PI P-63 Series User manual

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
PZ247E
P
-63x Nanopositioner
User Manual
Version: 1.1.0
Date: 29.04.2022
This document describes the following products:

P-630.XCD
Linear piezo nanopositioner with aperture,
40 µm, direct position measuring, capacitive
sensor

P-631.XCD
Linear piezo nanopositioner with aperture,
80 µm, direct position measuring, capacitive
sensor

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list:
https://www.physikinstrumente.com/en/about-pi/patents
© 2022 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 29.04.2022
Document number: PZ247E, CBo, Version 1.1.0
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Group of this User Manual ...................................................... 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Definition of Terms..................................................................................................... 2
1.4 Figures ........................................................................................................................ 2
1.5 Other Applicable Documents ..................................................................................... 2
1.6 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 7
3Product Description 9
3.1 Model Overview ......................................................................................................... 9
3.2 Product View .............................................................................................................. 9
3.3 Product Labeling....................................................................................................... 10
3.4 Scope of Delivery...................................................................................................... 11
3.5 Suitable Electronics .................................................................................................. 11
3.6 Technical Features.................................................................................................... 12
3.6.1 PICMA® Piezo Actuators .............................................................................. 12
3.6.2 Flexure Guides ............................................................................................. 12
3.6.3 Capacitive Sensors ....................................................................................... 12
3.6.4 ID Chip.......................................................................................................... 12
4Unpacking 13
5Installation 15
5.1 General Notes on Installing ...................................................................................... 15
5.2 Connecting the P-63x to the Protective Earth Conductor........................................ 16
5.3 Mounting the P-63x.................................................................................................. 18
5.4 Fixing the Load.......................................................................................................... 19
5.5 Connecting the P-63x to the Electronics .................................................................. 22
6Starting and Operating 23
6.1 General Notes on Starting and Operating................................................................ 23
6.2 Operating the P-63x ................................................................................................. 24
6.3 Discharging the P-63x............................................................................................... 25
Contents

7Maintenance 27
7.1 General Notes on Maintenance ............................................................................... 27
7.2 Cleaning the P-63x.................................................................................................... 27
8Troubleshooting 29
9Customer Service 31
10 Technical Data 33
10.1 Specifications............................................................................................................ 33
10.1.1 Data Table.................................................................................................... 33
10.1.2 Maximum Ratings........................................................................................ 34
10.1.3 Ambient Conditions and Classifications ...................................................... 35
10.2 Dimensions ............................................................................................................... 35
10.3 Torque for Stainless Steel Screws (A2-70)................................................................ 36
10.4 Pin Assignment ......................................................................................................... 36
11 Old Equipment Disposal 39
12 European Declarations of Conformity 41

1 About this Document
P-63x Nanopositioner PZ247E Version: 1.1.0 1
In this Chapter
Objective and Target Group of this User Manual.......................................................................... 1
Symbols and Typographic Conventions ......................................................................................... 1
Definition of Terms ........................................................................................................................ 2
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 2
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Group of this User Manual
This user manual contains the information required for using the P-63x as intended ("x" stands
for the different models (p. 9)).
Basic knowledge of control technology, drive technologies, and suitable safety measures is
assumed.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
Failure to comply could lead to minor injury.
Precautionary measures for avoiding the risk.
NOTICE
Dangerous situation
Failure to comply could cause damage to equipment.
Precautionary measures for avoiding the risk.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 1.1.0 PZ247E P-63x Nanopositioner
Symbol/
Label
Meaning
1.
2.
Action consisting of several steps with strict sequential order

Action consisting of one or more steps without relevant sequential
order.

Bullet
p. 5
Cross-reference to page 5
RS-232
Label on the product indicating an operating element (example:
RS-232 interface socket)
Warning signs on the product that refer to detailed information in
this manual.
1.3 Definition of Terms
Term Explanation
Positioner
Electrically driven mechanics (here: P-63x) with one or more motion
axes
Electronics
Piezo amplifier or piezo controller that supplies the operating voltage
for positioners or piezo actuators
Piezo amplifier
Electronics without sensor evaluation for open-loop operation of
positioners and piezo actuators
Piezo controller
Electronics with sensor evaluation for closed-loop operation of
positioners and piezo actuators
1.4 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.
1.5 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in
separate manuals.
Product Document
E-709 Digital Piezo Controller
PZ222 User Manual
E-709.CHG Digital Piezo Controller PZ222 User Manual
E-709.1C1L Digital Piezo Controller
PZ305 User Manual
E-754 Digital Piezo Controller
E754T0001 User Manual
P-5xx / P-6xx / P-7xx Piezo Positioners
PZ240EK Short Instructions

1 About this Document
P-63x Nanopositioner PZ247E Version: 1.1.0 3
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 31).
Downloading Manuals
1. Open the website www.pi.ws.
2. Search the website for the product number (e.g., P-630) or the product family (e.g.,
nanopositioner).
3. Click the corresponding product to open the product detail page.
4. Click the Downloads tab.
The manuals are shown under Documentation. Software manuals are shown under
General Software Documentation.
5. Click the desired manual and fill out the inquiry form.
The download link will then be sent to the email address entered.

2 Safety
P-63x Nanopositioner PZ247E Version: 1.1.0 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
Organizational Measures ............................................................................................................... 7
2.1 Intended Use
The P-63x is a laboratory device as defined by DIN EN 61010-1. It is intended for indoor use and
use in an environment that is free of dirt, oil, and lubricants.
Inb accordance with its design, the P-63x is intended for fine positioning as well as the fast and
precise motion of small objects. The motion takes place linearly in one axis. The specifications
of the P-63x apply to horizontal mounting. Vertical mounting is only possible under certain
conditions (p. 18).
It is only possible to use the P-63x as intended in conjunction with suitable electronics (p. 11)
available from PI. The electronics is not included in the scope of delivery of the P-63x.
The electronics must provide the required operating voltages. To ensure proper performance of
the servo control system, the electronics must be able to read out and process the signals from
the capacitive sensors.
2.2 General Safety Instructions
The P-63x is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the P-63x.
Use the P-63x for its intended purpose only, and only when it is in perfect technical
condition.
Read the user manual.
Eliminate any malfunctions that may affect safety immediately.
The operator is responsible for the correct installation and operation of the P-63x.
2
Safety

2 Safety
6 Version: 1.1.0 PZ247E P-63x Nanopositioner
The P-63x is driven by piezo actuators. Temperature changes and compressive stress can induce
charges in piezo actuators. Piezo actuators can remain charged for several hours after
disconnecting the electronics. Touching or short-circuiting the contacts in the P-63x's connector
can lead to minor injuries from electric shock. The piezo actuators can be destroyed by an
abrupt contraction.
Do not open the P-63x.
Discharge the positioner's piezo actuators before installing:
Connect the positioner to the switched-off PI electronics equipped with an internal
discharge resistor.
Do not pull the plug connector out of the electronics during operation.
Touching the contacts in the plug connector can lead to an electric shock (max. 130 V DC) and
minor injuries.
Do not touch the contacts in the plug connector.
Use screws to secure the positioner's connector against being pulled out of the
electronics.
If a protective earth conductor is not or not properly connected, dangerous touch voltages can
occur on the P-63x in the case of malfunction or failure of the system. If there are touch
voltages, touching the P-63x can result in minor injuries from electric shock.
Connect the P-63x to a protective earth conductor (p. 16) before starting.
Do not remove the protective earth conductor during operation.
If the protective earth conductor has to be removed temporarily (e.g., in the case of
modifications), reconnect the P-63x to the protective earth conductor before restarting.
Mechanical forces can damage or misalign the P-63x.
Avoid impacts that affect the P-63x.
Do not drop the P-63x.
Do not exceed the maximum permissible stress and load capacities according to the
specifications (p. 33).
Do not touch any sensitive parts (e.g., motion platform) when handling the P-63x.
The P-63x is maintenance-free and achieves its positioning accuracy as a result of the optimal
alignment of mechanical components and piezo actuators. Loosened screws cause a loss in
positioning accuracy.
Loosen screws only when instructed in this manual.
Do not open the P-63x.

2 Safety
P-63x Nanopositioner PZ247E Version: 1.1.0 7
2.3 Organizational Measures
User manual
Always keep this user manual together with the P-63x.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the P-63x to a third party, include this user manual as well as other relevant
information provided by the manufacturer.
Do the work only if the user manual is complete. Missing information due to an
incomplete user manual can result in minor injury and damage to equipment.
Install and operate the P-63x only after you have read and understood this user manual.
Personnel qualification
The P-63x may only be installed, started, operated, maintained, and cleaned by authorized and
appropriately qualified personnel.

3 Product Description
P-63x Nanopositioner PZ247E Version: 1.1.0 9
In this Chapter
Model Overview............................................................................................................................. 9
Product View.................................................................................................................................. 9
Product Labeling .......................................................................................................................... 10
Scope of Delivery ......................................................................................................................... 11
Suitable Electronics...................................................................................................................... 11
Technical Features ....................................................................................................................... 12
3.1 Model Overview
The P-63x is available in the following versions:
Model Description
P-630.XCD
Linear piezo nanopositioner with aperture, 40 µm, direct position
measuring, capacitive sensor
P-631.XCD
Linear piezo nanopositioner with aperture, 80 µm, direct position
measuring, capacitive sensor
3.2 Product View
The figure serves as an example and can differ from your positioner model.
Pay attention to the symbols on your device.
Figure 1: Example of product view
3
Product Description

3 Product Description
10 Version: 1.1.0 PZ247E P-63x Nanopositioner
1Cable exit
2Protective earth connector (M4 hole)
3Motion platform
4Base body
X (Positive) direction of motion of the positioner
3.3 Product Labeling
Labeling Description
Manufacturer's logo
P-630.XCD
Product number (example)
123456789
Serial number (example), individual for each P-63x
Meaning of each position (from the left):
1 = internal information
2 and 3 = year of manufacture
4 to 9 = consecutive number
WWW.PI.WS
Manufacturer's address (website)
CE conformity mark
Warning sign "Pay attention to the manual!"
Symbol for the protective earth conductor (p. 16)
The arrow indicates the positive direction of motion.
Figure 2: "Residual Voltage" warning sign on the connector of the P-63x
Risk of electric shock (p. 5)

3 Product Description
P-63x Nanopositioner PZ247E Version: 1.1.0 11
3.4 Scope of Delivery
Product number Description
P-63x Positioner according to order (p. 9)
000036450
M4 screw set for protective earth, consisting of:
1 M4x8 flat-head screw with cross recess, ISO 7045
2 lock washers
2 flat washers
000044620
Screw set:
4 socket-head screws, M2.5x20, ISO 4762
1 hex key AF 2
PZ240EK
Short instructions for P-5xx / P-6xx / P-7xx piezo positioners
3.5 Suitable Electronics
You need suitable electronics to operate a P-63x. The device is selected depending on the type
of application.
Product number Description
E-709.CRG
Digital piezo controller, 1 axis, -30 to 130 V, capacitive sensor, benchtop
device
E-709.CR
Digital piezo controller, 1 axis, -30 to 130 V, capacitive sensor, OEM
module
E-709.CHG
Digital piezo controller, 1 channel, -30 to 130 V, capacitive sensor, high
power output, benchtop device
E-709.1C1L
Digital piezo controller, 1 axis, -30 to 130 V, capacitive sensor,
monitoring functionality, benchtop device
E-754.1CD
Single-channel, digital high-speed piezo controller for capacitive
sensors, with TCP/IP, USB, and RS-232 interface
To order, contact our customer service department (p. 31).

3 Product Description
12 Version: 1.1.0 PZ247E P-63x Nanopositioner
3.6 Technical Features
3.6.1 PICMA® Piezo Actuators
P-63x positioners are driven by PICMA® piezo actuators. PICMA® actuators have all-ceramic
insulation and their performance and lifetime are therefore far superior to conventional
actuators. The ceramic insulation layer protects the monolithic piezoceramic block against
humidity and failure due to increased leakage current. In this way, an especially high reliability
is achieved even under extreme ambient conditions. In contrast to motorized drives, there are
no rotating parts or friction. The piezo actuators are therefore free of backlash, maintenance,
and wear.
3.6.2 Flexure Guides
P-63x positioners have flexure guides for friction-free motion and high guiding accuracy.
A flexure guide is an element that is free of static and sliding friction. It is based on the elastic
deformation (bending) of a solid (e.g., steel) and does not have any rolling or sliding parts.
Flexure elements have a high stiffness and load capacity. Flexure guides are maintenance and
wear free. They are 100% vacuum compatible, function in a wide temperature range and do not
require any lubricants.
3.6.3 Capacitive Sensors
Capacitive sensors measure the position directly on the platform (direct metrology) and work
without contact. Neither friction nor hysteresis interferes with the motion, which allows
excellent linearity values to be achieved together with the high position resolution. In
conjunction with suitable electronics, capacitive sensors achieve the best resolution, stability,
and bandwidth.
3.6.4 ID Chip
An ID chip is in the D-sub connector of the P-63x. When the P-63x is calibrated at the factory
with digital electronics, the calibration data is saved on the ID chip together with specific
product information. After switching on, the digital electronics read the data from the ID chip of
the P-63x connected. A P-63x with an ID chip containing calibration data can therefore be
connected to any suitable digital electronics without renewed calibration.
Refer to the manual for the controller for more information on the ID chip.

4 Unpacking
P-63x Nanopositioner PZ247E Version: 1.1.0 13
NOTICE
Mechanical overload due to incorrect handling!
An impermissible mechanical load on the motion platform of the P-63x can cause damage to
the piezo actuators, sensors, and flexures of the P-63x as well as loss of accuracy.
Do not touch any sensitive parts (e.g., motion platform) when handling the P-63x.
1. Unpack the P-63x with care.
2. Compare the contents with the scope of delivery according to the contract and the
delivery note.
3. Inspect the contents for signs of damage. If any parts are damaged or missing, contact
our customer service department (p. 31) immediately.
4. Keep all packaging materials in case the product needs to be returned.
4
Unpacking

5 Installation
P-63x Nanopositioner PZ247E Version: 1.1.0 15
In this Chapter
General Notes on Installing ......................................................................................................... 15
Connecting the P-63x to the Protective Earth Conductor ........................................................... 16
Mounting the P-63x ..................................................................................................................... 18
Fixing the Load ............................................................................................................................. 19
Connecting the P-63x to the Electronics...................................................................................... 22
5.1 General Notes on Installing
CAUTION
Dangerous voltage and residual charge in piezo actuators!
The P-63x is driven by piezo actuators. Temperature changes and compressive stress can
induce charges in piezo actuators. Piezo actuators can remain charged for several hours after
disconnecting the electronics. Touching or short-circuiting the contacts in the P-63x's
connector can lead to minor injuries from electric shock. The piezo actuators can be destroyed
by an abrupt contraction.
Do not open the P-63x.
Discharge the positioner's piezo actuators before installing:
Connect the positioner to the switched-off PI electronics equipped with an internal
discharge resistor.
Do
not
pull the plug connector out of the electronics during operation.
Touching the contacts in the plug connector can lead to an electric shock (max. 130 V DC) and
minor injuries.
Do not touch the contacts in the connector.
Use screws to secure the positioner's connector against being pulled out of the electronics.
NOTICE
Mechanical overload due to incorrect handling!
An impermissible mechanical load on the motion platform of the P-63x can cause damage to
the piezo actuators, sensors, and flexures of the P-63x as well as loss of accuracy.
Do
not
touch any sensitive parts (e.g., motion platform) when handling the P-63x.
5
Installation

5 Installation
16 Version: 1.1.0 PZ247E P-63x Nanopositioner
NOTICE
Damage due to unsuitable cables!
Unsuitable cables can damage the P-63x and the electronics.
Use cables provided by PI only to connect the P-63x to the electronics.
NOTICE
Damage due to improper mounting!
Improper mounting of the P-63x or incorrectly mounted parts can damage the P-63x.
Only use the holes or threads intended for the purpose of fixing the P-63x and loads.
Install the P-63x so that the platform and all parts attached to it can move freely within the
entire travel range.
NOTICE
Damage due to incorrectly tightened screws!
Incorrectly tightened screws can cause damage.
Pay attention to the torque range (p. 36) specified for the screws used during installation.
INFORMATION
Extension cables can reduce the positioning accuracy of the P-63x or affect sensor processing
by the electronics.
Do not use extension cables. If you need longer cables, contact our customer service
department (p. 31).
5.2 Connecting the P-63x to the Protective Earth Conductor
INFORMATION

Pay attention to the applicable standards for connecting the protective earth conductor.
INFORMATION

If there is any vibration in your application, secure the screw connection for the protective
earth conductor in a suitable manner (e.g., with conductive liquid adhesive) to prevent it
from unscrewing by itself. If this is not possible, check the screw connection at regular
intervals and retighten the screw if necessary.