MKS PDR 2000 User manual

129097-P1
Rev A, 04/01
Instruction Manual
MKS Type PDR 2000
Dual Capacitance Diaphragm
Gauge Controller
Six Shattuck Road
Andover, MA 01810-2449
[phone] or [phone]
Fax: [phone]
E-mail: [e-mail]
Web site: http://www.mksinst.com

WARRANTY
Type PDR 2000 Equipment
MKS Instruments, Inc. (MKS) warrants that for two years from the date of shipment
the equipment described above (the “equipment”) manufactured by MKS shall be
free from defects in materials and workmanship and will correctly perform all date-
related operations, including without limitation accepting data entry, sequencing,
sorting, comparing, and reporting, regardless of the date the operation is performed
or the date involved in the operation, provided that, if the equipment exchanges
data or is otherwise used with equipment, software, or other products of others,
such products of others themselves correctly perform all date-related operations
and store and transmit dates and date-related data in a format compatible with
MKS equipment. THIS WARRANTY IS MKS’ SOLE WARRANTY CONCERNING
DATE-RELATED OPERATIONS.
For the period commencing with the date of shipment of this equipment and ending
two years later, MKS will, at its option, either repair or replace any part which is
defective in materials or workmanship or with respect to the date-related operations
warranty without charge to the purchaser. The foregoing shall constitute the
exclusive and sole remedy of the purchaser for any breach by MKS of this
warranty.
The purchaser, before returning any equipment covered by this warranty, which is
asserted to be defective by the purchaser, shall make specific written arrange-
ments with respect to the responsibility for shipping the equipment and handling
any other incidental charges with the MKS sales representative or distributor from
which the equipment was purchased or, in the case of a direct purchase from MKS,
with the MKS home office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and
used in accordance with the specifications recommended by MKS for the proper
and normal use of the equipment. MKS shall not be liable under any circumstances
for indirect, special, consequential, or incidental damages in connection with, or
arising out of, the sale, performance, or use of the equipment covered by this
warranty.
MKS recommends that all MKS pressure and flow products be calibrated
periodically (typically every 6 to 12 months) to ensure accurate readings. When a
product is returned to MKS for this periodic re-calibration it is considered normal
preventative maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES,
EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF
MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A
PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF
ANY PATENT.
04/01 129097-P1 Rev A

MKS Type PDR 2000
Dual Capacitance Diaphragm
Gauge Controller

Copyright © 2001 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means,
electronic or mechanical, including photocopying and recording, or by any information storage or
retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.

Table of Contents
1
Table of Contents
Safety Information....................................................................................................................... 1
Symbols Used in This Instruction Manual..................................................................... 1
Symbols Found on the Unit............................................................................................ 2
Safety Procedures and Precautions................................................................................ 3
Sicherheitshinweise für den Druckmeßumformer ...................................................................... 5
In dieser Betriebsanleitung vorkommende Symbole...................................................... 5
Erklärung der am Gerät angebrachten Symbole ............................................................ 6
Sicherheitsvorschriften und Vorsichtsmaßnahmen........................................................ 7
Informations relatives à la sécurité ............................................................................................. 9
Symboles utilisés dans ce manuel d’utilisation ............................................................. 9
Symboles apparaissant sur l’unité..................................................................................10
Mesures de sécurité et mises en garde........................................................................... 11
Informatión sobre seguridad ....................................................................................................... 13
Símbolos usados en este manual de instrucciones......................................................... 13
Símbolos hallados en la unidad...................................................................................... 14
Pocedimientos y precauciones de segurida.………………………………………………….…15
Additional Safety Information .................................................................................................... 17
Chapter One: General Information............................................................................................. 18
Introduction....................................................................................................................18
Purpose.............................................................................................................. 18
Specifications.................................................................................................... 18
Controls and Indicators.....................................................................................20
How This Manual is Organized.....................................................................................23
Customer Support........................................................................................................... 24

Table of Contents
2
Chapter Two: Installation........................................................................................................... 25
How To Unpack the PDR 2000 Controller.................................................................... 25
Unpacking Checklist......................................................................................... 25
Mounting the Controller................................................................................................. 26
Selecting the CDG.......................................................................................................... 26
Connecting the CDG...................................................................................................... 26
Attaching the CDG Cable .............................................................................................. 26
Making Accessory Connections........................................................................ 29
Checking Supply Voltage ................................................................................. 30
Attaching the Power Cord.................................................................................30
Chapter 3: Operation................................................................................................................... 31
Sequence After Power Being Turned On....................................................................... 31
Front Panel Controls ...................................................................................................... 31
Description of Parameter Selection and Adjustment..................................................... 32
Set Pt 1 High..................................................................................................... 32
Set Pt 1 Low...................................................................................................... 32
Set Pt 2 High..................................................................................................... 33
Set Pt 2 Low...................................................................................................... 33
Units mTorr/Torr/kTorr—Bar/mBar/microBar—Pascal/kPascal—Arb .......... 33
Calibrate............................................................................................................ 33
Full Scale........................................................................................................... 34
Zero................................................................................................................... 34
Reset of Stored (Default) Values...................................................................... 35
Set Point Operation........................................................................................... 35
Reading Pressure............................................................................................... 36
Analog Output................................................................................................... 37
Serial Interface.................................................................................................. 38
The Commands Used in the PDR 2000: ........................................................................ 38
Pressure............................................................................................................. 38
Full Scale Of the Gauges .................................................................................. 40
Units of Measurement....................................................................................... 41
Set Point #1....................................................................................................... 41
Set Point #2...................................................................................................... 41
Model and Software Revision........................................................................... 41

3
Chapter Four: Maintenance and Troubleshooting ..................................................................... 42
Changing Fuses .............................................................................................................. 42
Schematic Diagrams....................................................................................................... 42
Trouble Shooting............................................................................................................ 42
Index............................................................................................................................................ 44

4
List of Figures and Tables
Figures
Figure 1: Model PDR 2000 Front View.........................................................................................22
Figure 2: Model PDR 2000 Rear View..........................................................................................23
Figure 3: Model PDR 2000 Dimensions........................................................................................23
Figure 4: Model PDR 2000 Sensor Connector – 9 Pin Female D-Sub Connector........................28
Figure 5: RS-232 I/O; Analog Out; Relays....................................................................................30
Tables
Table 1: Definition of Symbols Found on the Unit .........................................................................1
Table 2: PDR 2000 9-Pin ‘D’ - MKS Baratron 15-Pin ‘D’ Connections .....................................28
Table 3: PDR 2000 9-Pin ‘D’ - MKS Baratron 5-Pin Molex Connections ..................................29
Table 4: PDR 2000 15 Pin - Accessory Connector Signals and Pins ...........................................30
Table 5: PDR 2000 Ranges: Sensor, High, Low, Set Points.........................................................37
Table 6: Analog Output and Displayed Pressure..........................................................................38
Table 7: Serial Output and Displayed Pressure ............................................................................39
Table 8: Serial Output and Full Scale Range Setting ...................................................................40
Table 9: Information on Replacing Fuses.....................................................................................42

Safety information Symbols used in This Instructions manual
5
Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning The WARNING sign denotes a hazard to personnel. It calls
attention to a procedure, practice, condition, or the like,
which, if not correctly performed or adhered to, could result in
injury to personnel.
Caution The CAUTION sign denotes a hazard to equipment. It calls
attention to an operating procedure, practice, or the like, which, if
not correctly performed or adhered to, could result in damage to or
destruction of all or part of the product.
Note The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.