PI P-73 Series User manual

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
PZ103E
P-73x Nanopositioner
User Manual
Version: 1.1.0
Date: 26.10.2020
This document describes the following products:

P-733.2
XY nanopositioner
P-733.2CD/.2CL, 100 µm × 100 µm
P-733.2DD, 30 µm × 30 µm, high dynamics,
direct drive

P-734.2
XY nanopositioner
P-734.2CD/.2CL, 100 µm × 100 µm, very high
travel accuracy

P-733.3
XYZ nanopositioner
P-733.3CD/.3CL, 100 µm × 100 µm × 10 µm
P-733.3DD, 30 µm × 30 µm × 10 µm, high
dynamics, direct drive

P-733.Z
Nanopositioner Z stage
P-733.ZCD/.ZCL, 100 µm
.2CD/.3CD/.2DD/.3DD with D-sub 25W3
connector (m)
.ZCD with D-sub 7W2 connector (m)
.2CL/.3CL/.ZCL with LEMO connector (m)

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list: https://www.physikinstrumente.com/en/about-pi/patents
© 2020 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 26.10.2020
Document number: PZ103E, CBo, Version 1.1.0
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Group of this User Manual ...................................................... 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Definition of Terms..................................................................................................... 2
1.4 Figures ........................................................................................................................ 2
1.5 Other Applicable Documents ..................................................................................... 2
1.6 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 7
3Product Description 9
3.1 Model Overview ......................................................................................................... 9
3.1.1 XY Nanopositioner ......................................................................................... 9
3.1.2 XY Nanopositioner with Direct Drive............................................................. 9
3.1.3 XYZ Nanopositioner ..................................................................................... 10
3.1.4 XYZ Nanopositioner with Direct Drive......................................................... 10
3.1.5 Nanopositioner Z Stage ............................................................................... 10
3.2 Product View ............................................................................................................ 11
3.3 Product Labeling....................................................................................................... 12
3.4 Scope of Delivery...................................................................................................... 13
3.5 Suitable Electronics .................................................................................................. 13
3.6 Accessories ............................................................................................................... 14
3.6.1 Adapter Plates ............................................................................................. 14
3.7 Technical Features.................................................................................................... 15
3.7.1 PICMA® Piezo Actuators .............................................................................. 15
3.7.2 Flexure Guides ............................................................................................. 15
3.7.3 Capacitive Sensors ....................................................................................... 15
3.7.4 ID Chip (Models with D-sub Connector Only).............................................. 15
4Unpacking 17
5Installation 19
5.1 General Notes on Installation................................................................................... 19
5.2 Connecting the P-73x to the Protective Earth Conductor........................................ 20
5.3 Mounting the P-73x.................................................................................................. 22
Contents

5.4 Fixing the Load.......................................................................................................... 23
5.5 Connecting the P-73x to the Electronics .................................................................. 25
6Starting and Operating 27
6.1 General Notes on Starting and Operating................................................................ 27
6.2 Operating the P-73x ................................................................................................. 29
6.3 Discharging the P-73x............................................................................................... 29
7Maintenance 31
7.1 General Notes on Maintenance ............................................................................... 31
7.2 Cleaning the P-73x.................................................................................................... 31
8Troubleshooting 33
9Customer Service 35
10 Technical Data 37
10.1 Specifications............................................................................................................ 37
10.1.1 Data Table.................................................................................................... 37
10.1.2 Maximum Ratings........................................................................................ 42
10.1.3 Ambient Conditions and Classifications ...................................................... 42
10.2 Dimensions ............................................................................................................... 43
10.3 Torque for Stainless Steel Screws (A2-70)................................................................ 48
10.4 Pin Assignment ......................................................................................................... 49
11 Old Equipment Disposal 53
12 EU Declaration of Conformity 55

1 About this Document
P-73x Nanopositioner PZ103E Version: 1.1.0 1
In this Chapter
Objective and Target Group of this User Manual.......................................................................... 1
Symbols and Typographic Conventions ......................................................................................... 1
Definition of Terms ........................................................................................................................ 2
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 2
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Group of this User Manual
This user manual contains the information required for using the P-73x as intended ("x" stands
for the different models (p. 9)).
Basic knowledge of control technology, drive technologies, and suitable safety measures is
assumed.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
Failure to comply could lead to minor injury.
Precautionary measures for avoiding the risk.
NOTICE
Dangerous situation
Failure to comply could cause damage to equipment.
Precautionary measures for avoiding the risk.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 1.1.0 PZ103E P-73x Nanopositioner
Symbol/Label Meaning
1.
2.
Action consisting of several steps with strict sequential order

Action consisting of one or more steps without relevant sequential
order.

Bullet
p. 5
Cross-reference to page 5
RS-232
Label on the product indicating an operating element (example:
RS-232 interface socket)
Warning signs attached to the product that refer to detailed
information in this manual.
1.3 Definition of Terms
Term Explanation
Positioner
Electrically driven mechanics (here: P-73x) with one or more motion
axes
Electronics
Piezo amplifier or piezo controller that supplies the operating voltage
for positioners or piezo actuators
Piezo amplifier
Electronics without sensor evaluation for open-loop operation of
positioners and piezo actuators
Piezo controller
Electronics with sensor evaluation for closed-loop operation of
positioners and piezo actuators
1.4 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.
1.5 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in
separate manuals.
Product Document
E-503 Piezo Amplifier Module
PZ62E User Manual
E-505 Piezo Amplifier Module
E-610 Piezo Amplifier/Servo Controller (OEM
Module)
PZ70E User Manual
PZ72E User Manual

1 About this Document
P-73x Nanopositioner PZ103E Version: 1.1.0 3
Product Document
E-621 Piezo Amplifier/Servo Controller Module
PZ160E User Manual
E-625 Piezo Servo Controller (Benchtop
Device)
PZ166E User Manual
E-712 Digital Piezo Controller (Modular
System)
PZ195E User Manual
E-727 Digital Multi-Channel Piezo Controller
E727T0005 User Manual
E-754 Digital Piezo Controller
E754T0001 User Manual
PIMikroMove
SM148E Software Manual
P-5xx / P-6xx / P-7xx Piezo Positioning Systems
PZ240EK Short Instructions
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 35).
Downloading manuals
1. Open the website www.pi.ws.
2. Search the website for the product number (e.g., P-733) or the product family (e.g.,
piezo nanopositioner).
3. Click the corresponding product to open the product detail page.
4. Click the Downloads tab.
The manuals are shown under Documentation. Software manuals are shown under
General Software Documentation.
5. Click the desired manual and fill out the inquiry form.
The download link will then be sent to the email address entered.

2 Safety
P-73x Nanopositioner PZ103E Version: 1.1.0 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
Organizational Measures ............................................................................................................... 7
2.1 Intended Use
The P-73x is a laboratory device as defined by DIN EN 61010-1. It is intended for indoor use and
use in an environment that is free of dirt, oil, and lubricants.
According to its design, the P-73x is intended for fine positioning as well as moving small objects
quickly and precisely. The specifications for the P-73x apply to horizontal mounting (standing on
a surface, not suspended). Depending on the version, moving is done as follows:
Model Motion Axis
P-73x.2xx
In two axes horizontally
X, Y
P-733.3xx
In three axes horizontally and vertically
X, Y, Z
P-733.ZCx
In one axis vertically
Z
The P-73x can only be used as intended in conjunction with suitable electronics (p. 13) available
from PI. The electronics are not in the P-73x's scope of delivery.
The electronics must provide the required operating voltages. To ensure proper performance of
the servo control system, the electronics must be able to read out and process the signals from
the capacitive sensors.
2.2 General Safety Instructions
The P-73x is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the P-73x.
Use the P-73x for its intended purpose only, and only when it is in perfect technical
condition.
Read the user manual.
Eliminate any malfunctions that may affect safety immediately.
The operator is responsible for the correct installation and operation of the P-73x.
2
Safety

2 Safety
6 Version: 1.1.0 PZ103E P-73x Nanopositioner
The P-73x is driven by piezo actuators. Temperature changes and compressive stresses can
induce charges in piezo actuators. Piezo actuators can remain charged for several hours after
disconnecting the electronics. Touching or short-circuiting the contacts in the connector in the
P-73x can lead to minor injuries from electric shock. The piezo actuators can be destroyed by an
abrupt contraction.
Do not open the P-73x.
Discharge the positioner's piezo actuators before installing:
Connect the positioner to the switched-off PI electronics equipped with an internal
discharge resistor.
Do not pull the plug connector out of the electronics during operation.
Positioners with D-sub plug connector:
Touching the contacts in the plug connector can lead to an electric shock (max. 130 V DC) and
minor injuries.
Do not touch the contacts in the plug connector.
Use screws to secure the positioner's connector against being pulled out of the
electronics.
If a protective earth conductor is not or not properly connected, dangerous touch voltages can
occur on the P-73x in the case of malfunction or failure of the system. If there are touch
voltages, touching the P-73x can result in minor injuries from electric shock.
Connect the P-73x to a protective earth conductor (p. 20) before starting.
Do not remove the protective earth conductor during operation.
If the protective earth conductor has to be removed temporarily (e.g., in the case of
modifications), reconnect the P-73x to the protective earth conductor before restarting.
Mechanical forces can damage or misalign the P-73x.
Avoid impacts that affect the P-73x.
Do not drop the P-73x.
Do not exceed the maximum permissible stress and load capacities according to the
specifications (p. 37).
Do not touch any sensitive parts (e.g., platform) when handling the P-73x.
The P-73x is maintenance-free and achieves its positioning accuracy as a result of the optimal
alignment of mechanical components and piezo actuators. Loosened screws cause a loss in
positioning accuracy.
Loosen screws only when instructed in this manual.
Do not open the P-73x.

2 Safety
P-73x Nanopositioner PZ103E Version: 1.1.0 7
2.3 Organizational Measures
User manual
Always keep this user manual together with the P-73x.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the P-73x to a third party, include this user manual as well as other relevant
information provided by the manufacturer.
Do the work only if the user manual is complete. Missing information due to an
incomplete user manual can result in minor injury and damage to equipment.
Install and operate the P-73x only after you have read and understood this user manual.
Personnel qualification
The P-73x may only be installed, started, operated, maintained, and cleaned by authorized and
appropriately qualified personnel.

3 Product Description
P-73x Nanopositioner PZ103E Version: 1.1.0 9
In this Chapter
Model Overview............................................................................................................................. 9
Product View................................................................................................................................ 11
Product Labeling .......................................................................................................................... 12
Scope of Delivery ......................................................................................................................... 13
Suitable Electronics...................................................................................................................... 13
Accessories................................................................................................................................... 14
Technical Features ....................................................................................................................... 15
3.1 Model Overview
The P-73x is available in the following versions:
3.1.1 XY Nanopositioner
Model Description
P-733.2CD
High-precision XY nanopositioner, 100 µm × 100 µm, capacitive sensors,
parallel metrology, D-sub connector
P-733.2CL
High-precision XY nanopositioner, 100 µm × 100 µm, capacitive sensors,
parallel metrology, LEMO connectors
P-734.2CD
High-precision XY nanopositioner with very high travel accuracy,
100 µm × 100 µm, capacitive sensors, parallel metrology, D-sub
connector
P-734.2CL
High-precision XY nanopositioner with very high travel accuracy,
100 µm × 100 µm, capacitive sensors, parallel metrology, LEMO
connectors
3.1.2 XY Nanopositioner with Direct Drive
Model Description
P-733.2DD
High dynamics, high-precision XY nanopositioner, 30 µm × 30 µm, direct
drive, capacitive sensors, parallel metrology, D-sub connector
3
Product Description

3 Product Description
10 Version: 1.1.0 PZ103E P-73x Nanopositioner
3.1.3 XYZ Nanopositioner
Model Description
P-733.3CD
Precision XYZ nanopositioner, 100 µm × 100 µm × 10 µm, capacitive
sensors, parallel metrology, D-sub connector
P-733.3CL
Precision XYZ nanopositioner, 100 µm × 100 µm × 10 µm, capacitive
sensors, parallel metrology, LEMO connectors
3.1.4 XYZ Nanopositioner with Direct Drive
Model
Description
P-733.3DD
High dynamics, precision XYZ nanopositioner, 30 µm × 30 µm × 10 µm,
direct drive, capacitive sensors, parallel metrology, D-sub connector
3.1.5 Nanopositioner Z Stage
Model Description
P-733.ZCD
Compact, precision nanopositioner Z stage, 100 µm, capacitive sensor,
D-sub connector
P-733.ZCL
Compact, precision nanopositioner Z stage, 100 µm, capacitive sensor,
LEMO connectors

3 Product Description
P-73x Nanopositioner PZ103E Version: 1.1.0 11
3.2 Product View
The figures serve as examples and can differ from your positioner model.
Pay attention to the symbols on your device.
Figure 1: P-733: Exemplary product view
1 Motion platform
2 Base body
3 Cable exit
4 Protective earth connector
Figure 2: P-734: Exemplary product view
1 Motion platform
2 Base body
3 Protective earth connector
4 Cable exit

3 Product Description
12 Version: 1.1.0 PZ103E P-73x Nanopositioner
Direction of P-73x motion
The arrows indicate the positive direction of motion in each case.
P-733 XY nanopositioner:
P-734 XY nanopositioner:
P-733 XYZ nanopositioner P-733 nanopositioner Z stage:
3.3 Product Labeling
Labeling Description
P-733.2CD
Product number (example), the digits after the period refer to
the model
123456789
Serial number (example), individual for each P-73x
Meaning of each position (from the left):
1 = internal information
2 and 3 = year of manufacture
4 to 9 = consecutive number
Manufacturer's logo
Warning sign "Pay attention to the manual!"
Old equipment disposal (p. 53)
CE conformity mark
Country of origin: Germany
Country of origin
WWW.PI.WS
Manufacturer's address (website)
Symbol for the protective earth conductor (p. 20)

3 Product Description
P-73x Nanopositioner PZ103E Version: 1.1.0 13
If applicable:
The arrows indicate the positive direction of motion.
The letter X, Y, and Z indicate the axis.
Figure 3: "Residual Voltage" warning sign on the connector of the P-73x
"Residual Voltage" warning: Risk of electric shock (p. 5) for models with D-sub plug connector
3.4 Scope of Delivery
Product number Description
P-73x
Positioner according to order (p. 9)
000036450
M4 screw set for protective earth, consisting of:
1 M4x8 flat-head screw with cross recess, ISO 7045
2 lock washers
2 flat washers
PZ240EK
Short instructions for piezo positioning systems
3.5 Suitable Electronics
You need suitable electronics to operate a P-73x. Selecting the device depends on the
application and the connectors available.
Electronics Connector* Channels**
E-505 Piezo Amplifier Module
LEMO
1
E-610 Piezo Amplifier / Servo Controller (OEM Module)
LEMO
1
E-503 Piezo Amplifier Module
LEMO
3
E-621 Piezo Amplifier / Servo Controller Module
D-sub 7W2
1
E-625 Piezo Servo Controller (Benchtop Device)
D-sub 7W2
1
E-754 Digital Piezo Controller
D-sub 7W2
1
E-727 Digital Multi-Channel Piezo Controller
D-sub 25W3
3
E-712 Digital Piezo Controller (Modular System)
D-sub 25W3
3/6
* In some cases, adapter cables (p. 14) are necessary for connecting.
** When using single-channel electronics, each motion axis requires its own individual
electronics.

3 Product Description
14 Version: 1.1.0 PZ103E P-73x Nanopositioner
3.6 Accessories
Adapter cables for models with D-sub plug connector(s)
Product number Description
P-895.2D1DDC*
Adapter cable D-sub 25W3 (f) and D-sub 7W2 (f) to D-sub 25W3 (m) for
piezo actuator nanopositioning systems with capacitive sensors, 3 channels,
length: 0.3 m.
P-895.2DDC
Adapter cable 2× D-sub 7W2 (f) to D-sub 25W3 (m) for piezo actuator
nanopositioning systems with capacitive sensors, 2 channels, length: 0.3 m.
P-895.3DDC
Adapter cable 3× D-sub 7W2 (f) to D-sub 25W3 (m) for piezo actuator
nanopositioning systems with capacitive sensors, 3 channels, length: 0.3 m.
* 2 channels to D-sub 25W3 (f) and 1 channel to D-sub 7W2 (f) available.
Adapter cables for models with LEMO plug connectors
Product number
Description
P-895.1LDC
Adapter cable LEMO to D-sub 7W2 (m) for piezo actuator nanopositioning
systems with capacitive sensors, 1 channel, length: 0.3 m.
P-895.3LDC
Adapter cable LEMO to D-sub 25W3 (m) for piezo actuator nanopositioning
systems with capacitive sensors, 3 channels, length: 0.3 m.
3.6.1 Adapter Plates
Product number Description
P-733.AP1
Adapter plate for mounting P-733 piezo stages onto M-545 XY stages and
U-760 XY stage systems
To order, contact our customer service department (p. 35).

3 Product Description
P-73x Nanopositioner PZ103E Version: 1.1.0 15
3.7 Technical Features
3.7.1 PICMA® Piezo Actuators
P-73x positioners are driven by PICMA® piezo actuators. PICMA® actuators have all-ceramic
insulation and their performance and lifetime are therefore far superior to conventional
actuators. The ceramic insulation layer protects the monolithic piezoceramic block against
humidity and failure due to increased leakage current. In this way, an especially high reliability
is achieved even under extreme ambient conditions. In contrast to motorized drives, there are
no rotating parts or friction. The piezo actuators are therefore free of backlash, maintenance,
and wear.
3.7.2 Flexure Guides
P-73x positioners have flexure guides for friction-free motion and high guiding accuracy.
A flexure guide is an element that is free of static and sliding friction. It is based on the elastic
deformation (bending) of a solid (e.g., steel) and does not have any rolling or sliding parts.
Flexure elements have a high stiffness and load capacity. Flexure guides are maintenance and
wear free. They are 100 % vacuum compatible, function in a wide temperature range and do
not require any lubricants.
3.7.3 Capacitive Sensors
Capacitive sensors measure the position directly on the platform (direct metrology) and work
without contact. Neither friction nor hysteresis interferes with the motion, which allows
excellent linearity values to be achieved together with the high position resolution. In
conjunction with suitable electronics, capacitive sensors achieve the best resolution, stability,
and bandwidth.
3.7.4 ID Chip (Models with D-sub Connector Only)
An ID chip is located in the D-sub connector of the P-73x. When the P-73x is calibrated at the
factory with digital electronics, the calibration data is saved on the ID chip together with
specific product information. During switch-on, the digital electronics read the data from the
ID chip of the P-73x connected. A P-73x with an ID chip containing calibration data can
therefore be connected to any suitable digital electronics without renewed calibration.
Refer to the manual for the controller for more information on the ID chip.