PI P-611 Series User manual

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
PZ253E
P-611 Positioning Systems
User Manual
Version: 1.1.0
Date: 25.03.2019
This document describes the following products:

P-611.1
Linear piezo positioning system
P-611.1S/.10

P-611.XZ / P-611.2
XZ and XYZ nanopositioner
P-611.2S/.20/.XZS/.XZ0

P-611.3
NanoCube® XYZ system
P-611.3S/.3SF/.3O/.3OF

P-611.Z
Piezo Z stage
P-611.ZS/.Z0
.1S/.10/.2S/.20/.XZS/.XZ0/.ZS/.Z0
= with LEMO connector(s)
.3S/.3SF/.3O/.3OF
= with D-sub connector

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list:
http://www.physikinstrumente.com/en/about-pi/patents
© 2019 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 25.03.2019
Document number: PZ253E, CBo, Version 1.1.0
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Audience of this User Manual.................................................. 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Figures ........................................................................................................................ 2
1.4 Other Applicable Documents ..................................................................................... 2
1.5 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 6
2.3 Organizational Measures............................................................................................ 7
3Product Description 9
3.1 Model Overview ......................................................................................................... 9
3.2 Product View ............................................................................................................ 10
3.3 Product Labeling....................................................................................................... 12
3.4 Scope of Delivery...................................................................................................... 12
3.5 Suitable Electronics .................................................................................................. 13
3.6 Accessories ............................................................................................................... 13
3.7 Technical Features.................................................................................................... 13
3.7.1 PICMA® Piezo Actuators.............................................................................. 13
3.7.2 Flexure Guides ............................................................................................. 14
3.7.3 Strain Gauge Sensors (SGS) ......................................................................... 14
4Unpacking 15
5Installation 17
5.1 General Notes on Installation................................................................................... 17
5.2 Connecting the P-611 to the Protective Earth Conductor ....................................... 18
5.3 Mounting the P-611 ................................................................................................. 20
5.4 Fixing the Load.......................................................................................................... 22
6Startup and Operation 25
6.1 General Notes on Startup and Operation ................................................................ 25
6.2 Operating the P-611 ................................................................................................. 26
6.3 Discharging the P-611............................................................................................... 27
Contents

7Maintenance 29
7.1 General Notes on Maintenance ............................................................................... 29
7.2 Cleaning the P-611 ................................................................................................... 29
8Troubleshooting 31
9Customer Service 33
10 Technical Data 35
10.1 Specifications............................................................................................................ 35
10.1.1 Data Table.................................................................................................... 35
10.1.2 Maximum Ratings........................................................................................ 39
10.1.3 Ambient Conditions and Classifications ...................................................... 40
10.2 Dimensions ............................................................................................................... 41
10.3 Torque for Stainless Steel Screws (A2-70)................................................................ 48
10.4 Pin Assignment ......................................................................................................... 48
11 Old Equipment Disposal 51
12 EU Declaration of Conformity 53

1 About this Document
P-611 Positioning Systems PZ253E Version: 1.1.0 1
In this Chapter
Objective and Target Audience of this User Manual ..................................................................... 1
Symbols and Typographic Conventions......................................................................................... 1
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 2
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Audience of this User Manual
This user manual contains the necessary information for the intended use of the P-611 (x stands
for the different models (p. 9)).
Basic knowledge of control technology, drive technologies and suitable safety measures is
assumed.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
Failure to comply could lead to minor injury.
Precautionary measures for avoiding.
NOTICE
Dangerous situation
Failure to comply could cause damage to equipment.
Precautionary measures for avoiding.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 1.1.0 PZ253E P-611 Positioning Systems
Symbol/
Label
Meaning
1.
2.
Action consisting of several steps whose sequential order must
be observed

Action consisting of one or several steps whose sequential order
is irrelevant

List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the product (example:
socket of the RS-232 interface)
Warning signs affixed to the product that refer to detailed
information in this manual.
1.3 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.
1.4 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in their
own manuals.
The latest versions of the user manuals are available for download (p. 3) on our website.
Product Document
E-503 Piezo Amplifier Module PZ62E User Manual
E-505 Piezo Amplifier Module
E-610 Piezo Amplifier / Servo Controller (OEM Module) PZ70E User Manual
E-621 Piezo Amplifier/Servo Controller Module
PZ115E User Manual
E-625 Piezo Servo Controller
PZ166E User Manual
E-663 Piezo Amplifier
PZ69E User Manual
E-664 NanoCube® Piezo Controller PZ99E User Manual
E-665 Piezo Amplifier / Servo Controller PZ127E User Manual
E-727.x • E-727.xAP Digital Multi-Channel Piezo
Controller
E727T0005 User Manual
E-727.xF Digital Multi-Channel Piezo Controller
E-836 Piezo Amplifier
PZ250E User Manual
PIMikroMove
SM148E Software Manual
P-5xx / P-6xx / P-7xx Piezo Positioning Systems PZ240EK Short Instructions

1 About this Document
P-611 Positioning Systems PZ253E Version: 1.1.0 3
1.5 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 33).
INFORMATION
For products that are supplied with software (CD in the scope of delivery), access to the
manuals is protected by a password. Protected content is only displayed on the website after
entering the access data.
You need the product CD to get the access data.
For products with CD: Get access data
1. Insert the product CD into the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews in the file
name).
4. Get the access data for downloading protected content in the "User login for software
download" section of the Release News. Possible methods for getting the access data:
−Link to a page for registering and requesting the access data
−User name and password is specified
5. If the access data needs to be requested via a registration page:
a) Follow the link in the Release News.
b) Enter the required information in the browser window.
c) Click Show login data in the browser window.
d) Note the user name and password shown in the browser window.
Downloading manuals
If you have requested access data for protected contents via a registration page (see above):
Click the links in the browser window to change to the content for your product and log
in using the access data that you received.

1 About this Document
4 Version: 1.1.0 PZ253E P-611 Positioning Systems
General procedure:
1. Open the website www.pi.ws.
2. If access to the manuals is protected by a password:
a) Click Login.
b) Log in with the user name and password.
3. Click Search.
4. Enter the product number up to the period (e.g., P-611) or the product family (e.g.,
NanoCube®) into the search field.
5. Click Start search or press the Enter key.
6. Open the corresponding product detail page in the list of search results:
a) If necessary: Scroll down the list.
b) If necessary: Click Load more results at the bottom of the list.
c) Click the corresponding product in the list.
7. Click the Downloads tab.
The manuals are shown under Documentation.
8. Click the desired manual and save it to the hard disk of your PC or to a data storage
medium.

2 Safety
P-611 Positioning Systems PZ253E Version: 1.1.0 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions............................................................................................................ 6
Organizational Measures ............................................................................................................... 7
2.1 Intended Use
The P-611 is a laboratory device as defined by DIN EN 61010-1. It is intended to be used in
interior spaces and in an environment which is free of dirt, oil, and lubricants.
Based on its design and realization, the P-611 is intended for fine positioning as well as the fast
and precise motion of small objects. The specifications of the P-611 apply to horizontal
mounting. The motion is performed as follows depending on the model:
Model Motion Axis
.1S/.10 in one axis horizontally X
.2S/.20
in two axes horizontally
X, Y
.XZS/.XZ0 in one axis horizontally and in one axis vertically X, Z
.3S/.3SF/.3O/.3OF
in two axes horizontally and in one axis vertically
X, Y, Z
.ZS/.Z0 in one axis vertically Z
Vertical mounting is only possible under certain conditions.
The intended use of the P-611 is only possible in conjunction with suitable electronics (p. 13)
available from PI. The electronics are not included in the scope of delivery of the P-611.
The electronics must provide the required operating voltages. To ensure proper performance of
the servo control system, the electronics must also be able to read out and process the signals
from the position sensors.
2
Safety

2 Safety
6 Version: 1.1.0 PZ253E P-611 Positioning Systems
2.2 General Safety Instructions
The P-611 is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the P-611.
Use the P-611 for its intended purpose only, and only when it is in perfect technical
condition.
Read the user manual.
Eliminate any faults and malfunctions likely to affect safety immediately.
The operator is responsible for the correct installation and operation of the P-611.
The P-611 is driven by piezo actuators. Temperature changes and compressive stresses can
induce charges in piezo actuators. After disconnection from the electronics, piezo actuators can
remain charged for several hours. Touching or short-circuiting the contacts in the connector of
the P-611 can lead to minor injuries from electric shock. The piezo actuators can be destroyed
by an abrupt contraction.
Do not open the P-611.
Discharge the positioner's piezo actuators before installation:
Connect the positioner to the switched-off PI controller, which is equipped with an
internal discharge resistor.
Do not pull the plug connector out of the electronics during operation.
Positioners with D-sub plug connector:
Touching the contacts in the plug connector can lead to an electric shock (max. 130 V DC) and
minor injuries.
Do not touch the contacts in the plug connector.
Secure the plug connector of the positioner with screws against being pulled out of the
controller.
If a protective earth conductor is not or not properly connected, dangerous touch voltages can
occur on the P-611 in the case of malfunction or failure of the system. If touch voltages exist,
touching the P-611 can result in minor injuries from electric shock.
Connect the P-611 to a protective earth conductor (p. 18) before startup.
Do not remove the protective earth conductor during operation.
If the protective earth conductor has to be removed temporarily (e.g., in the case of
modifications), reconnect the P-611 to the protective earth conductor before restarting.

2 Safety
P-611 Positioning Systems PZ253E Version: 1.1.0 7
Mechanical forces can damage or misalign the P-611.
Avoid impacts that affect the P-611.
Do not drop the P-611.
Do not exceed the maximum permissible stress and load capacities according to the
specifications (p. 35).
Grip the surfaces indicated on the P-611's base body (p. 15) only.
The P-611 is maintenance-free and achieves its positioning accuracy as a result of the optimum
alignment of mechanical components and piezo actuators. Loosened screws cause a loss in
positioning accuracy.
Loosen screws only when instructed in this manual.
Do not open the P-611.
2.3 Organizational Measures
User manual
Always keep this user manual available with the P-611.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the P-611 to other users, also include this user manual as well as other
relevant information provided by the manufacturer.
Use the device only if the user manual is complete. Missing information due to an
incomplete user manual can result in minor injury and damage to equipment.
Install and operate the P-611 only after you have read and understood this user
manual.
Personnel qualification
The P-611 may only be installed, started, operated, maintained, and cleaned by authorized and
appropriately qualified personnel.

3 Product Description
P-611 Positioning Systems PZ253E Version: 1.1.0 9
In this Chapter
Model Overview............................................................................................................................. 9
Product View................................................................................................................................ 10
Product Labeling .......................................................................................................................... 12
Scope of Delivery ......................................................................................................................... 12
Suitable Electronics...................................................................................................................... 13
Accessories................................................................................................................................... 13
Technical Features ....................................................................................................................... 13
3.1 Model Overview
The following standard versions of the P-611 are available:
P-611.1: Linear piezo positioning system
Model Description
P-611.1S
Linear nanopositioning system, 100 µm, strain gauge sensor
P-611.10 Linear nanopositioning system, 120 µm, without sensor
P-611.XZ / P-611.2: XZ and XYZ nanopositioner
Model Description
P-611.2S XY nanopositioning system, 100 µm × 100 µm, strain gauge sensors
P-611.20 XY nanopositioning system, 120 µm × 120 µm, without sensor
P-611.XZS
XZ nanopositioning system, 100 µm × 100 µm, strain gauge sensors
P-611.XZ0 XZ nanopositioning system, 120 µm × 120 µm, without sensor
3
Product Description

3 Product Description
10 Version: 1.1.0 PZ253E P-611 Positioning Systems
P-611.3: NanoCube® XYZ system
Model Description
P-611.3S NanoCube® XYZ nanopositioning system, 100 µm × 100 µm × 100 µm,
strain gauge sensors
P-611.3SF NanoCube® XYZ nanopositioning system, 100 µm × 100 µm × 100 µm,
strain gauge sensors, integrated fiber holder
P-611.3O NanoCube® XYZ nanopositioning system, 120 µm × 120 µm × 120 µm,
without sensor
P-611.3OF NanoCube® XYZ nanopositioning system, 120 µm × 120 µm × 120 µm,
without sensor, integrated fiber holder
P-611.Z: Piezo Z stage
Model Description
P-611.ZS Vertical nanopositioning stage, 100 µm, strain gauge sensor
P-611.Z0 Vertical nanopositioning stage, 120 µm, without sensor
3.2 Product View
The figures serve as examples and can differ from your positioner model.
Figure 1: Example of product view
1Motion platform
2Base body
3Protective earth connector
4Cable exit

3 Product Description
P-611 Positioning Systems PZ253E Version: 1.1.0 11
Direction of motion of the P-611
The arrows indicate the positive direction of motion in each case.
P-611.1x
P-611.Zx
P-611.2x P-611.XZx
P-611.3x / P-611.3xF

3 Product Description
12 Version: 1.1.0 PZ253E P-611 Positioning Systems
3.3 Product Labeling
Labeling Description
P-611.XZS Product name (example), the characters following the
period refer to the model
123456789 Serial number (example), individual for each P-611
Meaning of each position (from the left):
1 = internal information
2 and 3 = year of manufacture
4 to 9 = consecutive number
NanoCube® Brand name (.3x and .3xF models only)
Country of origin: Germany Country of origin
Warning sign "Pay attention to the manual!"
Old equipment disposal (p. 51)
WWW.PI.WS Manufacturer's address (website)
Manufacturer's logo
CE conformity mark
Symbol for the protective earth conductor, marks the
protective earth connection of the P-611 (p. 18)
Figure 2: "Residual Voltage" warning sign on the connector of the P-611
"Residual Voltage" warning: Risk of electric shock (p. 6) for models with D-sub connector
3.4 Scope of Delivery
Product number Description
P-611
Positioner according to order (p. 9)
000036450
M4 screw set for protective earth, consisting of:
1 flat-head screw with cross recess, M4x8, ISO 7045
2 safety washers
2 flat washers
PZ240EK
Short instructions for piezo positioning systems

3 Product Description
P-611 Positioning Systems PZ253E Version: 1.1.0 13
3.5 Suitable Electronics
You need suitable electronics to operate a P-611. Selecting the device depends on the
application and the connectors available.
Electronics Connector* Channels**
E-505 Piezo Amplifier Module LEMO 1
E-610 Piezo Amplifier / Servo Controller (OEM module) LEMO 1
E-836 Piezo Amplifier LEMO 1
E-503 Piezo Amplifier Module LEMO 3
E-663 Piezo Amplifier LEMO 3
E-621 Piezo Amplifier/Servo Controller Module
D-sub 7W2
1
E-625 Piezo Servo Controller D-sub 7W2 1
E-665 Piezo Amplifier / Servo Controller D-sub 7W2 1
E-664 NanoCube® Piezo Controller D-sub 25 3
E-727.x • E-727.xAP Digital Multi-Channel Piezo
Controller
D-sub 25W3
3
E-727.xF Digital Multi-Channel Piezo Controller D-sub 25W3 3
* In some cases, adapter cables (p. 13) are necessary for connecting.
** When using single-channel electronics, each motion axis requires its own individual
electronics.
3.6 Accessories
Adapter cables for models with LEMO plug connectors
Product number Description
P-895.1LDC
Adapter cable LEMO to D-sub 7W2 (m) for piezo actuator nanopositioning
systems with capacitive sensors, 1 channel, length: 0.3 m.
P-895.3LDC Adapter cable LEMO to D-sub 25W3 (m) for piezo actuator nanopositioning
systems with capacitive sensors, 3 channels, length: 0.3 m.
To order, contact our customer service department (p. 33).
3.7 Technical Features
3.7.1 PICMA® Piezo Actuators
P-611 positioners are driven by PICMA® piezo actuators. PICMA® actuators have all-ceramic
insulation and their performance and lifetime are therefore far superior to conventional
actuators. The ceramic insulation layer protects the monolithic piezoceramic block against
humidity and failure due to increased leakage current. In this way, an especially high reliability
is achieved even under extreme ambient conditions. In contrast to motorized drives, there are
no rotating parts or friction. The piezo actuators are therefore free of backlash, maintenance,
and wear.

3 Product Description
14 Version: 1.1.0 PZ253E P-611 Positioning Systems
3.7.2 Flexure Guides
P-611 positioners have flexure guides for friction-free motion and high guiding accuracy.
A flexure guide is an element that is free of static and sliding friction. It is based on the elastic
deformation (bending) of a solid (e.g., steel) and does not have any rolling or sliding parts.
Flexure elements have a high stiffness and load capacity. Flexure guides are maintenance and
wear free. They are 100 % vacuum compatible, function in a wide temperature range and do
not require any lubricants.
3.7.3 Strain Gauge Sensors (SGS)
Strain gauge sensors derive the position information from their expansion. They are attached at
a suitable position in the drivetrain, where they measure the displacement of the positioner's
moving part against the base body. This type of position measuring is indirect and requires
contact, because the position of the motion platform is derived from a measurement on the
lever, guide or piezo stack.
The sensors operate in thermally drift-free full bridge circuitry and therefore ensure optimum
position stability in the nanometer range.

4 Unpacking
P-611 Positioning Systems PZ253E Version: 1.1.0 15
NOTICE
Mechanical overload from incorrect handling!
Impermissible mechanical loading of the motion platform as well as certain surfaces of the
P-611 can lead to damage to the piezo actuators, sensors and fle
xure joints of the P-611 as well
as to loss of accuracy. In addition, the P-611 can be damaged from tensile forces on the cable
exit and bending of the connecting cable.
Grip the surfaces indicated on the P-611's base body (p. 15) only.
Avoid tensile forces on the cable exit and do not bend the cable.
The figure serves as an example and can differ from your positioner model.
Figure 3: P-611: Holding surfaces to be used on the base body (see arrows)
Areas to be protected against the application of force:
- Motion platform (framed with a dashed line)
- Nonanodized surfaces (crosshatched)
1. Unpack the P-611 with care:
a) Spread the foam packaging apart with one hand.
b) Grip the positioner on the surfaces marked by the arrows.
c) Grip all of the positioner's connecting cables with your other hand.
d) At the same time, remove the positioner and the connecting cables carefully from
the foam packaging.
2. Compare the contents of the shipment with the items listed in the contract and the
delivery note.
3. Inspect the contents for signs of damage. If there is any sign of damage or missing parts,
contact PI immediately.
4. Keep all packaging materials in case the product needs to be returned.
4
Unpacking

4 Unpacking
16 Version: 1.1.0 PZ253E P-611 Positioning Systems