and operate the P-56x after having read and understood this user
manual.
Personnel qualification
The P-56x may only be installed, started up, operated, maintained and cleaned by
authorized and appropriately qualified personnel.

3 Product Description
P-56x Nanopositioners PZ248E Version: 1.0.0 9
In this Chapter
Model Overview............................................................................................................. 9
Product View ............................................................................................................... 10
Product Labeling.......................................................................................................... 11
Scope of Delivery ........................................................................................................ 12
Recommended Piezo Controllers................................................................................ 13
Technical Features...................................................................................................... 13
3.1 Model Overview
The following standard versions of the P-56x are available:
Model Description
P-561.3CD PIMars XYZ nanopositioning system with large travel range,
100 µm × 100 µm × 100 µm, capacitive sensors, parallel
metrology, Sub-D connector(s)
P-561.3CL PIMars XYZ nanopositioning system with large travel range,
100 µm × 100 µm × 100 µm, capacitive sensors, parallel
metrology, LEMO connector(s)
P-561.3DD PIMars high-dynamics XYZ nanopositioning system, 45 µm ×
45 µm × 15 µm, capacitive sensors, parallel metrology, Sub-D
connector(s), direct drive
P-562.3CD PIMars XYZ nanopositioning system with large travel range,
200 µm × 200 µm× 200 µm, capacitive sensors, parallel
metrology, Sub-D connector(s)
P-562.3CL PIMars XYZ nanopositioning system with large travel range,
200 µm × 200 µm × 200 µm, capacitive sensors, parallel
metrology, LEMO connector(s)
3 Product Description

3 Product Description
10 Version: 1.0.0 PZ248E P-56x Nanopositioners
Model Description
P-563.3CD PIMars XYZ nanopositioning system with large travel range,
300 µm × 300 µm × 300 µm, capacitive sensors, parallel
metrology, Sub-D connector(s)
P-563.3CL PIMars XYZ nanopositioning system with large travel range,
300 µm × 300 µm × 300 µm, capacitive sensors, parallel
metrology, LEMO connector(s)
3.2 Product View
The figure serves as an example and can differ from your stage model.
Figure 1: Example of product view
1 Moving platform
2 Cable exit
3 Protective earth connection
4 Base body
X, Y, Z (Positive) directions of motion of the stage

3 Product Description
P-56x Nanopositioners PZ248E Version: 1.0.0 11
3.3 Product Labeling
Figure 2: P-56x: Type plate (example view)
1 Product name
2 Serial number
3 Brand name
4 Country of origin
5 Manufacturer's logo
6 CE conformity mark
7 Manufacturer's address (website)
8 Disposal of used devices
9 Warning sign "Observe manual!"
Figure 3: P-56x: "'Residual voltage" warning sign on connector
Warning sign "Residual voltage": Notice of risk of electric shock (p. 5)

3 Product Description
12 Version: 1.0.0 PZ248E P-56x Nanopositioners
3.4 Scope of Delivery
Order Number Items
P-56x Stage according to order (p. 9)
- Transport lock, consisting of:
Support frame
4 plastic screws
000036450 M4 screw set for protective earth, consisting of:
1 M4x8 flat-head screw with cross recess, ISO 7045
2 safety washers
2 flat washers
P500T0002 Technical Note with instructions on unpacking and
packing P-5xx stages
PZ240EK Short instructions for piezo positioning systems
Only for P-56x.3CL models:
E71000211 Adapter cable, Sub-D Mix 25W3 to LEMO, 1 m
(for connection to E-500 systems)

3 Product Description
P-56x Nanopositioners PZ248E Version: 1.0.0 13
3.5 Recommended Piezo Controllers
To operate a P-56x, you need a piezo controller. The device is selected depending on
the type of application. The table below lists suitable controllers (X = suitable).
Controller
Channels P-56x.3CD P-56x.3DD P-56x. 3CL
E-500 modular piezo controller with E-509.C3A control module for
capacitive sensors and E-503 3-channel amplifier
Optional: E-517 interface and display module
3 – X
E-500 modular piezo controller with E-509.C3A control module for
capacitive sensors and 3× E-505 1-channel high-performance
amplifier
Optional: E-517 interface and display module
3 – X
E-712 digital piezo controller, modular system for up to 6 axes 3 / 6 X –
E-725 digital piezo controller for up to 3 axes 3 X –
E-761 digital piezo controller for up to 3 axes, PCI card 3 X –
3.6 Technical Features
3.6.1 PICMA® Piezo Actuators
P-56x stages are driven by PICMA® piezo actuators. PICMA® actuators have
all-ceramic insulation and are therefore far superior to conventional actuators in
respect to performance and lifetime. The monolithic piezoceramic block is protected
against humidity and failure due to increased leakage current by a ceramic insulation
layer. In this way, an especially high reliability is achieved even under extreme
ambient conditions. In contrast to motorized drives, there are no rotating parts or
friction. The piezo actuators are therefore backlash-, maintenance- and wear-free.

3 Product Description
14 Version: 1.0.0 PZ248E P-56x Nanopositioners
3.6.2 Flexure Guides
P-56x stages have flexure guides (flexures) for frictionless motion and high guiding
accuracies.
A flexure guide is an element which is free from static and sliding friction. It is based
on the elastic deformation (bending) of a solid (e.g. steel) and does not have any
rolling or sliding parts. Flexure elements have a high stiffness and load capacity.
Flexure guides are maintenance- and wear-free. They are 100 % vacuum compatible,
function in a wide temperature range and do not require any lubricants.
3.6.3 Capacitive Sensors
Capacitive sensors measure the position directly on the moving platform (direct
metrology) and work without contact. Neither friction nor hysteresis interferes with the
motion, which allows excellent linearity values to be achieved in combination with the
high position resolution. In connection with suitable electronics, capacitive sensors
achieve the best resolution, stability and bandwidth.
3.6.4 ID Chip (Only Models With Sub-D Connector)
An ID chip is located in the Sub-D connector of the stage. When the stage is
calibrated at the factory with digital electronics, the calibration data is saved together
with specific product information on the ID chip. When switched on, digital electronics
read the data from the ID chip of the connected stage. Stages whose ID chip contains
the calibration data can therefore be connected to any suitable digital electronics
without a new calibration.
For more information on the ID chip, see the manual of the controller used.

4 Unpacking
P-56x Nanopositioners PZ248E Version: 1.0.0 15
NOTICE
Mechanical overload from incorrect handling!
An impermissible mechanical overload of the moving platform of the P-56x can
cause damage to the piezo actuators, sensors and flexure joints of the P-56x as well
as losses of accuracy.
Only ship the P-56x in the original packaging.
Only hold the P-56x externally by the base body.
The P-56x is delivered with installed transport lock. The following figures serve as
examples and can differ from your stage model.
Figure 4: Exemplary view: Stage with transport lock (support frame marked with arrow) for protecting the
moving platform
Tools and accessories
Suitable screwdriver
Unpacking the P-56x
1. Unpack the P-56x with care.
2. Compare the contents against the items covered by the contract and against
the packing list. If parts are incorrectly supplied or missing, contact PI
immediately.
4 Unpacking

4 Unpacking
16 Version: 1.0.0 PZ248E P-56x Nanopositioners
3. Inspect the contents for signs of damage. If you notice signs of damage,
contact PI immediately.
4. Remove the transport lock:
a) Place the P-56x on a surface with the support frame facing downwards.
b) Release the four plastic screws with a screwdriver. In the following figure,
one of the screws is marked with an arrow.
c) Remove the plastic screws and the support frame.
5. Keep all packaging materials and the transport lock in case the product needs
to be transported again later.