PI P-62 Series User manual

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
PZ234E
P
-62x Positioning Systems
User Manual
Version: 1.1.0
Date: 27.08.2018
This document describes the following products:

P-620, P-621, P-622, P-625, P-628, P-629
PIHera piezo linear stage
P-620.1CD/.1CL/.10L
P-621.1CD/.1CL/.10L/.1U
P-622.1CD/.1CL/.10L/.1U
P-625.1CD/.1CL/.10L
P-628.1CD/.1CL/.10L
P-629.1CD/.1CL/.10L

P-620, P-621, P-622, P-625, P-628, P-629
PIHera piezo XY stage
P-620.2CD/.2CL/.20L
P-621.2CD/.2CL/.20L/.2U
P-622.2CD/.2CL/.20L/.2U
P-625.2CD/.2CL/.20L
P-628.2CD/.2CL/.20L
P-629.2CD/.2CL/.20L

P-620, P-621, P-622
PIHera precision Z stage
P-620.ZCD/.ZCL/.Z0L
P-621.ZCD/.ZCL/.Z0L
P-622.ZCD/.ZCL/.Z0L
.1CD/.2CD/.ZCD
= with Sub-D connector 7W2
.1U/.2U
= with Sub-D connector 5W1 (f)
.1CL/.2CL/.ZCL/.10L/.20L/.Z0L
= with LEMO connector

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list:
http://www.physikinstrumente.com/en/about-pi/patents
© 2018 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 27.08.2018
Document number: PZ234E, CBo, Version 1.1.0
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Audience of this User Manual.................................................. 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Definition of Terms..................................................................................................... 2
1.4 Figures ........................................................................................................................ 2
1.5 Other Applicable Documents ..................................................................................... 3
1.6 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 7
3Product Description 9
3.1 Model Overview ......................................................................................................... 9
3.2 Product View ............................................................................................................ 12
3.3 Product Labeling....................................................................................................... 13
3.4 Scope of Delivery...................................................................................................... 14
3.5 Suitable Electronics .................................................................................................. 15
3.6 Accessories ............................................................................................................... 15
3.7 Technical Features.................................................................................................... 16
3.7.1 PICMA® Piezo Actuators.............................................................................. 16
3.7.2 Flexure Guides ............................................................................................. 16
3.7.3 Capacitive Sensors ....................................................................................... 17
3.7.4 ID Chip (Models with Sub-D 7W2 Connector Only)..................................... 17
4Unpacking 19
5Installation 21
5.1 General Notes on Installation................................................................................... 21
5.2 Mounting the Positioner and Affixing the Load ....................................................... 22
5.3 Connecting the P-62x to the Protective Earth Conductor........................................ 25
5.4 Connecting the Vacuum Version to the Electronics................................................. 29
6Startup and Operation 31
6.1 General Notes on Startup and Operation ................................................................ 31
6.2 Operating the P-62x ................................................................................................. 33
6.3 Discharging the P-62x............................................................................................... 33
Contents

7Maintenance 35
7.1 General Notes on Maintenance ............................................................................... 35
7.2 Cleaning the P-62x.................................................................................................... 35
8Troubleshooting 37
9Customer Service 39
10 Technical Data 41
10.1 Specifications............................................................................................................ 41
10.1.1 Data Table.................................................................................................... 41
10.1.2 Materials Used for Vacuum-Compatible Models ........................................ 45
10.1.3 Maximum Ratings........................................................................................ 45
10.1.4 Ambient Conditions and Classifications ...................................................... 46
10.2 Dimensions ............................................................................................................... 47
10.3 Torque for Stainless Steel Screws (A2-70)................................................................ 50
10.4 Pin Assignment ......................................................................................................... 50
11 Old Equipment Disposal 53
12 EU Declaration of Conformity 55

1 About this Document
P-62x Positioning Systems PZ234E Version: 1.1.0 1
In this Chapter
Objective and Target Audience of this User Manual..................................................................... 1
Symbols and Typographic Conventions ......................................................................................... 1
Definition of Terms ........................................................................................................................ 2
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 3
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Audience of this User Manual
This user manual contains the necessary information for the intended use of the P-62x (x stands
for the different models (p. 9)).
Basic knowledge of control technology, drive technologies and suitable safety measures is
assumed.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injury.
Actions to take to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 1.1.0 PZ234E P-62x Positioning Systems
Symbol/Label Meaning
1.
2.
Action consisting of several steps whose sequential order must
be observed
Action consisting of one or several steps whose sequential order
is irrelevant

List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the product (example:
socket of the RS-232 interface)
Warning signs affixed to the product that refer to detailed
information in this manual.
1.3 Definition of Terms
Term Explanation
Positioner Electrically driven mechanics (here: P-62x) with one or more motion
axes
Electronics Piezo amplifier or piezo controller that supplies the operating voltage
for positioners or piezo actuators
Piezo amplifier Electronics without sensor evaluation for open-loop operating of
positioners and piezo actuators
Piezo controller
Electronics with sensor evaluation for closed-loop operating of
positioners and piezo actuators
1.4 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.

1 About this Document
P-62x Positioning Systems PZ234E Version: 1.1.0 3
1.5 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in their
own manuals.
Product Document
E-503 piezo amplifier module
PZ62E user manual
E-505 piezo amplifier module
E-610 piezo amplifier / servo controller (OEM
module)
PZ70E user manual
PZ72E user manual
E-621 piezo amplifier / servo controller
module
PZ160E user manual
E-625 piezo servo controller (benchtop device) PZ166E user manual
E-663 piezo amplifier PZ69E user manual
E-665 piezo amplifier / servo controller PZ127E user manual
E-709 digital piezo controller PZ222E user manual
E-709.1CC885 digital piezo controller module
E709T0007 user manual
PZ222E user manual
E-712 digital piezo controller (modular system)
PZ195E user manual
E-727.x • E-727.xAP digital multi-channel piezo
controller
E727T0005 user manual
E-727.xF digital multi-channel piezo controller
E-754 digital piezo controller E754T0001 user manual
PIMikroMove SM148E software manual
P-5xx / P-6xx / P-7xx piezo positioning systems PZ240EK short instructions
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 39).
INFORMATION
For products that are supplied with software (CD in the scope of delivery), access to the
manuals is protected by a password. Protected content is only displayed on the website after
entering the access data.
You need the product CD to get the access data.

1 About this Document
4 Version: 1.1.0 PZ234E P-62x Positioning Systems
For products with CD: Get access data
1. Insert the product CD into the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews in the file
name).
4. Get the access data for downloading protected content in the "User login for software
download" section of the Release News. Possible methods for getting the access data:
−Link to a page for registering and requesting the access data
−User name and password is specified
5. If the access data needs to be requested via a registration page:
a) Follow the link in the Release News.
b) Enter the required information in the browser window.
c) Click Show login data in the browser window.
d) Note the user name and password shown in the browser window.
Downloading manuals
If you have requested access data for protected contents via a registration page (see above):
Click the links in the browser window to change to the content for your product and log
in using the access data that you received.
General procedure:
1. Open the website www.pi.ws.
2. If access to the manuals is protected by a password:
a) Click Login.
b) Log in with the user name and password.
3. Click Search.
4. Enter the product number up to the period (e.g., P-620) or the product family (e.g.,
PIHera) into the search field.
5. Click Start search or press the Enter key.
6. Open the corresponding product detail page in the list of search results:
a) If necessary: Scroll down the list.
b) If necessary: Click Load more results at the bottom of the list.
c) Click the corresponding product in the list.
7. Click the Downloads tab.
The manuals are shown under Documentation.
8. Click the desired manual and save it to the hard disk of your PC or to a data storage
medium.

2 Safety
P-62x Positioning Systems PZ234E Version: 1.1.0 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
Organizational Measures............................................................................................................... 7
2.1 Intended Use
The P-62x is a laboratory device as defined by DIN EN 61010-1. It is intended to be used in
interior spaces and in an environment which is free of dirt, oil and lubricants.
Based on its design and realization, the P-62x is intended for fine positioning as well as the fast
and precise movement of small objects. The specifications of the P-62x apply to horizontal
mounting. Depending on the model, the motion is performed as follows:
in one axis horizontally or vertically
in two axes horizontally
Vertical mounting is only possible under certain conditions.
The intended use of the P-62x is only possible in combination with suitable electronics (p. 15)
that is available from PI. The electronics is not included in the scope of delivery of the P-62x.
The electronics must provide the required operating voltages. To ensure proper performance of
the servo control system, the electronics must be able to read out and process the signals from
the capacitive sensors.
2.2 General Safety Instructions
The P-62x is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the P-62x.
Only use the P-62x for its intended purpose, and only use it if it is in a good working
order.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect safety.
The operator is responsible for the correct installation and operation of the P-62x.
2
Safety

2 Safety
6 Version: 1.1.0 PZ234E P-62x Positioning Systems
The P-62x is driven by piezo actuators. Temperature changes and compressive stresses can
induce charges in piezo actuators. After disconnection from the electronics, piezo actuators can
remain charged for several hours. Touching or short-circuiting the contacts in the connector of
the P-62x can lead to minor injuries from electric shock. The piezo actuators can be destroyed
by an abrupt contraction.
Do not open the P-62x.
Discharge the positioner's piezo actuators before installation:
Connect the positioner to the switched-off PI controller, which is equipped with an
internal discharge resistor.
Do not pull the plug connector out of the electronics during operation.
Positioners with Sub-D plug connector:
Touching the contacts in the plug connector can lead to an electric shock (max. 130 V DC) and
minor injuries.
Do not touch the contacts in the plug connector.
Secure the plug connector of the positioner with screws against being pulled out of the
controller.
If a protective earth conductor is not or not properly connected, dangerous touch voltages can
occur on the P-62x in the case of malfunction or failure of the system. If touch voltages exist,
touching the P-62x can result in minor injuries from electric shock.
Connect the P-62x to a protective earth conductor (p. 25) before startup.
Do not remove the protective earth conductor during operation.
If the protective earth conductor has to be removed temporarily (e.g., in the case of
modifications), reconnect the P-62x to the protective earth conductor before starting it
up again.
Mechanical forces can damage or misalign the P-62x.
Avoid impacts that affect the P-62x.
Do not drop the P-62x.
Do not exceed the maximum permissible stress and load capacities according to the
specifications (p. 41).
Touch the base body of the P-62x on the outside only.
The P-62x is maintenance-free and achieves its positioning accuracy as a result of the optimum
alignment of mechanical components and piezo actuators. Loosened screws cause a loss in
positioning accuracy.
Only loosen screws according to the instructions in this manual.
Do not open the P-62x.

2 Safety
P-62x Positioning Systems PZ234E Version: 1.1.0 7
2.3 Organizational Measures
User manual
Always keep this user manual available with the P-62x.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the P-62x to other users, also include this user manual as well as other
relevant information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing information due
to an incomplete user manual can result in minor injury and damage to equipment.
Only install and operate the P-62x after you have read and understood this user
manual.
Personnel qualification
The P-62x may only be installed, started up, operated, maintained, and cleaned by authorized
and appropriately qualified personnel.

3 Product Description
P-62x Positioning Systems PZ234E Version: 1.1.0 9
In this Chapter
Model Overview............................................................................................................................. 9
Product View................................................................................................................................ 12
Product Labeling .......................................................................................................................... 13
Scope of Delivery ......................................................................................................................... 14
Suitable Electronics...................................................................................................................... 15
Accessories................................................................................................................................... 15
Technical Features ....................................................................................................................... 16
3.1 Model Overview
The P-62x is available in the following versions:
PIHera piezo linear stage
Model Description
P-620.1CD
PIHera precision linear nanopositioning system, 50 µm, direct position
measuring, capacitive sensor, Sub-D connector
P-620.1CL
PIHera precision linear nanopositioning system, 50 µm, direct position
measuring, capacitive sensor, LEMO connector(s)
P-620.10L
PIHera precision linear nanopositioning system, 60 µm, without sensor,
LEMO connector(s)
P-621.1CD
PIHera precision linear nanopositioning system, 100 µm, direct position
measuring, capacitive sensor, Sub-D connector
P-621.1CL
PIHera precision linear nanopositioning system, 100 µm, direct position
measuring, capacitive sensor, LEMO connector(s)
P-621.10L PIHera precision linear nanopositioning system, 120 µm, without sensor,
LEMO connector(s)
P-622.1CD PIHera precision linear nanopositioning system, 250 µm, direct position
measuring, capacitive sensor, Sub-D connector
P-622.1CL PIHera precision linear nanopositioning system, 250 µm, direct position
measuring, capacitive sensor, LEMO connector(s)
P-622.10L PIHera precision linear nanopositioning system, 300 µm, without sensor,
LEMO connector(s)
P-625.1CD PIHera precision linear nanopositioning system, 500 µm, direct position
measuring, capacitive sensor, Sub-D connector
P-625.1CL PIHera precision linear nanopositioning system, 500 µm, direct position
measuring, capacitive sensor, LEMO connector(s)
3
Product Description

3 Product Description
10 Version: 1.1.0 PZ234E P-62x Positioning Systems
Model Description
P-625.10L
PIHera precision linear nanopositioning system, 600 µm, without sensor,
LEMO connector(s)
P-628.1CD
PIHera precision linear nanopositioning system, 800 µm, direct position
measuring, capacitive sensor, Sub-D connector
P-628.1CL
PIHera precision linear nanopositioning system, 800 µm, direct position
measuring, capacitive sensor, LEMO connector(s)
P-628.10L
PIHera precision linear nanopositioning system, 950 µm, without sensor,
LEMO connector(s)
P-629.1CD PIHera precision linear nanopositioning system, 1500 µm, direct position
measuring, capacitive sensor, Sub-D connector
P-629.1CL PIHera precision linear nanopositioning system, 1500 µm, direct position
measuring, capacitive sensor, LEMO connector(s)
P-629.10L PIHe
ra precision linear nanopositioning system, 1800 µm, without sensor,
LEMO connector(s)
PIHera piezo linear stage (vacuum compatible to 10-9 hPa)
Model Description
P-621.1U
PIHera precision linear nanopositioning system, 100 µm, direct position
measuring, capacitive sensor, Sub-D connector, vacuum compatible to
10-9 hPa
P-622.1U
PIHera precision linear nanopositioning system, 250 µm, direct position
measuring, capacitive sensor, Sub-D connector, vacuum compatible to
10-9 hPa
PIHera piezo XY stage
Model Description
P-620.2CD
Precise PIHera XY nanopositioning system, 50 µm × 50 µm, direct position
measuring, capacitive sensors, Sub-D connector
P-620.2CL
Precise PIHera XY nanopositioning system, 50 µm × 50 µm, direct position
measuring, capacitive sensors, LEMO connector(s)
P-620.20L
Precise PIHera XY nanopositioning system, 60 µm × 60 µm, without
sensors, LEMO connector(s)
P-621.2CD
Precise PIHera XY nanopositioning system, 100 µm × 100 µm, direct
position measuring, capacitive sensors, Sub-D connector
P-621.2CL
Precise PIHera XY nanopositioning system, 100 µm × 100 µm, direct
position measuring, capacitive sensors, LEMO connector(s)
P-621.20L Precise PIHera XY nanopositioning system, 120 µm × 120 µm, without
sensors, LEMO connector(s)
P-622.2CD Precise PIHera XY nanopositioning system, 250 µm × 250 µm, direct
position measuring, capacitive sensors, Sub-D connector

3 Product Description
P-62x Positioning Systems PZ234E Version: 1.1.0 11
Model Description
P-622.2CL
Precise PIHera XY nanopositioning system, 250 µm × 250 µm, direct
position measuring, capacitive sensors, LEMO connector(s)
P-622.20L
Precise PIHera XY nanopositioning system, 300 µm × 300 µm, without
sensors, LEMO connector(s)
P-625.2CD
Precise PIHera XY nanopositioning system, 500 µm × 500 µm, direct
position measuring, capacitive sensors, Sub-D connector
P-625.2CL
Precise PIHera XY nanopositioning system, 500 µm × 500 µm, direct
position measuring, capacitive sensors, LEMO connector(s)
P-625.20L Precise PIHera XY nanopositioning system, 600 µm × 600 µm, without
sensors, LEMO connector(s)
P-628.2CD Precise PIHera XY nanopositioning system, 800 µm × 800 µm, direct
position measuring, capacitive sensors, Sub-D connector
P-628.2CL Precise PIHera XY nanopositioning system, 800 µm × 800 µm, direct
position measuring, capacitive sensors, LEMO connector(s)
P-628.20L Precise PIHera XY nanopositioning system, 1000 µm × 1000 µm, without
sensors, LEMO connector(s)
P-629.2CD Precise PIHera XY nanopositioning system, 1500 µm × 1500 µm, direct
position measuring, capacitive sensors, Sub-D connector
P-629.2CL Precise PIHera XY nanopositioning system, 1500 µm × 1500 µm, direct
position measuring, capacitive sensors, LEMO connector(s)
P-629.20L Precise PIHera XY nanopositioning system, 1800 µm × 1800 µm, without
sensors, LEMO connector(s)
PIHera piezo XY stage (vacuum compatible to 10-9 hPa)
Model Description
P-621.2U Precise PIHera XY nanopositioning system, 100 µm × 100 µm, direct
position measuring, capacitive sensors, Sub-D connector, vacuum
compatible to 10-9 hPa
P-622.2U Precise PIHera XY nanopositioning system, 250 µm × 250 µm, direct
position measuring, capacitive sensors, Sub-D connector, vacuum
compatible to 10-9 hPa
PIHera precision Z stage
Model Description
P-620.ZCD
Precise PIHera vertical nanopositioning stage, 50 µm, direct position
measuring, capacitive sensor, Sub-D connector
P-620.ZCL
Precise PIHera vertical nanopositioning stage, 50 µm, direct position
measuring, capacitive sensor, LEMO connector(s)
P-620.Z0L Precise PIHera vertical nanopositioning stage, 65 µm, without sensor,
LEMO connector(s)

3 Product Description
12 Version: 1.1.0 PZ234E P-62x Positioning Systems
Model Description
P-621.ZCD
Precise PIHera vertical nanopositioning stage, 100 µm, direct position
measuring, capacitive sensor, Sub-D connector
P-621.ZCL
Precise PIHera vertical nanopositioning stage, 100 µm, direct position
measuring, capacitive sensor, LEMO connector(s)
P-621.Z0L
Precise PIHera vertical nanopositioning stage, 140 µm, without sensor,
LEMO connector(s)
P-622.ZCD
Precise PIHera vertical nanopositioning stage, 250 µm, direct position
measuring, capacitive sensor, Sub-D connector
P-622.ZCL Precise PIHera vertical nanopositioning stage, 250 µm, direct position
measuring, capacitive sensor, LEMO connector(s)
P-622.Z0L Precise PIHera vertical nanopositioning stage, 350 µm, without sensor,
LEMO connector(s)
3.2 Product View
The figure serves as an example and can differ from your positioner model.
Pay attention to the symbols on your device.
Figure 1: Example of product view
1Motion platform
2Base body
3Protective earth connection
4Cable exit

3 Product Description
P-62x Positioning Systems PZ234E Version: 1.1.0 13
Directions of motion of the P-62x
The arrows indicate the positive direction of motion in each case.
P-62x.1x(x) P-62x.2x(x)
P-62x.Zxx
3.3 Product Labeling
Labeling Description
P-621.1CD
Product number (example), the digits after the period
refer to the model
123456789
Serial number (example), individual for each P-62x
Meaning of the places (counting from left):
1 = internal information
2 and 3 = year of manufacture
4 to 9 = consecutive numbers
PIHera Brand name
Warning sign "Observe manual!"
Old equipment disposal (p. 53)
Country of origin: Germany Country of origin
WWW.PI.WS
Manufacturer's address (website)
CE conformity mark
Manufacturer's logo
Symbol for the protective earth conductor (p. 25)

3 Product Description
14 Version: 1.1.0 PZ234E P-62x Positioning Systems
If applicable:
The arrows indicate the positive direction of motion.
The letter X, Y, and Z indicate the axis.
Figure 2: "Residual Voltage" warning sign on the connector of the P-62x
"Residual Voltage" warning: Risk of electric shock (p. 5) for models with Sub-D plug connector
3.4 Scope of Delivery
Product number Components Model
P-62x
Positioner according to order (p. 9)
-
000036450
M4 screw set for protective earth, consisting of:
1 flat-head screw with cross recess, M4x8,
ISO 7045
2 safety washers
2 flat washers
All models except
P-620 and
P-621.2xx/.2U
000036451
M2 screw set for protective earth, consisting of:
4 socket head screws, M2x12, ISO 4762
4 safety washers
4 dowel pins, Ø 1 m6 x 4, ISO 8734
1 hex key
P-620
2491 Screw set, consisting of:
8 M3x10 socket head screws, DIN 7984
4 dowel pins Ø 1.5 m6 x 4, ISO 8734
1 hex key
P-621.2xx/.2U
P-622.2xx/.2U
P-625.2xx
P-628.2xx
000017112 Screw set, consisting of:
4 socket head screws, M4x16, ISO 7984
4 dowel pins Ø 1.5 m6 x 4, ISO 8734
1 hex key
P-629.2xx
000011857 Screw set, consisting of:
4 M3x10 socket head screws, DIN 7984
4 dowel pins Ø 1.5 m6 x 4, ISO 8734
1 hex key
P-621.Zxx
P-622.Zxx
PZ240EK Short instructions for piezo positioning systems All models

3 Product Description
P-62x Positioning Systems PZ234E Version: 1.1.0 15
3.5 Suitable Electronics
To operate a P-62x, you need suitable electronics. Selection of the device depends on the
application and the connections available.
Electronics Connector* Channels**
E-505 piezo amplifier module LEMO 1
E-610 piezo amplifier / servo controller (OEM module) LEMO 1
E-503 piezo amplifier module LEMO 3
E-663 piezo amplifier LEMO 3
E-621 piezo amplifier / servo controller module Sub-D 7W2 1
E-625 piezo servo controller (benchtop device)
Sub-D 7W2
1
E-665 piezo driver / servo controller (benchtop device) Sub-D 7W2 1
E-709 digital piezo controller Sub-D 7W2 1
E-709.1CC885 digital piezo controller module Sub-D 7W2 1
E-754 digital piezo controller Sub-D 7W2 1
E-727.x • E-727.xAP digital multi-channel piezo
controller
Sub-D 25W3
3
E-727.xF digital multi-channel piezo controller
Sub-D 25W3
3
E-712 digital piezo controller (modular system)
Sub-D 25W3
3/6
* In some cases, adapter cables (p. 15) are necessary for connecting.
** When using single-channel electronics, each motion axis requires its own individual
electronics.
3.6 Accessories
Adapter cable for models with Sub-D plug connector(s)
Product number Description
P-895.2D1DDC*
Adapter cable Sub-D 25W3 (f) and Sub-D 7W2 (f) to Sub-D 25W3 (m) for
piezo actuator nanopositioning systems with capacitive sensors, 3 channels,
length: 0.3 m.
P-895.2DDC
Adapter cable 2× Sub-D 7W2 (f) to Sub-D 25W3 (m) for piezo actuator
nanopositioning systems with capacitive sensors, 2 channels, length: 0.3 m.
P-895.3DDC Adapter cable 3× Sub-D 7W2 (f) to Sub-D 25W3 (m) for piezo actuator
nanopositioning systems with capacitive sensors, 3 channels, length: 0.3 m.
* 2 channels to Sub-D 25W3 (f) and 1 channel to Sub-D 7W2 (f) available.

3 Product Description
16 Version: 1.1.0 PZ234E P-62x Positioning Systems
Adapter cable for models with LEMO plug connectors
Product number Description
P-895.1LDC Adapter cable LEMO to Sub-D 7W2 (m) for piezo actuator nanopositioning
systems with capacitive sensors, 1 channel, length: 0.3 m.
P-895.3LDC Adapter cable LEMO to Sub-D 25W3 (m) for piezo actuator nanopositioning
systems with capacitive sensors, 3 channels, length: 0.3 m.
Accessories for vacuum-compatible models
Product number Description
P-890.1CV
Vacuum feedthrough for piezo voltage to 130 V and sensor signal
(capacitive sensor), 1 channel, to 10-9 hPa, bakeout to 150 °C
P-890.2CV
Vacuum feedthrough for piezo voltage to 130 V and sensor signal
(capacitive sensor), 2 channels, to 10-9 hPa, bakeout to 150 °C
K030B0392 Adapter cable, Sub-D 5W1 to Sub-D 7W2, 1 channel, 2 m, for connecting to
P-890.1CV or P-890.2CV vacuum feedthrough*
To order, contact our customer service department (p. 39).
3.7 Technical Features
3.7.1 PICMA® Piezo Actuators
P-62x positioners are driven by PICMA® piezo actuators. PICMA® actuators have all-ceramic
insulation and their performance and lifetime are therefore far superior to conventional
actuators. The ceramic insulation layer protects the monolithic piezoceramic block against
humidity and failure due to increased leakage current. In this way, an especially high reliability
is achieved even under extreme ambient conditions. In contrast to motorized drives, there are
no rotating parts or friction. The piezo actuators are therefore free of backlash, maintenance,
and wear.
3.7.2 Flexure Guides
P-62x positioners have flexure guides for friction-free motion and high guiding accuracy.
A flexure guide is an element that is free of static and sliding friction. It is based on the elastic
deformation (bending) of a solid (e.g., steel) and does not have any rolling or sliding parts.
Flexure elements have a high stiffness and load capacity. Flexure guides are maintenance and
wear free. They are 100 % vacuum compatible, function in a wide temperature range and do
not require any lubricants.