MKS Compact Closed Loop Picomotor User manual

User Manual
Compact
Closed Loop Picomotor™
Actuator
Model 8311

8311 – Compact Closed-Loop Picomotor Actuator User Manual
90097264 Rev. A – EDH0426En1010 – 07/20 2
Warranty
Newport Corporation warrants that this product will be free from defects in material and
workmanship and will comply with Newport’s published specifications at the time of sale
for a period of one year from date of shipment. If found to be defective during the warranty
period, the product will either be repaired or replaced at Newport's option.
To exercise this warranty, write or call your local Newport office or representative, or
contact Newport headquarters in Irvine, California. You will be given prompt assistance and
return instructions. Send the product, freight prepaid, to the indicated service facility.
Repairs will be made, and the instrument returned freight prepaid. Repaired products are
warranted for the remainder of the original warranty period or 90 days, whichever occurs
last.
Limitation of Warranty
This warranty does not apply to defects resulting from modification or misuse of any
product or part.
CAUTION
Warranty does not apply to damages resulting from:
•Incorrect usage:
–Driven load greater than maximum specified load.
–Actuator speed higher than specified speed.
–Improper grounding.
–Connectors must be properly secured.
–When the load on the stage represents an electrical risk, it must be
connected to ground.
–Excessive or improper cantilever loads.
•Modification of the actuator or any part thereof.
This warranty is in lieu of all other warranties, expressed or implied, including any implied
warranty of merchantability or fitness for a particular use. Newport Corporation shall not be
liable for any indirect, special, or consequential damages
©2020 by Newport Corporation, Irvine, CA. All rights reserved.
Original instructions.
No part of this document may be reproduced or copied without the prior written approval of
Newport Corporation. This document is provided for information only, and product
specifications are subject to change without notice. Any change will be reflected in future
publishings.
CAUTION
Please return equipment in the
original (or equivalent) packing.
You will be responsible for
damage incurred from inadequate
packaging if the original
packaging is not used.

8311 – Compact Closed-Loop Picomotor Actuator User Manual
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EU Declaration of Conformity

8311 – Compact Closed-Loop Picomotor Actuator User Manual
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Definitions and Symbols
The following terms and symbols are used in this documentation and also appear on the
product where safety-related issues occur.
General Warning or Caution
The exclamation symbol may appear in warning and caution tables in this document. This
symbol designates an area where personal injury or damage to the equipment is possible.
The following are definitions of the Warnings, Cautions and Notes that may be used in this
manual to call attention to important information regarding personal safety, safety and
preservation of the equipment, or important tips.
WARNING
Warning indicates a potentially dangerous situation which can result in bodily harm or
death
CAUTION
Caution indicates a potentially hazardous situation which can result in damage to
product or equipment
NOTE
Note indicates additional information that must be considered by the user or operator.
European Union CE Mark
The presence of the CE Mark on Newport Corporation equipment means that it
has been designed, tested and certified as complying with all applicable
European Union (CE) regulations and recommendations.
Waste Electrical and Electronic Equipment (WEEE) Mark
This symbol on the product or on its packaging indicates that this product must
not be disposed with regular waste. Instead, it is the user responsibility to
dispose of waste equipment according to the local laws. The separate collection
and recycling of the waste equipment at the time of disposal will help to
conserve natural resources and ensure that it is recycled in a manner that
protects human health and the environment. For information about where the user can drop
off the waste equipment for recycling, please contact your local Newport representative.
Protective Earth Symbol
The Protective Earth Symbol appears next to the grounding point at the front of
the actuator housing.

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Warnings & Caution
WARNING
Do not attempt to operate this equipment if there is evidence of shipping damage or
you suspect the unit is damaged. Damaged equipment may present additional hazards
to you. Contact Newport technical support for advice before attempting to plug in and
operate damaged equipment.
WARNING
The Picomotor is intended for use ONLY with Newport Picomotor Controller/Driver
units. Connection of other devices to the motor may cause damage to the unit or the
connected device, fire, and/or personal injury.
CAUTION
This motor is a Class A device. In a residential environment, this device can cause
electromagnetic interference. In this case, suitable measures must be taken by the user.
WARNING
Do not use this motor when its motor is emitting smoke or is unusually hot to the touch
or is emitting any unusual odor or noise or is in another abnormal state.
Stop using the motor immediately, switch off the motor power and then disconnect the
electronics power supply.
After checking that smoke is no longer being emitted contact your Newport service
facility and request repairs. Never attempt to repair the motor yourself as this can be
dangerous.
CAUTION
Do not leave this motor in places subject to extremely high temperatures or low
temperatures. This may cause an electric shock.
•Operating temperature: +10 to +40 °C
•Storage/Operating altitude: 1000 m
•Storage/Operating humidity: 85%
•Storage temperature: -40 to +100 °C (in its original packaging).

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WARNING
Make sure that this motor is not exposed to moisture and that liquid does not get into
the motor.
Nevertheless, if any liquid has entered the motor, switch off the motor power and then
disconnect the electronics from power supply.
Contact your Newport service facility and request repairs.
WARNING
Do not insert or drop objects into this motor, this may cause an electric shock, or lock
the motor.
Do not use this motor if any foreign objects have entered the motor. Switch off the
motor power and then disconnect the electronics power supply.
Contact your Newport service facility for repairs or replacement.
CAUTION
Do not place this stage in a location affected by dust, oil fumes, steam or high
humidity. This may cause an electric shock.
CAUTION
There are no user serviceable parts inside the device. Work performed by persons not
authorized by Newport will void the warranty.
CAUTION
Be careful that the stage is not bumped when it is being carried. This may cause it to
malfunction.
WARNING
When handling this stage, always unplug the equipment from the power source for
safety.
WARNING
If this equipment is used in a manner not specified in this manual, the protection
provided by this equipment may be impaired.

8311 – Compact Closed-Loop Picomotor Actuator User Manual
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Compact Closed Loop Picomotor™ Actuator
Model 8311
1.0 Getting Started
The Model 8311 compact closed loop Picomotor™ actuator has two cables—the motor
cable terminated with a RJ-22 connector, and the encoder cable terminated in a high-density
DB-15 connector. Because only the patented Picomotor drive waveform can be used to
drive the Picomotor actuator, you must insert the RJ-22 connector into a Newport Picomotor
controller & driver module (Model 8742 4-channel open loop, Model 8743-CL 2-channel
closed loop), or single-axis Picomotor driver module (Model 8703 TTL/Analog driver).
With these recommended drivers you should be able to move the actuator through a hand
terminal (Model 8758), or computer (refer to the driver manuals for specific motion-control
command sets).
If you are using the Model 8743-CL closed loop Picomotor controller & driver module,
connect the high-density DB-15 to the driver’s DB-15 port, and refer to the Model 8743-CL
manual for more detailed directions on interfacing with the Model 8311.
If you are using a third-party motion controller, refer to the cable pinout to interface with the
controller. (Keep in mind that you will still need to use a Picomotor driver such as the
Model 8742 Picomotor controller & driver module or the Model 8703 TTL/Analog
Picomotor driver module). The Model 8311 is compatible with any third-party motion
controller that can read TTL-level quadrature encoder signals.
NOTE
Do not open the motor cover or cut the motor cable. High voltages (up to 120 V,
200 mA) are accessible with the cover removed or the cable cut.

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2.0 Mounting the Motor
The mounting shaft diameter is 0.375”—typical in standard micrometers. We have provided
a threaded nut, so you can insert the motor into a bushing and tighten the nut to mount the
motor. This is the preferred mounting method because it reduces the possibility of distortion
on the motor’s housing.
If instead you’re going to mount the motor’s shaft in a micrometer clamp, be careful not
clamp too hard on the motor’s housing. This can deform the motor’s shank and may cause
in-creased friction between the inner rotating screw and the fixed exterior housing. If the
motor slows or fails completely, try loosening the clamp.
You can turn the motor manually using the hex nut at the end of the screw. Please be
careful, however, not to touch the threads of the screw with your tools. Any damage to the
screw threads will result in a significantly shorter motor lifetime. (See the Tips for
Achieving Nanometer-Scale Performance below).
3.0 Tips for Achieving Nanometer-Scale Performance
The Model 8311 closed loop Picomotor™ actuator <0.5 µm repeatability when approaching
from a single direction, and 49.6 nm encoder resolution. (The actual inherent motor step size
is considerably smaller—approximately 20 nm). To achieve consistent nanometer-level
performance, you need only keep a few precautions in mind.
•Use a small amount of lubricant between the stainless-steel ball tip and the load surface
to prevent wear and the generation of debris in the interface. We recommend Krytox
GPL 205 or the low-vapor pressure Krytox, LVP grease.
•Keep the interface between the stainless-steel ball tip and the load surface clean of
debris. Even small particles on the order of a micron can result in 0.1 to 10 µm
differences between the encoder reading and the actual moved distance.
•Use the Model 8311 for pushing against smooth, hard, flat surfaces only, such as the
sapphire pads used in Newport mirror mounts and translation stages. Pushing on
aluminum or stainless-steel surfaces will wear out the ball tip. If the load surface is too
soft, small amounts of material can build up in the interface between the ball tip and load
surface resulting in surface roughness which can degrade repeatability.
•Do not push against cone or v-shapes, especially in softer materials such as aluminum.
When the ball wears against a cone or v-shape in softer materials, particle generation can
lead to increased friction and torsional loads. These torsional loads can easily exceed the
torsional load limit of 2.5 oz-in (0.018 N•m) thus stalling the motor.

8311 – Compact Closed-Loop Picomotor Actuator User Manual
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•Avoid damage to the screw threads. Do not touch the screw threads with any hard
object—even lightly. To provide the fine resolution, the screw has very fine-pitch
threads. If the threads are damaged, this damaged area will produce repeated excessive
wear within the fixed motor housing and significantly reduce the lifetime of the motor.
•Avoid clamping tightly on the motor’s housing. As stated in Mounting the Motor, this
can cause increased friction between the rotating inner screw and the fixed exterior
housing resulting in slowed motor motion or complete failure. This can also result in
damaged screw threads.
•Periodically examine the stainless-steel ball tip and the load surface for wear.
4.0 Specifications
Uni-Directional Repeatability ±0.5 µm Over Full Travel (from same irection)
Spee (@ 2 kHz pulse rate) 1.2 mm/min (20 µm/s typical)
Close loop Settling Time <100 ms with 8743-CL Controller
Close loop Stea y-State Error 0 counts with 8743-CL Controller
Enco er Resolution 49.6 nm per enco er count
(1)
Connector Type: One Each 15-Pin High-Density D-sub an 4-Pin RJ-22
Survival Temperature Range (non-operating) -30 to +85 °C
Mounting 0.375" (9.5 mm) Shank
Linear Travel 0.50" (12.7 mm)
Minimum Incremental Motion <30 nm
Angular Resolution <0.6 mra
Maximum Loa 5 lbs (22 N)
Torque 2.5 oz-in (0.018 N·m)
Operating Temperature 10–40 °C
Lifetime 1 Billion Steps
(2)
Cable Length 6 Feet, Both Cables
1)
The encoder resolution is 6400 counts per revolution. With the 80-pitch (80 turns per inch) screw sets used in
the Model 8311, this results in an encoder resolution o 49.6 nm per encoder count.
2)
Li etime is tested by cycling actuator out 1 mm o travel range and back pushing a 5 lb load.

8311 – Compact Closed-Loop Picomotor Actuator User Manual
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5.0 Encoder Cable Pinout
Pin Signal Description
1 +5V +5V enco er power supply
2 GND Enco er groun
3 GND Enco er groun
4 -A Enco er phase -A output signal
5 +A Enco er phase +A output signal
6 N.C. No connect
7 GND Enco er groun
8 N.C. No connect
9 -B Enco er phase -B output signal
10 +B Enco er phase +B output signal
11 N.C. No connect
12 N.C. No connect
13 GND Enco er groun
14 N.C. Reserve
15 N.C. Reserve
NOTE
The Model 8311 encoder outputs are differentially encoded on two wires. For a
controller which accepts only single-ended encoder signals, tie –A, and –B to GND.
Example Wiring Diagram
6.0 Dimensions

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Service Form
Your Local Representative
Tel.: ______________________
Fax:_______________________
Name:____________________________________________________ Return authorization #: _______________________________________
Company:_________________________________________________
(Please obtain prior to return of item)
Address:__________________________________________________ Date: _____________________________________________________
Country:__________________________________________________ Phone Number: _____________________________________________
P.O. Number:______________________________________________ Fax Number: _______________________________________________
Item(s) Being Returned:______________________________________
Model#: __________________________________________________ Serial #: ___________________________________________________
Description: ____________________________________________________________________________________________________________
Reasons of return of goods (please list any specific problems):_____________________________________________________________________
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North America & Asia
Newport Corporation
1791 Deere Ave.
Irvine, CA 92606, USA
Sales
Tel.: [phone]
e-mail: s[email protected]
Technical Support
Tel.: [phone]
e-mail: [e-mail]
Service, RMAs & Returns
Tel.: [phone]
e
-
mail:
[email protected]
Europe
MICRO-CONTROLE Spectra-Physics S.A.S
9, rue du Bois Sauvage
91055 Évry CEDEX
France
Sales
Tel.: [phone]
e-mail: [email protected]
Technical Support
e-mail: [email protected]
Service & Returns
Tel.: [phone]
Visit Newport Online at
www.newport.com