PI P-5 7 Series User manual

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
PZ82E
P
-5x7/P-5x8 Positioners
User Manual
Version: 3.2.0
Date: 23.06.2022
This document describes the following products:

P-517, P-527
Precision XY nanopositioner
P-517.2CD/.2CL, 100 µm × 100 µm
P-527.2CD/.2CL, 200 µm × 200 µm

P-517, P-527
Precision XYZ nanopositioner
P-517.3CD/.3CL, 100 µm × 100 µm × 20 µm
P-527.3CD/.3CL, 200 µm × 200 µm × 20 µm

P-517, P-527
Precision XY / rotation nanopositioner
P-517.RCD, 100 µm × 100 µm, 2 mrad
P-527.RCD, 200 µm × 200 µm, 4 mrad

P-558, P-518, P-528
Precision nanopositioning Z stage
P-558.ZCD/.ZCL, 50 µm
P-518.ZCD/.ZCL, 100 µm
P-528.ZCD/.ZCL, 200 µm

P-558, P-518, P-528
Precision nanopositioning Z and tip/tilt stage
P-558.TCD, 50 µm, 0.5 mrad
P-518.TCD, 100 µm, 1 mrad
P-528.TCD, 200 µm, 2 mrad
.2CD/.3CD/.ZCD/.RCD/.TCD with D-sub
connector
.2CL/.3CL/.ZCL with LEMO connectors

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list:
https://www.physikinstrumente.com/en/about-pi/patents
© 2022 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 23.06.2022
Document number: PZ82E, CBo, Version 3.2.0
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Group of this User Manual ...................................................... 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Definition of Terms..................................................................................................... 2
1.4 Figures ........................................................................................................................ 2
1.5 Other Applicable Documents ..................................................................................... 3
1.6 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 7
3Product Description 9
3.1 Model Overview ......................................................................................................... 9
3.2 Product View ............................................................................................................ 10
3.3 Scope of Delivery...................................................................................................... 11
3.4 Suitable Electronics .................................................................................................. 11
3.5 Accessories ............................................................................................................... 12
3.6 Technical Features.................................................................................................... 13
3.6.1 PICMA® Piezo Actuators .............................................................................. 13
3.6.2 Flexure Guides ............................................................................................. 13
3.6.3 Capacitive Sensors ....................................................................................... 13
3.6.4 ID Chip (Models with D-sub Connector Only).............................................. 13
4Unpacking 15
5Installation 17
5.1 General Notes on Installing ...................................................................................... 17
5.2 Connecting the P-5x7/P-5x8 to the Protective Earth Conductor ............................. 18
5.3 Mounting the P-5x7/P-5x8 ....................................................................................... 20
5.4 Fixing the Load.......................................................................................................... 21
6Starting and Operating 25
6.1 General Notes on Starting and Operating................................................................ 25
6.2 Operating the P-5x7/P-5x8....................................................................................... 27
6.3 Discharging the P-5x7/P-5x8 .................................................................................... 27
Contents

7Maintenance 29
7.1 General Notes on Maintenance ............................................................................... 29
7.2 Packing the P-5x7/P-5x8 for Transport .................................................................... 29
7.3 Cleaning the P-5x7/P-5x8 ......................................................................................... 31
8Troubleshooting 33
9Customer Service 35
10 Technical Data 37
10.1 Specifications............................................................................................................ 37
10.1.1 P-5x7 Data Table.......................................................................................... 37
10.1.2 P-5x8 Data Table.......................................................................................... 39
10.1.3 Maximum Ratings........................................................................................ 40
10.2 Ambient Conditions and Classifications ................................................................... 41
10.3 Dimensions ............................................................................................................... 42
10.4 Torque for Stainless Steel Screws (A2-70)................................................................ 45
10.5 Pin Assignment ......................................................................................................... 45
11 Old Equipment Disposal 49
12 European Declarations of Conformity 51

1 About this Document
P-5x7/P-5x8 Positioners PZ82E Version: 3.2.0 1
In this Chapter
Objective and Target Group of this User Manual.......................................................................... 1
Symbols and Typographic Conventions ......................................................................................... 1
Definition of Terms ........................................................................................................................ 2
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 3
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Group of this User Manual
This user manual contains the information required for using the P-5x7/P-5x8 as intended ("x"
stands for the different models (p. 9)).
Basic knowledge of control technology, drive technologies, and suitable safety measures is
assumed.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
Failure to comply could lead to minor injury.
Precautionary measures for avoiding the risk.
NOTICE
Dangerous situation
Failure to comply could cause damage to equipment.
Precautionary measures for avoiding the risk.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 3.2.0 PZ82E P-5x7/P-5x8 Positioners
Symbol/Label Meaning
1.
2.
Action consisting of several steps with strict sequential order
 Action consisting of one or more steps without relevant sequential
order.

Bullet
p. 5
Cross-reference to page 5
RS-232
Label on the product indicating an operating element (example:
RS-232 interface socket)
Warning signs on the product that refer to detailed information in this
manual.
1.3 Definition of Terms
Term Explanation
Positioner
Electrically driven mechanics (here: P-5x7/P-5x8) with one or more
motion axes
Electronics
Piezo amplifier or piezo controller that supplies the operating voltage
for positioners or piezo actuators
Piezo amplifier
Electronics without sensor evaluation for open-loop operation of
positioners and piezo actuators
Piezo controller
Electronics with sensor evaluation for closed-loop operation of
positioners and piezo actuators
1.4 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.

1 About this Document
P-5x7/P-5x8 Positioners PZ82E Version: 3.2.0 3
1.5 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in
separate manuals.
The latest versions of the user manuals are available for download (p. 3) on our website.
Product Document
E-503 piezo amplifier module
PZ62E user manual
E-505 piezo amplifier module
E-610 piezo amplifier/servo controller (OEM
module)
PZ70E user manual
PZ72E user manual
E-621 piezo amplifier/servo controller module
PZ160E user manual
E-625 piezo servo controller (benchtop device)
PZ166E user manual
E-712 digital piezo controller (modular system)
PZ195E user manual
E-727 digital multi-channel piezo controller
E727T0005 user manual
E-754 digital piezo controller
E754T0001 user manual
PIMikroMove SM148E software manual
P-5xx / P-6xx / P-7xx piezo positioners
PZ240EK short instructions
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 35).
Downloading Manuals
1. Open the website www.pi.ws.
2. Search the website for the product number (e.g., P-517) or the product family (e.g.,
nanopositioner).
3. Click the corresponding product to open the product detail page.
4. Click the Downloads tab.
The manuals are shown under Documentation. Software manuals are shown under
General Software Documentation.
5. Click the desired manual and fill out the inquiry form.
The download link will then be sent to the email address entered.

2 Safety
P-5x7/P-5x8 Positioners PZ82E Version: 3.2.0 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
Organizational Measures ............................................................................................................... 7
2.1 Intended Use
The P-5x7/P-5x8 is a laboratory device as defined by DIN EN 61010-1. It is intended for indoor
use and use in an environment that is free of dirt, oil, and lubricants.
According to its design, the P-5x7/P-5x8 is intended for fine positioning as well as moving small
objects quickly and precisely. The specifications for the P-5x7/P-5x8 apply to horizontal
mounting. Depending on the version, moving is done as follows:
Model Motion Axis
.2CD / .2CL
In two axes horizontally
X, Y
.3CD / .3CL
In two axes horizontally and in one axis vertically
X, Y, Z
.ZCD / .ZCL
In one axis vertically
Z
.RCD
in two axes horizontally and in one axis rotationally
X, Y, θZ
.TCD In one axis vertically and in two axes rotationally Z, θX, θY
The P-5x7/P-5x8 can only be used as intended in conjunction with suitable electronics (p. 11)
available from PI. The electronics are not in the P-5x7/P-5x8's scope of delivery.
The electronics must provide the required operating voltages. To ensure proper performance of
the servo control system, the electronics must also be able to read out and process the signals
from the position sensors.
2.2 General Safety Instructions
The P-5x7/P-5x8 is built according to state-of-the-art technology and recognized safety
standards. Improper use can result in personal injury and/or damage to the P-5x7/P-5x8.
Use the P-5x7/P-5x8 for its intended purpose only, and only when it is in perfect
technical condition.
Read the user manual.
Eliminate any malfunctions that may affect safety immediately.
The operator is responsible for the correct installation and operation of the P-5x7/P-5x8.
2
Safety

2 Safety
6 Version: 3.2.0 PZ82E P-5x7/P-5x8 Positioners
The P-5x7/P-5x8 is driven by piezo actuators. Temperature changes and compressive stress can
induce charges in piezo actuators. Piezo actuators can remain charged for several hours after
disconnecting the electronics. Touching or short-circuiting the contacts in the P-5x7/P-5x8's
connector can lead to minor injuries from electric shock. The piezo actuators can be destroyed
by an abrupt contraction.
Do not open the P-5x7/P-5x8.
Discharge the positioner's piezo actuators before installing:
Connect the positioner to the switched-off PI electronics equipped with an internal
discharge resistor.
Do not pull the plug connector out of the electronics during operation.
Positioners with D-sub plug connector:
Touching the contacts in the plug connector can lead to an electric shock (max. 130 V DC) and
minor injuries.
Do not touch the contacts in the plug connector.
Use screws to secure the positioner's connector against being pulled out of the
electronics.
If a protective earth conductor is not or not properly connected, dangerous touch voltages can
occur on the P-5x7/P-5x8 in the case of malfunction or failure of the system. If there are touch
voltages, touching the P-5x7/P-5x8 can result in minor injuries from electric shock.
Connect the P-5x7/P-5x8 to a protective earth conductor (p. 18) before starting.
Do not remove the protective earth conductor during operation.
If the protective earth conductor has to be removed temporarily (e.g., in the case of
modifications), reconnect the P-5x7/P-5x8 to the protective earth conductor before
restarting.
Mechanical forces can damage or misalign the P-5x7/P-5x8.
Avoid impacts that affect the P-5x7/P-5x8.
Do not drop the P-5x7/P-5x8.
Do not exceed the maximum permissible stress and load capacities according to the
specifications (p. 37).
Do not touch any sensitive parts (e.g., motion platform) when handling the
P-5x7/P-5x8.
The P-5x7/P-5x8 is maintenance-free and achieves its positioning accuracy as a result of the
optimal alignment of mechanical components and piezo actuators. Loosened screws cause a
loss in positioning accuracy.
Loosen screws only when instructed in this manual.
Do not open the P-5x7/P-5x8.

2 Safety
P-5x7/P-5x8 Positioners PZ82E Version: 3.2.0 7
2.3 Organizational Measures
User manual
Always keep this user manual together with the P-5x7/P-5x8.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the P-5x7/P-5x8 to a third party, include this user manual as well as other
relevant information provided by the manufacturer.
Do the work only if the user manual is complete. Missing information due to an
incomplete user manual can result in minor injury and damage to equipment.
Install and operate the P-5x7/P-5x8 only after you have read and understood this user
manual.
Personnel qualification
The P-5x7/P-5x8 may only be installed, started, operated, maintained, and cleaned by
authorized and appropriately qualified personnel.

3 Product Description
P-5x7/P-5x8 Positioners PZ82E Version: 3.2.0 9
In this Chapter
Model Overview............................................................................................................................. 9
Product View................................................................................................................................ 10
Scope of Delivery ......................................................................................................................... 11
Suitable Electronics...................................................................................................................... 11
Accessories................................................................................................................................... 12
Technical Features ....................................................................................................................... 13
3.1 Model Overview
The following standard versions of the P-5x7/P-5x8 are available:
Model Description
P-517.2CD
Precision XY nanopositioner, 100 µm × 100 µm, capacitive sensors,
parallel metrology, D-sub connector
P-517.2CL
Precision XY nanopositioner, 100 µm × 100 µm, capacitive sensors,
parallel metrology, LEMO connectors
P-527.2CD
Precision XY nanopositioner, 200 µm × 200 µm, capacitive sensors,
parallel metrology, D-sub connector
P-527.2CL
Precision XY nanopositioner, 200 µm × 200 µm, capacitive sensors,
parallel metrology, LEMO connectors
P-517.3CD
Precision XYZ nanopositioner, 100 µm × 100 µm × 20 µm, capacitive
sensors, parallel metrology, D-sub connector
P-517.3CL
Precision XYZ nanopositioner, 100 µm × 100 µm × 20 µm, capacitive
sensors, parallel metrology, LEMO connectors
P-527.3CD
Precision XYZ nanopositioner, 200 µm × 200 µm × 20 µm, capacitive
sensors, parallel metrology, D-sub connector
P-527.3CL
Precision XYZ nanopositioner, 200 µm × 200 µm × 20 µm, capacitive
sensors, parallel metrology, LEMO connectors
P-517.RCD
Precision XY / rotation nanopositioner, 100 µm × 100 µm, 2 mrad,
capacitive sensors, parallel metrology, D-sub connector
P-527.RCD
Precision XY / rotation nanopositioner, 200 µm × 200 µm, 4 mrad,
capacitive sensors, parallel metrology, D-sub connector
P-558.ZCD
Precision nanopositioning Z stage, 50 µm, direct position measuring,
capacitive sensors, D-sub connector
P-558.ZCL
Precision nanopositioning Z stage, 50 µm, direct position measuring,
capacitive sensors, LEMO connectors
P-518.ZCD
Precision nanopositioning Z stage, 100 µm, direct position measuring,
capacitive sensors, D-sub connector
3
Product Description

3 Product Description
10 Version: 3.2.0 PZ82E P-5x7/P-5x8 Positioners
Model Description
P-518.ZCL
Precision nanopositioning Z stage, 100 µm, direct position measuring,
capacitive sensors, LEMO connectors
P-528.ZCD
Precision nanopositioning Z stage, 200 µm, direct position measuring,
capacitive sensors, D-sub connector
P-528.ZCL
Precision nanopositioning Z stage, 200 µm, direct position measuring,
capacitive sensors, LEMO connectors
P-558.TCD
Precision nanopositioning Z and tip/tilt stage, 50 µm, 0.5 mrad, parallel
metrology, capacitive sensors, D-sub connector
P-518.TCD Precision nanopositioning Z and tip/tilt stage, 100 µm, 1 mrad, parallel
metrology, capacitive sensors, D-sub connector
P-528.TCD
Precision nanopositioning Z and tip/tilt stage, 200 µm, 2 mrad, parallel
metrology, capacitive sensors, D-sub connector
3.2 Product View
The figure serves as an example and can differ from your positioner model.
Figure 1: Example of product view
1 Platform
2Cable exit
3Protective earth connector (M4 hole)
4Base body

3 Product Description
P-5x7/P-5x8 Positioners PZ82E Version: 3.2.0 11
3.3 Scope of Delivery
Product number Description
P-5x7/P-5x8 Positioner according to order (p. 9)
-
Transport safeguard, consisting of:
Support frame
4 plastic screws
000036450
M4 screw set for protective earth, consisting of:
1 M4x8 flat-head screw with cross recess, ISO 7045
2 lock washers
2 flat washers
P500T0002
Technical Note with instructions on unpacking and packing P-5xx positioners
PZ240EK
Short instructions for P-5xx / P-6xx / P-7xx piezo positioners
3.4 Suitable Electronics
You need suitable electronics to operate a P-5x7/P-5x8. Selecting the device depends on the
application and the connectors available.
Electronics Connector(s)* Channels**
E-505 piezo amplifier module
LEMO
1
E-610 piezo amplifier/servo controller (OEM module)
LEMO
1
E-503 piezo amplifier module
LEMO
3
E-621 piezo amplifier/servo controller module D-sub 7W2 1
E-625 piezo servo controller (benchtop device)
D-sub 7W2
1
E-754 digital piezo controller
D-sub 7W2
1
E-727.x • E-727.xAP digital multi-channel piezo
controller
D-sub 25W3
3
E-727.xF digital multi-channel piezo controller
D-sub 25W3
3
E-712 digital piezo controller (modular system)
D-sub 25W3
3/6
* In some cases, adapter cables (p. 12) are necessary for connecting.
** When using single-channel electronics, each motion axis requires its own individual
electronics.

3 Product Description
12 Version: 3.2.0 PZ82E P-5x7/P-5x8 Positioners
3.5 Accessories
Adapter cable with LEMO (mechanics) to D-sub (electronics)
Product number Description
P-895.1LDC
Adapter cable LEMO to D-sub 7W2 (m) for piezo actuator nanopositioning
systems with capacitive sensors, 1 channel, length: 0.3 m.
P-895.3LDC
Adapter cable LEMO to D-sub 25W3 (m) for piezo actuator nanopositioning
systems with capacitive sensors, 3 channels, length: 0.3 m.
Adapter cable with D-sub (mechanics) to LEMO (electronics)
Product number Description
P-895.1DLC
Adapter cable D-sub 7W2 (f) to LEMO for piezo actuator nanopositioning
systems with capacitive sensors, 1 channel, length: 0.3 m.
P-895.3DLC
Adapter cable D-sub 25W3 (f) to LEMO for piezo actuator nanopositioning
systems with capacitive sensors, 3 channels, length: 0.3 m.
Adapter cable with D-sub (mechanics) to D-sub (electronics)
Product number Description
P-895.2D1DDC*
Adapter cable D-sub 25W3 (f) and D-sub 7W2 (f) to D-sub 25W3 (m) for
piezo actuator nanopositioning systems with capacitive sensors, 3 channels,
length: 0.3 m.
P-895.2DDC
Adapter cable 2× D-sub 7W2 (f) to D-sub 25W3 (m) for piezo actuator
nanopositioning systems with capacitive sensors, 2 channels, length: 0.3 m.
P-895.3DDC
Adapter cable 3× D-sub 7W2 (f) to D-sub 25W3 (m) for piezo actuator
nanopositioning systems with capacitive sensors, 3 channels, length: 0.3 m.
* 2 channels to D-sub 25W3 (f) and 1 channel to D-sub 7W2 (f) available.
To order, contact our customer service department (p. 35).

3 Product Description
P-5x7/P-5x8 Positioners PZ82E Version: 3.2.0 13
3.6 Technical Features
3.6.1 PICMA® Piezo Actuators
P-5x7/P-5x8 positioners are driven by PICMA® piezo actuators. PICMA® actuators have
all-ceramic insulation and their performance and lifetime are therefore far superior to
conventional actuators. The ceramic insulation layer protects the monolithic piezoceramic block
against humidity and failure due to increased leakage current. In this way, an especially high
reliability is achieved even under extreme ambient conditions. In contrast to motorized drives,
there are no rotating parts or friction. The piezo actuators are therefore free of backlash,
maintenance, and wear.
3.6.2 Flexure Guides
P-5x7/P-5x8 positioners have flexure guides for friction-free motion and high guiding accuracy.
A flexure guide is an element that is free of static and sliding friction. It is based on the elastic
deformation (bending) of a solid (e.g., steel) and does not have any rolling or sliding parts.
Flexure elements have a high stiffness and load capacity. Flexure guides are maintenance and
wear free. They are 100% vacuum compatible, function in a wide temperature range and do not
require any lubricants.
3.6.3 Capacitive Sensors
Capacitive sensors measure the position directly on the platform (direct metrology) and work
without contact. Neither friction nor hysteresis interferes with the motion, which allows
excellent linearity values to be achieved together with the high position resolution. In
conjunction with suitable electronics, capacitive sensors achieve the best resolution, stability,
and bandwidth.
3.6.4 ID Chip (Models with D-sub Connector Only)
An ID chip is in the D-sub connector of the P-5x7/P-5x8. When the P-5x7/P-5x8 is calibrated at
the factory with digital electronics, the calibration data is saved on the ID chip together with
specific product information. After switching on, the digital electronics read the data from the
ID chip of the P-5x7/P-5x8 connected. A P-5x7/P-5x8 with an ID chip containing calibration data
can therefore be connected to any suitable digital electronics without renewed calibration.
Refer to the manual for the controller for more information on the ID chip.

4 Unpacking
P-5x7/P-5x8 Positioners PZ82E Version: 3.2.0 15
NOTICE
Mechanical overload due to incorrect handling!
Impermissible mechanical overload of the motion platform of the P-5x7/P-5x8 can cause
damage to the piezo actuators, sensors, and flexures of the P-5x7/P-5x8 as well as loss of
accuracy.
Ship the P-5x7/P-5x8 in the original packaging only.
Do not touch any sensitive parts (e.g., motion platform) when handling the P-5x7/P-5x8.
The P-5x7/P-5x8 is delivered with a transport safeguard attached. The following figures serve as
examples and can differ from your positioner model.
Figure 2: Exemplary view: Positioner with transport safeguard (supporting frame marked with arrow)
for protecting the motion platform
Tools and accessories
Suitable screwdriver
Unpacking the P-5x7/P-5x8
1. Unpack the P-5x7/P-5x8 with care.
2. Compare the contents with the scope of delivery according to the contract and the
delivery note.
3. Inspect the contents for signs of damage. If any parts are damaged or missing, contact
our customer service department (p. 35) immediately.
4
Unpacking

4 Unpacking
16 Version: 3.2.0 PZ82E P-5x7/P-5x8 Positioners
4. Remove the transport safeguard:
a) Put the P-5x7/P-5x8 onto a surface with the support frame facing downwards.
b) Release the four plastic screws with a screwdriver. In the following figure, one of
the screws is marked with an arrow.
c) Remove the plastic screws and the support frame.
5. Keep all packaging materials and the transport safeguard in case the product needs to
be returned.