MKS 647B User manual

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Multi Channel
Flow Ratio/Pressure Controller
Type 647B
Instruction Manual
MKS Instruments
Deutschland GmbH Ausgabe 11/99 Rev.11.96
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Copyright © 1999 by MKS Instrument Deutschland GmbH.
Alle Rechte vorbehalten. Es ist nicht gestattet, Teile des vorliegenden Dokuments zu vervielfältigen oder in
irgendeiner Form bzw. mit irgendwelchen elektronischen oder mechanischen Mitteln, einschließlich des
Fotokopierens und der Aufzeichnung, bzw. mit Hilfe von Speicher- oder Informationswiedergewinnungs-
systemen zu übertragen, sofern keine ausdrückliche schriftliche Genehmigung seitens der MKS Instruments
Deutschland GmbH vorliegt.
Gedruckt in der Bundesrepublik Deutschland.
Cajon®und VCR®sind eingetragene Warenzeichen der Cajon Company, Macedonia, Ohio
Kalrez®und Viton®sind eingetragene Warenzeichen der E. I. DuPont de Nemours und Co. Inc., Wilmington,
Delaware
Neoprene®ist eingetragenes Warenzeichen der Vibration, Mountings & Controls, Inc., Bloomingdale, New
Jersey
Swagelok®ist eingetragenes Warenzeichen der Crawford Fitting Company, Solon, Ohio
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647B Contents
iii
Contents
1. General....................................................................................................................................1
1.1The Multi Gas Controller (MGC) Type 647B..............................................................1
1.2 CE conformity...........................................................................................................1
1.3 Options .....................................................................................................................1
1.4 Software....................................................................................................................1
1.5 Technical Specifications...........................................................................................2
1.6 Drawings...................................................................................................................3
1.6.1 Front Panel...............................................................................................3
1.6.2 Rear Panel................................................................................................4
1.7 Safety Information.....................................................................................................5
1.7.1 Symbols Used in this Instruction Manual..................................................5
1.7.2 Safety Instructions....................................................................................6
1.8 Installation.................................................................................................................6
1.9 Symbols at the case .................................................................................................7
1.10 Accessories ............................................................................................................7
1.11 Cables.....................................................................................................................7
1.12 Service....................................................................................................................7
2. Operating Instructions..............................................................................................................8
2.1 The User Interface....................................................................................................8
2.2 The Menu Tree.........................................................................................................9
2.3 Reset of System .......................................................................................................10
2.4 Display adjustment ...................................................................................................10
3. Functionality.............................................................................................................................11
3.1 The MAIN MENU......................................................................................................11
3.2 The USER DISPLAY menu ......................................................................................11
3.3 The EXTENDED DISPLAY menu.............................................................................12
3.4 The PRESSURE CONTROL menu..........................................................................13
3.5 Tuning the PID Controller .........................................................................................13
3.6 Diagnosis of System.................................................................................................15
3.6.1 The ERROR LISTING menu ....................................................................15
3.6.2 The SIGNALS menu.................................................................................16
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3.7 Instrument Setup.......................................................................................................16
3.7.1 Range Selection........................................................................................17
3.7.2 Gas Selection............................................................................................18
3.7.3 Mode Selection .........................................................................................19
3.7.4 Zero Adjustment........................................................................................21
3.7.5 Trip Limit Supervision ...............................................................................22
3.7.6 Gas Composition ......................................................................................23
3.8 System Setup............................................................................................................24
3.8.1 IEEE 488 Setup.........................................................................................24
3.8.2 RS232 Setup.............................................................................................26
3.8.3 System Parameters ...............................................................................................29
3.9 Pressure Setup .........................................................................................................30
3.10 Information about the System.................................................................................31
4. Remote Control........................................................................................................................31
4.1 Compatibility..............................................................................................................31
4.2 Command Syntax .....................................................................................................32
4.3 Table of Commands .................................................................................................33
5. Application of the 647B............................................................................................................38
5.1 Mass Flow Controllers ..............................................................................................38
5.2 Trouble Shooting.......................................................................................................39
6. Pin Assignment of rear connectors..........................................................................................40
6.1 RS232 connector ......................................................................................................40
6.2 IEEE 488 connector..................................................................................................40
6.3 RELAYS connector...................................................................................................41
6.4 VIDEO connector......................................................................................................42
6.5 MFC connector: CH1 to CH8....................................................................................42
6.6 ACCESS connector ..................................................................................................43
6.7 PRESSURE connector .............................................................................................43
7. Gas Correction Table...............................................................................................................44
INDEX..........................................................................................................................................48
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1. General
1.1The Multi Gas Controller (MGC) Type 647B
The 647B is designed to control Mass Flow Controllers (MFC) with complex requirements to the
process. It allows different configuration.
Warning The safety instructions in this document must be kept. Please, take
also a special note of all highlighted text in this document.
-Various master/slave configurations within several groups of channels.
-External control of mass flow controllers.
-Regulation of the pressure with a constant gas flow ratio.
1.2 CE conformity
The device complies to the CE regulations and conformity is declared to the following standards:
-EN 55011 / 3.1991; Group 1; class B
-EN 50082-1 1992
-PrEN 50082-2 1992
-IEC 801-2, IEC 801-3, IEC 801-4
-EN 61010 ; 1993
1.3 Options
The following options are available for the 647B. Modules labeled with “(standard)” are part of the
basic version:
647BE-X-X-P-X
(X = any available model code)
The basic version can be extended later on with every proper combination.
1.4 Software
This manual meets software version V2.2.
N=no Trip Relays; T=with Trip Relays
R=RS232; E=IEEE Interface
4=4 Channels; 8=8 Channels
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1.5 Technical Specifications
channels for gas flow
-max. number of channels
-input voltage
-output voltage
-error range
-temperature drift
4 (optional 8)
-0.5 ... 5.5 V
-0.5 ... 5.5 V
+/- 1 digit
0.075 % / °C (7)
pressure channel:
-input voltage
-output voltage
-resolution
-error range
-temperature drift
max. 1 channel
-0.5 ... 10 V
-0.5 ... 5 V
16 bit
+/- 3 digit
0.075 % / °C (7)
external setpoint -0.5 ... 5.5 V
measuring rate
output rate 20 Hz / channel 20 Hz / channel
operation temperature
humidity 15 ... 40 °C (5) < 70 % (3) (4)
Power supply:
-voltage
-fuse
-frequency
-consumed power
power supply for sensors:
-voltages
-max. current per sensor
-max. total current
110/220 V; +/- 10 %
F 5 A, 250 V (fast burn)
40 ... 70 Hz
300 W
+/- 15 V; +/- 5 %
500 mA (1)
4 A (2)
Dimensions
Weight 19” x 3 HE x 342 mm (6) 8.8 kg 4 channel
9.2 kg 8 channel
(1) Consider also the warming up period of the sensors.
(2) For all channels, i.e. gas flow and pressure
(3) Relative humidity within the specified temperature range.
(4) For use in closed heatable rooms, without condesation.
(5) Convectional cooling is assumed.
(6) Without connectors.
(7) For max. signal, within the range of operation temperature.
Figure 1
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1.6 Drawings
1.6.1 Front Panel
A = Key Switch
B = Monitor (LCD Display) Figure 2
C = Keyboard
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1.6.2 Rear Panel
1 = Power Supply Connector Figure 3 8 = Connector PRESSURE for ext.
2 = Voltage Selector Switch pressure controller or transducer
3 = RS 232 Interface (IEEE optional) 9 = Connector ACCESS
4 – 7 = Connectors for MFC’s 10 = Connector RELAYS
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1.7 Safety Information
1.7.1 Symbols Used in this Instruction Manual
Definitions of WARNING, CAUTION, and ATTENTION messages used throughout the manual.
Warning The WARNING sign denotes a hazard. It calls attention to a
procedure, practice, condition, or the like, which, if not correctly
performed or adhered to, could result in injury to personnel.
Caution The CAUTION sign denotes a hazard. It calls attention to an
operating procedure, practice, or the like, which, if not correctly
performed or adhered to, could result in damage to or destruction of
all or part of the product.
Attention The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.
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1.7.2 Safety Instructions
Attention: Please read this instruction carefully and follow it before using this device.
This device is state of the art and save. But danger may appear by the device, if not used according
to the instructions or the professional knowledge.
Only spare parts of the manufacturer may be used for replacements.
The device must not be used in explosive environments.
Safety and reliability is only given in the following cases:
-the device is used according to the manual
-the device is serviced by personel of the manufacturer only.
-The installation of the device complies th the national derectives and
standards.
Cleaning of the device must performed, if it is desconnected from power supply and if the cleaning
is performed dry.
Warning The device may be opened by MKS service personel only. If the device is
open, danger for life (by high voltage) may occur.
1.8 Installation
The device must be used in a dry and heated room (see ambient temperature).
The device produces heat due to the power consumption. In order to avoid overheating the opening
of the fan and all other openings in the case must not be closed. Air must circulate through this
openings without any blocking.
Attention: The correct setting of the power voltage setting must be checked before
power is applied to the device.
Follow the steps below. For installation of the device:
-Hook the device to the power plug. If you use a transformer, it must be able to supply
300 Watt.
-Hook the instruments to the device, according to the pinout of the connectors or use the
appropirate cables.
-Switch the device on, and perform the setup in the menues INSTRUMENT SETUP and
SYSTEM SETUP.
If the digital interface is used (RS232, IEEE), the setup in the SYSTEM SETUP menu is
of special importance.
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-If you have problems booting the system, you should read the chapter “Reset of
System” and “Applications of the 647B”.
1.9 Symbols at the case
The device shows some symbols, which are explained here:
-The “!” ( ) says to watch the documentation/manual.
-The type label gives information about the device type, the serial number and some
technical date.
-The label close to the fuse holder tells the specification of spare fuses: F 5A, 250V.
1.10 Accessories
The 647B comes with the following accessories:
-Sub-D connector sets for the instruments:
4 channel device: ZB-19
8 channel deivce: ZB-20
-Power cable: Y-0984492
-Manual: Y-1957647
-2*handles for the case: Y-5150011
-4*screws for the handles: Y-1600005
1.11 Cables
Refer to the instruction manuals of the respective mass flow meters, mass flow controllers and
pressure transducers for cable information.
1.12 Service
In case of problems or failure of the device, please contact your local MKS representative. The last
page of this manual contains a list of service and calibration centers.
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2. Operating Instructions
2.1 The User Interface
The device is operated via menus. A menu consists of submenus, input fields or display fields.
Submenus can be reached by typing the number labeling them on the screen or selecting them with
the cursor and typing <0>. They can be exited pressing the <ESC> button. Input fields are
highlighted by a cursor frame, when they are selected for input. Using the cursor keys different input
fields can be selected (i.e. the cursor keys move the cursor on the screen). The input fields allow
values to be edited or selected by scrolling up and down through a table. In some cases certain
input fields are not active.
The top line of the screen (title) displays the device type (MGC = Multi Gas Controller) and software
version. The status line on the bottom of the screen displays the number of errors, the status of the
main valve and the input status of the keyboard (see also MAIN MENU).
MGC 647B V2.2 ←title
(1) USER DISPLAY
(2) EXTENDED DISPLAY
(3) PRESSURE CONTROL
(4) DIAGNOSTICS
(5) INSTRUMENT SETUP
(6) SYSTEM SETUP
(7) PRESSURE SETUP
(9) INFORMATION
←datafield
00 ERRORS FLOW OFF INPUT DIRECT ←statusline
(comment: the cursor is shown as underline in this document)
Figure 4
If errors occured, detailed error descriptions are available through the menu ERROR LISTING, see
page 15.
In order to turn off all gas flows at once there are the main valve functions. The main valve is
switched on with the key combination <ON><ALL> and switched off with key combination
<OFF><ALL>. The current state of the main valve is displayed as FLOW ON (open) and FLOW
OFF (closed), respectively.
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The state of the keyboard is displayed in the “INPUT” field of the status line.
DIRECT = input from keyboard enabled
ON = last input was <ON>
OFF = last input was <OFF>
LOCKED = The keyboard is locked through RS232 or IEEE
MEMORY = A stored gas menu is active
In the 8 channel version, it is not possible to display all channels simultaneously on the display.
Therefore it is possible to scroll through the channels display horizontally.
2.2 The Menu Tree
MAIN MENU
|
|-- (1) USER DISPLAY
|
|-- (2) EXTENDED DISPLAY
|
|-- (3) PRESSURE CONTROL
|
|-- (4) DIAGNOSTICS
| |
| |-- (4.1) ERROR LISTING
| |
| •-- (4.2) SIGNALS
|
|-- (5) INSTRUMENT SETUP
| |
| |-- (5.1) RANGE SELECTION
| |
| |-- (5.2) GAS SELECTION
| |
| |-- (5.3) MODE SELECTION
| |
| |-- (5.4) ZERO ADJUST
| |
| |-- (5.5) TRIP LIMITS
| |
| •-- (5.6) GAS COMPOSITION
|
|-- (6) SYSTEM SETUP
|
|-- (7) PRESSURE SETUP
|
•-- (8) INFORMATION Figure 5
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2.3 Reset of System
There are four types of Reset:
-First Start Reset
-Power Up Reset
-Hardware Reset
-Reset to Default
Attention: All of the above resets will switch off all gas flow controllers.
First Start Reset will appear if the system is started for the first time or if the RAM has been
replaced. This has usually already taken place at the factory. All data in the RAM are initialized with
this reset. A quick tap on keys <7> and <9> will force the system to First Start Reset.
If the device refuses to come up on power on, press button <8> while switching the
device on in order to perform a total reset (equal to First Start Reset). This problem can
have 2 reasons:
-Data in memory was destroyed through a transient. The described procedure will fix
this problem.
-There is an error in the hardware. If the Start Up problem occurs more than once
contact your local MKS service center.
Power Up Reset is performed everytime the system is switched on. It resets all data which are
needed for system administration. Data of process parameters are not
affected.
Hardware Reset is similar to Power Up Reset. It is triggered by the keys <OFF> and <cursor right>
pressed at the same time. In any case Power Up or Hardware Reset leads to the MAIN MENU.
Reset to Default sets all process parameters to their default value. This reset is
triggered in SYSTEM SETUP menu.
After the device has been turned off, one should wait for ca. 15 seconds before turning it on again.
2.4 Display adjustment
The viewing angle of the LCD display and the timeout setting of its back light saver, may be set in
SYSTEM BACKUP menu.
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3. Functionality
3.1 The MAIN MENU
After turning on the power switch (1) the MAIN MENU is displayed. From this menu the different
submenus are accessible. (See also figure 4).
3.2 The USER DISPLAY menu
MGC 647B V2.2
CH1 CH2 CH3 CH4
0.000 1.750 1.400 0.000
SCCM SCCM SLM SLM
CH5 CH6 CH7 CH8
0.000 0.000 0.000 0.000
SLM SCCM SCCM SCCM
PRESSURE 0000.0 mbar
TOTAL FLOW: 001.4 SLM GAS MENU: X
00 ERRORS FLOW ON INPUT DIRECT
Figure 6
The USER DISPLAY menu allows monitoring the system during operation. It displays all gas flows
of the connected Mass Flow Controllers.
All gas flow values are displayed in a 4 digit format without limiting the resolution.
Additionally the physical unit of the gas flow is shown below. The sum of all gas flow
values (TOTAL FLOW) is displayed additionally. The unit of the total flow can be selected through
the keyboard.
The user can select one out of five predefined composition ratios (see also GAS COMPOSITION
menu) through the GAS MENU parameter. The stored composition
ratios are labled with numbers 1 to 5. X means that none of the stored ratios is activated. In this
case the setpoints for the mass flow controllers are the ones defined in EXTENDED DISPLAY.
The displayed value of TOTAL FLOW is the sum of all single gas flows. Because flow units of
different decades (e.g. SCCM and SLM) are added, it might come to discrepancies between the two
displays, which are due to rounding errors. Step through the flow units of the TOTAL FLOW, in
order to optimize TOTAL FLOW display.
Since negative flow values are not added to TOTAL FLOW, channels wich are turned off can not
cause errors.
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3.3 The EXTENDED DISPLAY menu
MGC 647B V2.2
CH1 CH2 CH3 CH4
ACT.FLOW 0.000 1.750 1.400 0.000
SETPOINT 4.500 1.750 1.400 0.728
UNIT SCCM SCCM SLM SLM
RANGE FS. 5.000 5.000 1.4000 1.450
GAS USER AIR CO2 He
MODE INDEP. INDEP. INDEP. SLAVE
STATUS OFF ON ON ON
PRESSURE 0000.0 mbar
00 ERRORS FLOW ON INPUT DIRECT
Figure 7
The EXTENDED DISPLAY menu allows controlling the system before and during operation. It
contains the most important information needed to control the system.
Here the setpoints of all channels can be set and changed. The setpoints are selected by using the
cursor keys. The input is done either numerically by typing in the values or by scrolling using the
cursor keys. If MEMORY is displayed in the INPUT field of the status line, a predefined gas menu
has been selected in the previosly described USER DISPLAY menu. In this case the set points of
the channels cannot be changed.
Due to instabilities at the lower end of MFC range, the lowest setpoint is limited to 1%. Setpoints
less than that are displayed as zero and an output value of –0.5 V is transferred to the MFC.
The displayed full scale ranges (RANGE FS.) are the ranges of each controller scaled with the gas
correction factors. E.g. channel 4 controls a MFC with a range of 1 slm, calibrated in nitrogen. The
regulated gas is helium and has a correction factor of 1.450 with respect to the calibration gas
nitrogen, i.e. the actual full scale range is: RANGE FS. = 1 * 1.45 = 1.45 slm.
The actual gas flow of each channel is displayed in the line ACT.FLOW. Here the correction factors
and ranges of the selected gases are also automatically taken into account. Values higher than
110% are displayed as an overflow through dashes: “-.---“. The lowest displayed flow value is –
10%. (See also Zero Adjust).
Typing <ON><x> turns on the valve of channel x and causes its set point to be sent to the mass
flow controller. In addition to provide the possibility of turning on and off all controllers at the same
time, there is the switch <ON/OFF><ALL>. The green LED (GAS ON) indicates that at least one
mass flow controller is active.
A blinking red LED indicates that the software is working without problems (STAND BY).
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3.4 The PRESSURE CONTROL menu
MGC 647B V2.2
CH1 CH2 CH3 CH4
0.000 1.750 1.400 0.000
CH5 CH6 CH7 CH8
0.000 0.000 0.000 0.000
GAIN 01.00 PRESSURE UNIT
INTEG 02.00 Torr
LEAD 00.30 0.3501
SETPOINT MODE
PCS 0.467 OFF
0.3500
00 ERRORS FLOW ON INPUT DIRECT
Figure 8
The PRESSURE CONTROL menu displays the actual flows and the actual pressure with its unit.
During an application with an external pressure controller, the corrective action is also shown in
PCS (Pressure Control Signal).
The pressure is controllable through the pressure setpoint and the two pressure modes:
OFF - set point for pressure regulation is turned off.
AUTO - set point for pressure regulation is turned on.
All parameters are edited as usual.
3.5 Tuning the PID Controller
There are three additional parameters to setup the PID algorithm, with the PID optional only.
The best procedure to tune the PID controller, is to make the step response of the application,
evaluate the parameters dead time (Tt) and rise time (Ts) and then calculate the PID parameters.
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Figure 9
tuning for optimal step response:
- gain = 0.6 / K
- integral action = 1 * Ts
- lead = 0.5 * Tt
tuning for optimal disturbance response:
- gain = 0.95 / K
- integral action = 2.4 * Ts
- lead = 0.42 * Tt
K is the relation of actual pressure to actual total flow, both are to be taken as
percent of full scale.
To improve the speed of your application, first increase the value of the gain parameter, then
change the integral action.
If you cannot record a step response of your process, it is also possible to estimate the necessary
values. Measure the time between the opening of the valves and the beginning change of the actual
pressure as Tt. Then measure the time until pressure has gained 63% of the final pressure value.
Configuration of an Application:
Figure 10
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3.6 Diagnosis of System
3.6.1 The ERROR LISTING menu
If the status line indicates the occurrence of errors, details about these errors and the affected
channels can be retrieved from the ERROR LISTING menu.
MGC 647B V2.2
ERROR LISTING CHANNELS
TRIP LOW LIMIT 12
TRIP HIGH LIMIT 2
INPUT OVERFLOW
INPUT UNDERFLOW
OUTPUT OVERFLOW
OUTPUT UNDERFLOW
LIST MODE HISTORY
03 ERRORS FLOW ON INPUT DIRECT
Figure 11
Error messages:
-TRIP LOW LIMIT
The actual flow is lower than the low limit. (see also TRIP LIMITS menu, page 22)
-TRIP HIGH LIMIT
The actual flow is higher than the high limit. (see also TRIP LIMITS menu, page 22)
-INPUT OVERFLOW / INPUT UNDERFLOW
The input signal of the displayed channel is higher than 10V or lower than
–10V.
-OUTPUT OVERFLOW / OUTPUT UNDERFLOW
The output signal is higher than 10 V or lower than –10V.
Since the calculated value cannot be transmitted to the controller, this can disturb the
regulation behavior of closed loops.
Two display modes are possible in ERROR LISTING. The HISTORY mode stores all errors
having occured until leaving the error listing. In the ACTUAL mode only actual valid errors
are displayed.
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