MKS MF1 User manual

Y-195MF1
MKS Instruments
Deutschland GmbH
Edition 2011-07
Digital Mass Flow Controller
Type MF1
– Instruction Manual – a

Copyright © 2011 by MKS Instruments Deutschland GmbH.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic
or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as
may be expressly permitted in writing by MKS Instruments.
Printed in the Federal Republic of Germany
Swagelok® , VCR®, and VCO®are registered trademarks of Swagelok Marketing Company, Solon, OH
NUPRO®is a registered trademark of Crawford Fitting Company, Solon, OH
Kel-F®is a registered trademark of 3M, Minneapolis, MN

Table of Contents
iii
Table of Contents
MASS FLOW CONTROLLER SAFETY INFORMATION...................................................................... 9
SYMBOLS USED IN THIS INSTRUCTION MANUAL............................................................................................ 9
SAFETY PROCEDURES AND PRECAUTIONS.................................................................................................... 10
CHAPTER 1: GENERAL INFORMATION............................................................................................. 13
INTRODUCTION............................................................................................................................................. 13
Power Supply and Readout Units............................................................................................................ 13
INSTRUCTION MANUAL................................................................................................................................13
Contents................................................................................................................................................... 13
Conventions............................................................................................................................................. 14
CHAPTER 2: SHIPMENT.......................................................................................................................... 15
GENERAL ..................................................................................................................................................... 15
Unpacking ............................................................................................................................................... 15
UNPACKING CHECKLIST............................................................................................................................... 15
Optional Accessories:.............................................................................................................................. 15
Label........................................................................................................................................................ 16
Clean Room Packaging........................................................................................................................... 16
CHAPTER 3: INSTALLATION AND START UP.................................................................................. 17
GENERAL REQUIREMENTS............................................................................................................................ 17
Environmental......................................................................................................................................... 17
Location and Orientation........................................................................................................................ 17
Leak Integrity .......................................................................................................................................... 19
Pressure Drop Test.................................................................................................................................. 19
DIMENSIONS................................................................................................................................................. 19
ELECTRICAL CONNECTIONS AND CABLES .................................................................................................... 22
Cables...................................................................................................................................................... 22
Power Supply / Readout Units of other Manufacturers .......................................................................... 22
Non MKS Cables..................................................................................................................................... 22
FINISHING THE INSTALLATION...................................................................................................................... 23
START UP THE MASS FLOW CONTROLLER/METER....................................................................................... 24
ZERO ADJUST............................................................................................................................................... 24
ZERO BUTTON.............................................................................................................................................. 25
CHAPTER 4: USB SETUP INTERFACE.................................................................................................27
GENERAL ..................................................................................................................................................... 27
INSTALLATION ............................................................................................................................................. 27
Electrical connection: ............................................................................................................................. 27
Cable:...................................................................................................................................................... 27
OPERATION .................................................................................................................................................. 27
Address.................................................................................................................................................... 27
Configuration .......................................................................................................................................... 28
MSD-Mode.............................................................................................................................................. 28
PROTOCOLL.................................................................................................................................................. 28
General Description................................................................................................................................ 28
Default settings........................................................................................................................................ 29
Objects..................................................................................................................................................... 29
Object Model........................................................................................................................................................ 29
Object Reference .................................................................................................................................................. 29
Object Parameters Description ............................................................................................................................. 29
Object Parameter Reference ................................................................................................................................. 40
CHAPTER 5 PROCESS INTERFACES ....................................................................................................53

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iv
FUNCTIONS ...................................................................................................................................................53
Report Functions......................................................................................................................................53
Valve Override.........................................................................................................................................53
Auto Zero .................................................................................................................................................53
Alarm Limits.............................................................................................................................................53
Temperature Measurement......................................................................................................................53
Valve Drive Level.....................................................................................................................................54
User Span / Gas Correction.....................................................................................................................54
User Zero.................................................................................................................................................54
Filter ........................................................................................................................................................54
Gas Tables ...............................................................................................................................................54
Soft Start Rate..........................................................................................................................................54
PROFIBUS PROCESS INTERFACE.................................................................................................................55
Installation...............................................................................................................................................55
Pinout.................................................................................................................................................................... 55
Power supply.........................................................................................................................................................55
Cable.....................................................................................................................................................................56
Operation.................................................................................................................................................57
Address .................................................................................................................................................................57
Configuration (GSD).............................................................................................................................................57
Feedback and Diagnostics.......................................................................................................................57
Error codes............................................................................................................................................................57
LED Functions...................................................................................................................................................... 57
Protocol (PROFIBUS cyclic telegrams)..................................................................................................58
Data Interface........................................................................................................................................................58
Send Data.............................................................................................................................................................. 58
Small Receive Data............................................................................................................................................... 59
Full Receive Data.................................................................................................................................................. 59
Small Setup........................................................................................................................................................... 60
Full Setup.............................................................................................................................................................. 60
Small Diagnostics (for DPV0 only) ...................................................................................................................... 61
Full Diagnostics (for DPV0 only)......................................................................................................................... 62
Calibration Table (for DPV0 only) ....................................................................................................................... 63
Diagnosis (for DPV1 only) ................................................................................................................................... 63
ANALOG PROCESS INTERFACE......................................................................................................................64
Functions..................................................................................................................................................64
Valve Override...................................................................................................................................................... 64
Scaling the Signal ................................................................................................................................................. 64
Installation...............................................................................................................................................64
Pinout.................................................................................................................................................................... 64
Power supply.........................................................................................................................................................65
Cables and Controllers by MKS ...........................................................................................................................65
Operation.................................................................................................................................................65
Configuration........................................................................................................................................................65
Feedback and Diagnostic ........................................................................................................................65
LED Functions...................................................................................................................................................... 65
RS485 AND USB INTERFACES ......................................................................................................................66
Installation...............................................................................................................................................66
Pinout.................................................................................................................................................................... 66
Power supply.........................................................................................................................................................66
Cable for RS485....................................................................................................................................................67
Cable for USB....................................................................................................................................................... 67
Operation.................................................................................................................................................67
Address .................................................................................................................................................................67
Configuration........................................................................................................................................................67
Feedback and Diagnostics.......................................................................................................................70
Error Codes...........................................................................................................................................................70
LED Functions...................................................................................................................................................... 70
Protocol (“Human Readable Protocol”).................................................................................................71

Table of Contents
v
Send telegram.......................................................................................................................................... 71
Receive telegram .................................................................................................................................................. 71
Command Reference List......................................................................................................................... 72
Command list description........................................................................................................................ 72
Get Actual Flow (F).............................................................................................................................................. 72
Get Temperature (T)............................................................................................................................................. 73
Get Valve Drive Level (V) ................................................................................................................................... 73
Set Flow Setpoint, Get Actual Flow (S)................................................................................................................ 73
Get Flow Setpoint (s)............................................................................................................................................ 73
Set Valve Override Normal (N)............................................................................................................................ 74
Set Valve Override Close (C)............................................................................................................................... 74
Set Valve Override Purge (P) ............................................................................................................................... 74
Set Autozero (A)................................................................................................................................................... 74
Set WinkStatus (W).............................................................................................................................................. 75
Select Gas Table Index (G)...................................................................................................................... 75
Get Gas Table Index (g)........................................................................................................................................ 75
Get Device Status (D)........................................................................................................................................... 76
Get MF1 Error Status (M)..................................................................................................................................... 76
Get Communication Status (U or u) ..................................................................................................................... 77
MODBUS INTERFACE.................................................................................................................................... 78
Installation .............................................................................................................................................. 78
Pinout.................................................................................................................................................................... 78
Power.................................................................................................................................................................... 79
Cable..................................................................................................................................................................... 79
Operation ................................................................................................................................................ 80
Address................................................................................................................................................................. 80
MODBUS compatible addressing description...................................................................................................... 80
Configuration........................................................................................................................................................ 80
Feedback and Diagnostics ...................................................................................................................... 82
Error Codes........................................................................................................................................................... 82
LED Functions...................................................................................................................................................... 82
Protocol (Modbus compatible)................................................................................................................ 83
Holding Registers ................................................................................................................................................. 83
Coils...................................................................................................................................................................... 83
Input Registers...................................................................................................................................................... 84
Discrete Inputs...................................................................................................................................................... 85
ETHERCAT.................................................................................................................................................. 87
Installation .............................................................................................................................................. 87
Pinout.................................................................................................................................................................... 87
Power supply ........................................................................................................................................................ 87
Cable..................................................................................................................................................................... 87
Operation ................................................................................................................................................ 88
Address................................................................................................................................................................. 88
Feedback and Diagnostics ...................................................................................................................... 88
Error Code ............................................................................................................................................................ 88
LED functions....................................................................................................................................................... 88
Protocol................................................................................................................................................... 89
Process Data Objects (PDO) protocol................................................................................................................... 89
CAN application layer over EtherCAT (CoE) - Objects....................................................................................... 90
CHAPTER 6: GAS CORRECTION FACTOR (GCF) ............................................................................ 94
THE GAS CORRECTION FACTOR (GCF):....................................................................................................... 94
How To Calculate the GCF for Pure Gases............................................................................................ 94
How To Calculate the GCF for Gas Mixtures......................................................................................... 95
Note ...................................................................................................................................................................... 95
Example................................................................................................................................................... 96
Mass Flow Rate at a Different Reference Temperature.......................................................................... 97
CHAPTER 7: THEORY OF OPERATION.............................................................................................. 98

Table of Contents
vi
TECHNIQUE OF MEASUREMENT AND CONTROL,ELECTRONICS.....................................................................98
Flow Path.................................................................................................................................................99
Measurement Technique..........................................................................................................................99
Control Circuitry......................................................................................................................................99
CONTROL VALVE........................................................................................................................................100
CHAPTER 8: MAINTENANCE...............................................................................................................101
GENERAL....................................................................................................................................................101
Zero Adjustment.....................................................................................................................................101
Checks and Recalibration......................................................................................................................101
Profibus Support Kit..............................................................................................................................102
CUSTOMER SUPPORT ..................................................................................................................................102
TROUBLESHOOTING ....................................................................................................................................103
APPENDIX A: PRODUCT SPECIFICATIONS.....................................................................................105
SPECIFICATIONS..........................................................................................................................................105
ENVIRONMENTAL SPECIFICATIONS..............................................................................................................106
ELECTRICAL SPECIFICATIONS .....................................................................................................................106
PHYSICAL SPECIFICATIONS.........................................................................................................................107
APPENDIX B: MODEL CODE .................................................................................................................108
VARIANT (X)..............................................................................................................................................108
GAS IDENTIFICATION (YYY)......................................................................................................................108
FULL SCALE RANGE (SCCM NITROGEN)(ZZZ)...........................................................................................110
FITTINGS (C)...............................................................................................................................................111
INTERFACE (A) ...........................................................................................................................................111
SEAL MATERIAL (E) ...................................................................................................................................111
EXTRAS/OPTIONS (O).................................................................................................................................111
APPENDIX C: GAS CORRECTION FACTORS...................................................................................112
APPENDIX D: CE DECLARATION OF CONFORMITY....................................................................115
MKS WORLDWIDE CALIBRATION & SERVICE CENTERS ..........................................................116
There is a declaration of contamination on the last page of this instruction manual.
List of Figures
Figure 1 Model Code Label .............................................................................................................. 16
Figure 2 Side View - Dimensions (for 4 VCR, Sub D Connector and “single-part-body”) ............... 19
Figure 3 Front View – Dimensions (4 VCR) ..................................................................................... 20
Figure 4 Top View – Dimensions ..................................................................................................... 20
Figure 5 Bottom View – Dimensions ............................................................................................... 21
Figure 6 Connector and Control Elements for Profibus unit ........................................................... 21
Figure 7 Side view - Dimensions (DN 16 KF, Sub D connector and "single-part-body")................. 21
Figure 8 Zero Button......................................................................................................................... 25
Figure 9 Profibus Connector ............................................................................................................ 55

Table of Contents
vii
Figure 10 Termination resistor ......................................................................................................... 56
Figure 11: Assembly......................................................................................................................... 98
List of Tables
Table 1 Total length for different fittings.......................................................................................... 20
Table 2 Profibus Interface ................................................................................................................ 55
Table 3 Cable specification (EN50170) ...........................................................................................56
Table 4 Maximum segment length as a function of the baud rate ................................................... 56
Table 5 Analog Interface .................................................................................................................. 65
Table 6 MKS Controller and cables for analog MF1 units ............................................................... 65
Table 7 Troubleshooting................................................................................................................. 103

Mass Flow Controller Safety Information
9
Mass Flow Controller Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning
The WARNING sign denotes a hazard to personnel. It calls
attention to a procedure, practice, condition, or the like, which, if
not correctly performed or adhered to, could result in injury to
personnel.
Caution
The CAUTION sign denotes a hazard to equipment. It calls
attention to an operating procedure, practice, or the like, which, if
not correctly performed or adhered to, could result in damage to or
destruction of all or part of the product.
Note
The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.

Mass Flow Controller Safety Information
10
Safety Procedures and Precautions
The following general safety precautions must be observed during all phases of operation
of this instrument. Failure to comply with these precautions or with specific warnings
elsewhere in this manual violates safety standards of intended use of the instrument and
may impair the protection provided by the equipment. MKS Instruments, Inc. assumes no
liability for the customer’s failure to comply with these requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument. Return
the instrument to an MKS Calibration and Service Center for service and repair to ensure that all
safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not attempt component replacement and internal adjustments. Any
service must be made by qualified service personnel only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, observe the proper safety precautions, completely purge the
instrument when necessary, and ensure that the material used is compatible with the wetted
materials in this product, including any sealing materials.
PURGE THE INSTRUMENT
After installing the unit, or before removing it from a system, purge the unit completely with a clean,
dry gas to eliminate all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This instrument must be purged under a ventilation hood, and gloves must be worn for protection.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been
specifically certified for such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the
intended use of the instrument. Assemble and tighten fittings according to manufacturer’s
directions.
CHECK FOR LEAK-TIGHT FITTINGS
Carefully check all vacuum component connections to ensure leak-tight installation.
OPERATE AT SAFE INLET PRESSURES
Never operate at pressures higher than the rated maximum pressure (refer to the product
specifications for the maximum allowable pressure).