PI L-509 User manual

PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
MP186E
L
-509
Vacuum
-Compatible Precision Linear Positioner (1E-7 hPa)
User Manual
Version: 1.0.0
Date: 2019-03-18
This document describes the following precision
linear
positioner,
vacuum
-compatible 1 E-7 hPa:

L-509.0x1300V7:
with 2-phase stepper motor, without encoder

L-509.0x1311V7:
with 2-phase stepper motor and linear encoder
x stands for travel range:
2
= 26 mm
3 =
52 mm
5 =
102 mm

The following company names and brands are registered trademarks of
Physik Instrumente (PI) GmbH & Co. KG:
PI®, PIC®, NanoCube®, PICMA®, PIFOC®, PILine®, NEXLINE®, PiezoWalk®, PicoCube®, PiezoMove®,
PIMikroMove®, NEXACT®, Picoactuator®, PInano®, NEXSHIFT®, PITOUCH®, PIMag®, PIHera, Q-Motion®
© 2019 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs, and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG reserves
all rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.
Original Instructions
First printing: 18-MAR-2019
Document number: MP186E, MMa, Version 1.0.0
Subject to change. This manual is superseded by any new release. The latest release is available for download
from our website (p. 3).

1About this Document 1
1.1 Objective and Target Group of this User Manual ...................................................... 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Definition of Terms..................................................................................................... 2
1.4 Pictures....................................................................................................................... 2
1.5 Other Applicable Documents ..................................................................................... 2
1.6 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 5
2.4 Measures for Handling Vacuum-Compatible Products.............................................. 6
3Product Description 7
3.1 Model Overview ......................................................................................................... 7
3.2 Product View .............................................................................................................. 9
3.3 Direction of Motion.................................................................................................... 9
3.4 Product Labeling....................................................................................................... 10
3.5 Scope of Delivery...................................................................................................... 11
3.6 Accessories ............................................................................................................... 11
3.7 Suitable Controllers .................................................................................................. 12
3.8 Technical Features.................................................................................................... 12
3.8.1 Encoder........................................................................................................ 12
3.8.2 Limit Switches.............................................................................................. 12
4Unpacking 13
5Installation 15
5.1 General Notes on Installation................................................................................... 15
5.2 Attaching the L-509 to a Surface .............................................................................. 17
5.3 Connecting the L-509 to the Protective Earth Conductor........................................ 20
5.4 Affixing the Load to the L-509 .................................................................................. 22
5.5 Connecting the L-509 to a Controller ....................................................................... 24
6Startup 25
6.1 General Notes on Start-Up....................................................................................... 25
6.2 Starting up the Positioner ........................................................................................ 28
6.2.1 L-509 Entries in the Positioner Database of PI ............................................ 28
Contents

7Maintenance 29
7.1 General Notes on Maintenance ............................................................................... 29
7.2 Performing a Maintenance Run ............................................................................... 29
7.3 Cleaning the L-509.................................................................................................... 30
8Troubleshooting 31
8.1 Possible Causes and Remedies................................................................................. 31
8.2 Moving the Platform Manually ................................................................................ 33
9Customer Service Department 35
10 Technical Data 37
10.1 Specifications............................................................................................................ 37
10.1.1 Data Table.................................................................................................... 37
10.1.2 Maximum Ratings........................................................................................ 38
10.1.3 Ambient Conditions and Classifications ...................................................... 38
10.2 Dimensions ............................................................................................................... 39
10.2.1 L-509 Positioner........................................................................................... 39
10.2.2 Hole Pattern of the Platform of the L-509................................................... 40
10.2.3 L-500.AV3-V9 Adapter Bracket.................................................................... 41
10.3 Tightening Torque for Screws, ISO 4762 - A2........................................................... 42
10.4 Pin Assignment ......................................................................................................... 43
10.4.1 D-Sub 15 (Female) ....................................................................................... 43
10.4.2 D-Sub 9 (Female, Only L 509.0x1311V7) ..................................................... 44
11 Old Equipment Disposal 45
12 EU Declaration of Conformity 47

1 About this Document
L-509 Vacuum-compatible positioner (1E-7 hPa) MP186E Version: 1.0.0 1
1.1 Objective and Target Group of this User Manual
This user manual contains the required information on the intended use of the L-509 (10-7 hPa
vacuum version).
Basic knowledge of closed-loop systems, motion control concepts, handling vacuum products,
and suitable cleanliness and safety measures is assumed.
The latest versions of the user manuals are available for download on our website (page 3).
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injury.
Actions to take to avoid the risk.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to equipment.
Actions to take to avoid the risk.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 1.0.0 MP186E L-509 Vacuum-compatible positioner (1E-7 hPa)
Symbol/
Label Meaning
1.
2.
Action consisting of several steps whose sequential order must be
observed

Action consisting of one or several steps whose sequential order is
irrelevant
 Lists
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the product (example: socket of
the RS-232 interface)
Warning sign affixed to the product that refers to detailed information
in this manual.
1.3 Definition of Terms
Term Explanation
Load capacity Maximum load capacity in the vertical direction when the positioner is
mounted horizontally. The contact point of the load is in the center of
the platform.
Max. push/pull force Maximum force effective in the direction of motion.
In the case of vertical mounting, the specified value (see 37) only
applies when the servo mode is on.
Linear encoder The linear encoder is a sensor here used for detecting the current
position of the platform. For enhanced accuracy, a mechanical
connection of the sensor system and the platform is applied.
1.4 Pictures
For better understandability, the colors, proportions and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.
1.5 Other Applicable Documents
The devices and software tools from PI that are mentioned in this documentation are described
in separate manuals.
Product Document
Positioners with electric motors MP146EK Short instructions for positioners with
electric motors
C-663.11 stepper motor controller MS208E User Manual
SMC Hydra motion controller Hardware Manual

1 About this Document
L-509 Vacuum-compatible positioner (1E-7 hPa) MP186E Version: 1.0.0 3
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 35).
INFORMATION
For products that are supplied with software (CD in the scope of delivery), access to the
manuals is protected by a password. Protected manuals are only d
isplayed on the website after
entering the password.
The password is included on the CD of the product.
For products with CD: Identify the password
1. Insert the product CD into the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews in the file
name).
4. Find the user name and the password in the section "User login for software download"
in the Release News.
Downloading Manuals
1. Open the website http://www.pi.ws.
2. Click Info.
3. If you have a user name and password:
a) Click Login.
b) Log in with the user name and password.
4. Click >> Product Downloads.
5. In the Product Files area, click the corresponding product category.
6. On the right-hand side of the page, select the corresponding subcategory.
7. Navigate to the product number on the page.
The following manuals are displayed:
−Freely accessible manuals
−Manuals that are protected by a password
8. Click the desired manual and save it to the hard disk of your PC or to a data storage
medium.

2 Safety
L-509 Vacuum-compatible positioner (1E-7 hPa) MP186E Version: 1.0.0 5
2.1 Intended Use
The L-509 is a laboratory device as defined by DIN EN 61010. It is intended for indoor use and
use in an environment which is free of dirt, oil, and lubricants. Because cleanliness is important
for a vacuum product, it is also necessary to take various measures to avoid contamination. In
particular, gloves specially designed for handling products must be worn and the product may
only be stored packed in air-tight original packaging or otherwise cleanroom-compatible
packaging, in a cleanroom environment or in vacuum chambers see also chapter 4 "Unpacking"
p. 13).
In accordance with its design, the L-509 is intended for single-axis positioning, adjusting and
shifting of loads at different velocities. The L-509 is not intended for applications in areas, in
which a failure would present severe risks to human beings or the environment.
The L-509 is intended for horizontal or vertical mounting. For the load limits with vertical
mounting, see "General Notes on Installation". (p. 15).
The intended use of the L-509 is only possible when completely mounted and connected.
The L-509 must be operated with a suitable controller (p. 12). The controller is not included in
the scope of delivery of the L-509.
2.2 General Safety Instructions
The L-509 is built according to state-of-the-art technology and recognized safety standards.
Improper use of the L-509 may result in personal injury and/or damage to the L-509.
Only use the L-509 for its intended purpose, and only use it if it is in perfect condition.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect safety.
The operator is responsible for correct installation and operation of the L-509.
2.3 Organizational Measures
User Manual
Always keep this user manual available when using the L-509.
The latest versions of the user manuals are available on our website (p. 3) for
download.
Add all information from the manufacturer such as supplements or technical notes to
the user manual.
2
Safety

2 Safety
6 Version: 1.0.0 MP186E L-509 Vacuum-compatible positioner (1E-7 hPa)
If you give the L-509 to other users, also include this user manual as well as all other
relevant information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing information due
to an incomplete user manual can result in minor injury and damage to equipment.
Only install and operate the L-509 after you have read and understood this user
manual.
Personnel Qualification
The L-509 may only be installed, started up, operated, maintained, and cleaned by authorized
and appropriately qualified personnel.
2.4 Measures for Handling Vacuum-Compatible Products
When handling the vacuum version of the positioner, attention must be paid to appropriate
cleanliness. At PI, all parts are cleaned before assembly. During assembly and measurement,
powder-free gloves are worn. In addition, the products are wiped clean once again and then
shrink-wrapped twice in vacuum-compatible film.
Only touch the positioner when wearing powder-free gloves.
If necessary, wipe the positioner clean after unpacking.

3 Product Description
L-509 Vacuum-compatible positioner (1E-7 hPa) MP186E Version: 1.0.0 7
3.1 Model Overview
Classification of the positioners
All models are electromotive linear positioning positioners with precision leadscrew. They differ
with respect to:
Travel range
Encoder equipment
L-509 Travel range in mm Travel range in inches
(approx.)
.02xxxxV7 26 1
.03xxxxV7 52 2
.05xxxxV7 102 4
L-509 Linear encoder
.0x1300V7
.0x1311V7* +
* Separate sensor connection
3
Product Description

3 Product Description
8 Version: 1.0.0 MP186E L-509 Vacuum-compatible positioner (1E-7 hPa)
Detailed model overview
Order number Product name
L-509.021300V7 Precision linear positioner, 85 mm width, 2-phase stepper motor, 26 mm
(1") travel range, mechanical limit switches, vacuum-compatible 1 E-7 hPa
L-509.021311V7 Precision linear positioner, 85 mm width, 2-phase stepper motor, 26 mm
(1") travel range, linear encoder with sin/cos signal transmission,
mechanical limit switches, vacuum-compatible 1 E-7 hPa
L-509.031300V7 Precision linear positioner, 85 mm width, 2-phase stepper motor, 52 mm
(2") travel range, mechanical limit switches, vacuum-compatible 1 E-7 hPa
L-509.031311V7 Precision linear positioner, 85 mm width, 2-phase stepper motor, 52 mm
(2") travel range, linear encoder with sin/cos signal transmission,
mechanical limit switches, vacuum-compatible 1 E-7 hPa
L-509.051300V7 Precision linear positioner, 85 mm width, 2-phase stepper motor, 102 mm
(4") travel range, mechanical limit switches, vacuum-compatible 1 E-7 hPa
L-509.051311V7 Precision linear positioner, 85 mm width, 2-phase stepper motor, 102 mm
(4") travel range, linear encoder with sin/cos signal transmission,
mechanical limit switches, vacuum-compatible 1 E-7 hPa
For further technical data, see the specifications. (p. 37).

3 Product Description
L-509 Vacuum-compatible positioner (1E-7 hPa) MP186E Version: 1.0.0 9
3.2 Product View
Figure 1: Parts of the positioner (sample, schematic)
1 Motor connector (vacuum-capable plug HD D-Sub 26)
2Vibration absorber
3Motor
4Sensor unit (L-509.0x1311V7 models only)
5Platform
6Protective earth (PE) connector (screw M4 with corresponding washers)
7Sensor wire strands (vacuum-capable; not shown in their entireties)
8Motor wire strands (vacuum-capable; not shown in their entireties)
9Sensor connector (vacuum-capable plug D-Sub 9; L-509.0x1311V7 models only)
3.3 Direction of Motion
Figure 2: Direction of motion of the platform
X (arrow direction:) Direction of motion on positive command

3 Product Description
10 Version: 1.0.0 MP186E L-509 Vacuum-compatible positioner (1E-7 hPa)
3.4 Product Labeling
Figure 3: Product labeling
Position Labeling Description
1 L-509.031300V7 Product name (example), the characters after
the period refer to the model
1 417002159 Serial number (example), individual for each
L-509
Meaning of the places (counting from left):
1 = internal information,
2 and 3 = year of manufacture,
4 to 9 = consecutive numbers
1 Manufacturer's logo
1 Warning sign "Observe manual!"
1 Country of origin: Germany Country of origin
1 CE conformity mark
1 WWW.PI.WS Manufacturer's address (website)
1 Old equipment disposal
4 Controller Motor connection
3 Sensor Linear encoder connection (L-509.0x1311V7
models only)
2 Protective earth symbol, marks the protective
earth connection of the L-509 (p. 20)

3 Product Description
L-509 Vacuum-compatible positioner (1E-7 hPa) MP186E Version: 1.0.0 11
3.5 Scope of Delivery
Item number Component
L-509.0x1300V7 or
L-509.0x1311V7
Positioner according to order (p. 7)
720090620-0300
(+ C-815.LSH2 /
C-815.AC32-0300)
Motor cable and for L-509.0x1311V7: sensor cable3 m (if applicable incl.
A/D converter); according to the controller ordered
MP146EK Short instructions for positioners with electric motors
62345138 Screw set for mounting the positioner
-4 socket head screws, ISO 4762* M4x14
-2 dowel pins, ISO 2338* - 4 m6 x 12
5604500041 Adapter for function tests outside the vacuum chamber
Adapter vacuum feedthrough D-Sub-15 with housing
5604500044 (Only L-509.0x1311V7:)
Adapter for function tests outside the vacuum chamber
Adapter vacuum feedthrough D-Sub-9 with housing
* Corresponds to DIN 912 / ** Corresponds to DIN 7
3.6 Accessories
Order number Item
L-500.AV3-V9 Mounting adapter for vertical mounting of L-509 positioners, incl.
-3 socket head screws, ISO 4762* M6x12
-2 dowel pins, ISO 2338** - 4 m6 x 12
C-815.VFU3 Vacuum feedthrough, 3x D-Sub 15 for customer's vacuum hole
C-815.VFU6 Vacuum feedthrough, 6x D-Sub 15 for customer's vacuum hole
C-815.VFU11 Vacuum feedthrough, 1x D-Sub 15 / 1x D-Sub 9 for customer's vacuum
hole
C-815.VFU15 Vacuum feedthrough, 15x D-Sub 15 for customer's vacuum hole
C-815.VFU33 Vacuum feedthrough, 3x D-Sub 15 / 3x D-Sub 9 for customer's vacuum
hole
C-815.VFU66 Vacuum feedthrough, 6x D-Sub 15 / 6x D-Sub 9 for customer's vacuum
hole
* Corresponds to DIN 912 / ** Corresponds to DIN 7
To order, contact the customer service department (p. 35).

3 Product Description
12 Version: 1.0.0 MP186E L-509 Vacuum-compatible positioner (1E-7 hPa)
3.7 Suitable Controllers
The L-509 must be connected to a suitable controller. The following controllers from PI are
suitable for the operation of the L-509:
Controller Axes per
controller
PC interfaces Multiple
controllers on
the same PC
Applicable
positioner
models
C-663 1 USB, RS-232, daisy chain
network
Yes, same
interface
L-509.0x1300V7
SMC Hydra 1 RS-232, LAN Yes L-509.0x1311V7
PC software is included in the scope of delivery of the controllers from PI. The operation of the
controllers is described in the corresponding user manuals.
3.8 Technical Features
3.8.1 Encoder
The L-509.0x1300V7 models are not equipped with an encoder.
Linear encoder
The L-509.0x1311V7 models are equipped with an optical linear encoder. For the encoder
resolution, refer to the table in the "Specifications" section (p. 37).
Optical linear encoders measure the actual position directly (direct metrology). Errors occurring
in the drive, such as nonlinearity, backlash or elastic deformations cannot influence the
measurement of the position.
3.8.2 Limit Switches
The L-509 is equipped with mechanical limit switches.
Each limit switch closes a contact on a dedicated line to the controller. The controller then stops
the motion. If the controller does not stop the motion in time, the positioner runs into the hard
stop.

4 Unpacking
L-509 Vacuum-compatible positioner (1E-7 hPa) MP186E Version: 1.0.0 13
1. Remove the L-509 in its inner and outer bag from the transport packaging carefully.
Now unpack the L-509 carefully and according to the regulations on the label of the
packaging as follows:
2. Compare the contents with the items listed in the contract and the packing list.
3. Before opening the vacuum packaging, check the packaging and the product – if visible
– for signs of damage. If there is any sign of damage or missing parts, contact PI
immediately.
4. Clean the outer bag with a lint-free cleanroom cloth that has been dampened with
clean isopropyl alcohol (99.9% or better).
5. Remove the outer bag before bringing into the cleanroom area
6. Only open the inner bag in a cleanroom environment. Wear cleanroom gloves. After
removing the bag, the product should only be stored, air-tight wrapped in original
packaging or in other clean-room packaging, in a cleanbox, a cleanroom or in a sealed
vacuum chamber.
7. Touch the product only when wearing cleanroom gloves. If touched with bear hands,
seat and grease residues come into contact with the product that cannot be completely
removed by wipe-cleaning.
8. Inspect the contents for signs of damage. If there is any sign of damage or missing parts,
contact PI immediately.
9. Keep all packaging materials in case the product needs to be returned.
4
Unpacking

5 Installation
L-509 Vacuum-compatible positioner (1E-7 hPa) MP186E Version: 1.0.0 15
5.1 General Notes on Installation
NOTICE
Danger of contamination
Only open the inner bag in a cleanroom environment. Wear cleanroom gloves. After
removing the bag, the product may only be stored in a cleanbox, a cleanroom or in a
sealed vacuum chamber
Touch the product only when wearing cleanroom gloves. If touched with bear hands,
seat and grease residues come into contact with the product that cannot be completely
removed by wipe-cleaning.
NOTICE
Unwanted changes in position with vertical mounting!
If the load exceeds the self-locking of the drive when the positioner is mounted vertically,
unintentional changes in the position of the platform will occur. Unwanted changes in the
position of the platform can damage the drive, the load or the environment.
When a positioner is mounted vertically, make sure that the installed load is lower than
the self-locking of the drive (see specification of the holding force in "Data table"
(p. 37)).
NOTICE
Malfunction due to false mounting screws!
Make sure that the screws are vacuum-compliant (e.g. including vent holes)
NOTICE
Cable break!
A cable break leads to failure of the positioner.
Install the positioner so that the cable is not bent too strongly or crushed.
5
Installation

5 Installation
16 Version: 1.0.0 MP186E L-509 Vacuum-compatible positioner (1E-7 hPa)
HINWEIS
Heating of the L-509 during operation!
The heat produced during operation of the L-509 can affect your application.
Due to lack of surrounding air, heat dissipation from the motor is reduced significantly in a
vacuum.
Install the L-509 so that the application is not impaired by the dissipated heat.
Avoid exceeding the allowed max. velocity of 5 mm/s. Operation within the allowed
velocity range is automatically ensured by correct selection/detection of the product
model in the motion control software.
INFORMATION
For optimal repeatability, all components must be connected firmly together.
INFORMATION
The use of locating pins during mounting reduces deviations from the ideal alignment of the
positioner.
If possible, simulate the positioner motion with a mounted load or make suitable
calculations to detect collisions or unfavorable center of gravity constellations.
If necessary, take suitable constructive measures to avoid collisions and instability in
the overall system.
Avoid or mark danger zones that result from the installation of the positioner and the
application, in accordance with the legal regulations.