MKS MF1 User manual

Y-195MF1
MKS Instruments
Deutschland GmbH
Edition 2011-07
Digital Mass Flow Controller
Type MF1
– Instruction Manual – a

Copyright © 2011 by MKS Instruments Deutschland GmbH.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic
or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as
may be expressly permitted in writing by MKS Instruments.
Printed in the Federal Republic of Germany
Swagelok® , VCR®, and VCO®are registered trademarks of Swagelok Marketing Company, Solon, OH
NUPRO®is a registered trademark of Crawford Fitting Company, Solon, OH
Kel-F®is a registered trademark of 3M, Minneapolis, MN

Table of Contents
iii
Table of Contents
MASS FLOW CONTROLLER SAFETY INFORMATION...................................................................... 9
SYMBOLS USED IN THIS INSTRUCTION MANUAL............................................................................................ 9
SAFETY PROCEDURES AND PRECAUTIONS.................................................................................................... 10
CHAPTER 1: GENERAL INFORMATION............................................................................................. 13
INTRODUCTION............................................................................................................................................. 13
Power Supply and Readout Units............................................................................................................ 13
INSTRUCTION MANUAL................................................................................................................................13
Contents................................................................................................................................................... 13
Conventions............................................................................................................................................. 14
CHAPTER 2: SHIPMENT.......................................................................................................................... 15
GENERAL ..................................................................................................................................................... 15
Unpacking ............................................................................................................................................... 15
UNPACKING CHECKLIST............................................................................................................................... 15
Optional Accessories:.............................................................................................................................. 15
Label........................................................................................................................................................ 16
Clean Room Packaging........................................................................................................................... 16
CHAPTER 3: INSTALLATION AND START UP.................................................................................. 17
GENERAL REQUIREMENTS............................................................................................................................ 17
Environmental......................................................................................................................................... 17
Location and Orientation........................................................................................................................ 17
Leak Integrity .......................................................................................................................................... 19
Pressure Drop Test.................................................................................................................................. 19
DIMENSIONS................................................................................................................................................. 19
ELECTRICAL CONNECTIONS AND CABLES .................................................................................................... 22
Cables...................................................................................................................................................... 22
Power Supply / Readout Units of other Manufacturers .......................................................................... 22
Non MKS Cables..................................................................................................................................... 22
FINISHING THE INSTALLATION...................................................................................................................... 23
START UP THE MASS FLOW CONTROLLER/METER....................................................................................... 24
ZERO ADJUST............................................................................................................................................... 24
ZERO BUTTON.............................................................................................................................................. 25
CHAPTER 4: USB SETUP INTERFACE.................................................................................................27
GENERAL ..................................................................................................................................................... 27
INSTALLATION ............................................................................................................................................. 27
Electrical connection: ............................................................................................................................. 27
Cable:...................................................................................................................................................... 27
OPERATION .................................................................................................................................................. 27
Address.................................................................................................................................................... 27
Configuration .......................................................................................................................................... 28
MSD-Mode.............................................................................................................................................. 28
PROTOCOLL.................................................................................................................................................. 28
General Description................................................................................................................................ 28
Default settings........................................................................................................................................ 29
Objects..................................................................................................................................................... 29
Object Model........................................................................................................................................................ 29
Object Reference .................................................................................................................................................. 29
Object Parameters Description ............................................................................................................................. 29
Object Parameter Reference ................................................................................................................................. 40
CHAPTER 5 PROCESS INTERFACES ....................................................................................................53

Table of Contents
iv
FUNCTIONS ...................................................................................................................................................53
Report Functions......................................................................................................................................53
Valve Override.........................................................................................................................................53
Auto Zero .................................................................................................................................................53
Alarm Limits.............................................................................................................................................53
Temperature Measurement......................................................................................................................53
Valve Drive Level.....................................................................................................................................54
User Span / Gas Correction.....................................................................................................................54
User Zero.................................................................................................................................................54
Filter ........................................................................................................................................................54
Gas Tables ...............................................................................................................................................54
Soft Start Rate..........................................................................................................................................54
PROFIBUS PROCESS INTERFACE.................................................................................................................55
Installation...............................................................................................................................................55
Pinout.................................................................................................................................................................... 55
Power supply.........................................................................................................................................................55
Cable.....................................................................................................................................................................56
Operation.................................................................................................................................................57
Address .................................................................................................................................................................57
Configuration (GSD).............................................................................................................................................57
Feedback and Diagnostics.......................................................................................................................57
Error codes............................................................................................................................................................57
LED Functions...................................................................................................................................................... 57
Protocol (PROFIBUS cyclic telegrams)..................................................................................................58
Data Interface........................................................................................................................................................58
Send Data.............................................................................................................................................................. 58
Small Receive Data............................................................................................................................................... 59
Full Receive Data.................................................................................................................................................. 59
Small Setup........................................................................................................................................................... 60
Full Setup.............................................................................................................................................................. 60
Small Diagnostics (for DPV0 only) ...................................................................................................................... 61
Full Diagnostics (for DPV0 only)......................................................................................................................... 62
Calibration Table (for DPV0 only) ....................................................................................................................... 63
Diagnosis (for DPV1 only) ................................................................................................................................... 63
ANALOG PROCESS INTERFACE......................................................................................................................64
Functions..................................................................................................................................................64
Valve Override...................................................................................................................................................... 64
Scaling the Signal ................................................................................................................................................. 64
Installation...............................................................................................................................................64
Pinout.................................................................................................................................................................... 64
Power supply.........................................................................................................................................................65
Cables and Controllers by MKS ...........................................................................................................................65
Operation.................................................................................................................................................65
Configuration........................................................................................................................................................65
Feedback and Diagnostic ........................................................................................................................65
LED Functions...................................................................................................................................................... 65
RS485 AND USB INTERFACES ......................................................................................................................66
Installation...............................................................................................................................................66
Pinout.................................................................................................................................................................... 66
Power supply.........................................................................................................................................................66
Cable for RS485....................................................................................................................................................67
Cable for USB....................................................................................................................................................... 67
Operation.................................................................................................................................................67
Address .................................................................................................................................................................67
Configuration........................................................................................................................................................67
Feedback and Diagnostics.......................................................................................................................70
Error Codes...........................................................................................................................................................70
LED Functions...................................................................................................................................................... 70
Protocol (“Human Readable Protocol”).................................................................................................71

Table of Contents
v
Send telegram.......................................................................................................................................... 71
Receive telegram .................................................................................................................................................. 71
Command Reference List......................................................................................................................... 72
Command list description........................................................................................................................ 72
Get Actual Flow (F).............................................................................................................................................. 72
Get Temperature (T)............................................................................................................................................. 73
Get Valve Drive Level (V) ................................................................................................................................... 73
Set Flow Setpoint, Get Actual Flow (S)................................................................................................................ 73
Get Flow Setpoint (s)............................................................................................................................................ 73
Set Valve Override Normal (N)............................................................................................................................ 74
Set Valve Override Close (C)............................................................................................................................... 74
Set Valve Override Purge (P) ............................................................................................................................... 74
Set Autozero (A)................................................................................................................................................... 74
Set WinkStatus (W).............................................................................................................................................. 75
Select Gas Table Index (G)...................................................................................................................... 75
Get Gas Table Index (g)........................................................................................................................................ 75
Get Device Status (D)........................................................................................................................................... 76
Get MF1 Error Status (M)..................................................................................................................................... 76
Get Communication Status (U or u) ..................................................................................................................... 77
MODBUS INTERFACE.................................................................................................................................... 78
Installation .............................................................................................................................................. 78
Pinout.................................................................................................................................................................... 78
Power.................................................................................................................................................................... 79
Cable..................................................................................................................................................................... 79
Operation ................................................................................................................................................ 80
Address................................................................................................................................................................. 80
MODBUS compatible addressing description...................................................................................................... 80
Configuration........................................................................................................................................................ 80
Feedback and Diagnostics ...................................................................................................................... 82
Error Codes........................................................................................................................................................... 82
LED Functions...................................................................................................................................................... 82
Protocol (Modbus compatible)................................................................................................................ 83
Holding Registers ................................................................................................................................................. 83
Coils...................................................................................................................................................................... 83
Input Registers...................................................................................................................................................... 84
Discrete Inputs...................................................................................................................................................... 85
ETHERCAT.................................................................................................................................................. 87
Installation .............................................................................................................................................. 87
Pinout.................................................................................................................................................................... 87
Power supply ........................................................................................................................................................ 87
Cable..................................................................................................................................................................... 87
Operation ................................................................................................................................................ 88
Address................................................................................................................................................................. 88
Feedback and Diagnostics ...................................................................................................................... 88
Error Code ............................................................................................................................................................ 88
LED functions....................................................................................................................................................... 88
Protocol................................................................................................................................................... 89
Process Data Objects (PDO) protocol................................................................................................................... 89
CAN application layer over EtherCAT (CoE) - Objects....................................................................................... 90
CHAPTER 6: GAS CORRECTION FACTOR (GCF) ............................................................................ 94
THE GAS CORRECTION FACTOR (GCF):....................................................................................................... 94
How To Calculate the GCF for Pure Gases............................................................................................ 94
How To Calculate the GCF for Gas Mixtures......................................................................................... 95
Note ...................................................................................................................................................................... 95
Example................................................................................................................................................... 96
Mass Flow Rate at a Different Reference Temperature.......................................................................... 97
CHAPTER 7: THEORY OF OPERATION.............................................................................................. 98

Table of Contents
vi
TECHNIQUE OF MEASUREMENT AND CONTROL,ELECTRONICS.....................................................................98
Flow Path.................................................................................................................................................99
Measurement Technique..........................................................................................................................99
Control Circuitry......................................................................................................................................99
CONTROL VALVE........................................................................................................................................100
CHAPTER 8: MAINTENANCE...............................................................................................................101
GENERAL....................................................................................................................................................101
Zero Adjustment.....................................................................................................................................101
Checks and Recalibration......................................................................................................................101
Profibus Support Kit..............................................................................................................................102
CUSTOMER SUPPORT ..................................................................................................................................102
TROUBLESHOOTING ....................................................................................................................................103
APPENDIX A: PRODUCT SPECIFICATIONS.....................................................................................105
SPECIFICATIONS..........................................................................................................................................105
ENVIRONMENTAL SPECIFICATIONS..............................................................................................................106
ELECTRICAL SPECIFICATIONS .....................................................................................................................106
PHYSICAL SPECIFICATIONS.........................................................................................................................107
APPENDIX B: MODEL CODE .................................................................................................................108
VARIANT (X)..............................................................................................................................................108
GAS IDENTIFICATION (YYY)......................................................................................................................108
FULL SCALE RANGE (SCCM NITROGEN)(ZZZ)...........................................................................................110
FITTINGS (C)...............................................................................................................................................111
INTERFACE (A) ...........................................................................................................................................111
SEAL MATERIAL (E) ...................................................................................................................................111
EXTRAS/OPTIONS (O).................................................................................................................................111
APPENDIX C: GAS CORRECTION FACTORS...................................................................................112
APPENDIX D: CE DECLARATION OF CONFORMITY....................................................................115
MKS WORLDWIDE CALIBRATION & SERVICE CENTERS ..........................................................116
There is a declaration of contamination on the last page of this instruction manual.
List of Figures
Figure 1 Model Code Label .............................................................................................................. 16
Figure 2 Side View - Dimensions (for 4 VCR, Sub D Connector and “single-part-body”) ............... 19
Figure 3 Front View – Dimensions (4 VCR) ..................................................................................... 20
Figure 4 Top View – Dimensions ..................................................................................................... 20
Figure 5 Bottom View – Dimensions ............................................................................................... 21
Figure 6 Connector and Control Elements for Profibus unit ........................................................... 21
Figure 7 Side view - Dimensions (DN 16 KF, Sub D connector and "single-part-body")................. 21
Figure 8 Zero Button......................................................................................................................... 25
Figure 9 Profibus Connector ............................................................................................................ 55

Table of Contents
vii
Figure 10 Termination resistor ......................................................................................................... 56
Figure 11: Assembly......................................................................................................................... 98
List of Tables
Table 1 Total length for different fittings.......................................................................................... 20
Table 2 Profibus Interface ................................................................................................................ 55
Table 3 Cable specification (EN50170) ...........................................................................................56
Table 4 Maximum segment length as a function of the baud rate ................................................... 56
Table 5 Analog Interface .................................................................................................................. 65
Table 6 MKS Controller and cables for analog MF1 units ............................................................... 65
Table 7 Troubleshooting................................................................................................................. 103

Mass Flow Controller Safety Information
9
Mass Flow Controller Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning
The WARNING sign denotes a hazard to personnel. It calls
attention to a procedure, practice, condition, or the like, which, if
not correctly performed or adhered to, could result in injury to
personnel.
Caution
The CAUTION sign denotes a hazard to equipment. It calls
attention to an operating procedure, practice, or the like, which, if
not correctly performed or adhered to, could result in damage to or
destruction of all or part of the product.
Note
The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.

Mass Flow Controller Safety Information
10
Safety Procedures and Precautions
The following general safety precautions must be observed during all phases of operation
of this instrument. Failure to comply with these precautions or with specific warnings
elsewhere in this manual violates safety standards of intended use of the instrument and
may impair the protection provided by the equipment. MKS Instruments, Inc. assumes no
liability for the customer’s failure to comply with these requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument. Return
the instrument to an MKS Calibration and Service Center for service and repair to ensure that all
safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not attempt component replacement and internal adjustments. Any
service must be made by qualified service personnel only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, observe the proper safety precautions, completely purge the
instrument when necessary, and ensure that the material used is compatible with the wetted
materials in this product, including any sealing materials.
PURGE THE INSTRUMENT
After installing the unit, or before removing it from a system, purge the unit completely with a clean,
dry gas to eliminate all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This instrument must be purged under a ventilation hood, and gloves must be worn for protection.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been
specifically certified for such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the
intended use of the instrument. Assemble and tighten fittings according to manufacturer’s
directions.
CHECK FOR LEAK-TIGHT FITTINGS
Carefully check all vacuum component connections to ensure leak-tight installation.
OPERATE AT SAFE INLET PRESSURES
Never operate at pressures higher than the rated maximum pressure (refer to the product
specifications for the maximum allowable pressure).

Mass Flow Controller Safety Information
11
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, install a suitable burst disc in the vacuum system
to prevent system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants to enter the unit before or during use. Contamination such as dust, dirt,
lint, glass chips, and metal chips may permanently damage the unit or contaminate the process.
ALLOW THE UNIT TO WARM UP
If the unit is used to control dangerous gases, they should not be applied before the unit has
completely warmed up. Use a positive shutoff valve to ensure that no erroneous flow can occur
during warm up.

Chapter 1: General Information
13
Chapter 1: General Information
Introduction
MF1 is a state of the art high performance digital MFC with various options:
•Controller or meter version
•Metal or MEMS sensor versions
•Ranges from 10 sccm to 20 slm with various gases
•various fittings available
•PROFIBUS, Analog, RS 485, Ether CAT or USB Process Interface
Power Supply and Readout Units
The MF1 can be ordered as an analog version and thus can interface to complementary MKS
equipment which are available as single channel, dual channel, 4- and 8-channel units to display
the flow signal and to provide the power and set point commands. Refer to the corresponding
manuals for requirements and instructions.
Instruction Manual
Contents
This manual provides instructions on setup, installation, operation and service of:
•Mass flow controller MF1 analog operation
•Mass flow controller MF1 Profibus operation
•Mass flow controller MF1 RS485 operation
•Mass flow controller MF1 USB operation
•Mass flow controller MF1 EtherCAT operation

Chapter 1: General Information
14
Conventions
If not explicitly expressed differently at the respective place in this handbook all data are
referenced to:
a) Temperature in °C
b) Gas type is nitrogen N2
c) Pressure in mbar or bar with index (a) relates to absolute pressure and whereas index (g)
stands for gauge pressure, related to atmospheric and index (d) indicates differential
pressure.
d) Flow rates are given in sccm** or slm*** related to nitrogen or dry air.
** 1 sccm = 1 standard cm3/ min ; Standard conditions: 1013.25 mbar and 0 °C
*** 1 slm = 1 standard liter / min = 1000 sccm

Chapter 2: Shipment
15
Chapter 2: Shipment
General
Unpacking
MKS has carefully packed each unit so that it will reach you in perfect operating order. Upon
receiving the unit, however, you should check for defects, cracks, broken connectors, damaged
cables etc., to be certain that damage has not occurred during shipment.
Note
Do not discard any packing materials until you have completed your
inspection and are sure the unit arrived safely.
If you find any damage, please notify your carrier and MKS immediately. If it is necessary to return
the unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Service Center before shipping. Please refer to the inside of the back cover of this manual for a list
of MKS Calibration and Service Centers.
Unpacking Checklist
•Mass flow controller
•Mating connectors
•GSD file (CD) (for Profibus only)
•Manual (this book)
•Calibration sheet
Optional Accessories:
Control units, power supplies, readout units
Cable
Profibus Support Kit: 1179-PB-SUPPORT for units with profibus only

Chapter 2 : Shipment
16
Label
The label shows the following information: See figure 1 as an example:
Model code MF1
Sealing FKM
Range 500 sccm
Gas type SiH4 (the range is related to this gas)
Serial number 454145G20
CE mark CE
Manufacturer MKS Instruments Deutschland GmbH
500 sccm / SiH4
MF1C039502RPV
SN:454145G20
MKS Instruments Deutschland GmbH
Figure 1 Model Code Label
Across the housing and the meter/controller body there is a warranty void sticker to avoid access
to the inside by unauthorized people. Broken or removed label means lost of any warranty.
Clean Room Packaging
It is possible to get the flow controller delivered in clean room packaging (as an option). When
unpacking, follow these steps:
1. Remove the outer bag in an ante room (garmenting room) or transfer box.
Do not allow this outer bag to enter the clean room.
2. Wipe down the exterior of the inner bag with a clean room wipe.
This step reduces the contamination introduced into the clean room.
3. Remove the inner bag in the clean room.

Chapter 3: Installation
17
Chapter 3: Installation and Start Up
General Requirements
Environmental
Follow the guidelines below when installing and using your mass flow controller.
1. Maintain the normal operating temperature between 0 – 40°C (32° to 104°F).
2. Observe the pressure limits
•Maximum gas inlet pressure is 10 bar (g).
•Operational differential pressure is:
For F.S. of 10 to 5000 sccm
For F.S. of 10000 to 20000 sccm
0,7 bar (d) to 2.75 bar (d)
1 bar (d) to 2.75 bar (d)
•The standard orifice is sized for control over this range with the outlet at atmospheric
pressure.
3. Two kinds of power supply are possible (applies to all units):
±15 V
or
24 V (20 to 30 V)
Current: < 300 mA @ 24 VDC for Profibus, USB, RS485 or analog interface
4. Allow minimum 15 minutes for warm-up time for analog units as well as for units with
Profibus, RS 485 or USB interface.
5. Use high purity gas to purge the instrument.
6. The use of a filter upstream of the mass flow controller is recommended, if enough
pressure is available.
Refer also to Appendix A, Product Specifications for other possible precautions and restrictions.
Location and Orientation
1. Set the controller into position where it will be connected to a gas supply.
Placement of flow components in an orientation other than that in which they were
calibrated (typically horizontal) may cause a small zero shift. The zero offset can be
removed according to the instructions for zeroing.

Chapter 3: Installation
18
2. Install the flow controller in the gas stream such that the flow will be in the direction of the
arrow on the side of the controller.
Take into consideration the specified leak through the closed control valve in case of a
mass flow controller. The specified value refers to new and unused units, but may change
during operation by age, cycles, temperature and gas. To achieve best possible leak
tightness we strongly recommend the use of positive shut off valves.
The normal position is horizontal, the process interface connector pointing upwards or
vertical with flow direction either upwards or downwards.
It is possible to mount the units the way that the connector points downwards but control
performance and valve leak can be affected. This applies especially to units with higher
flow ranges. Therefore the ‘ceiling mount attitude’ should be avoided.
3. Allow adequate clearance for the tubing. Take into account when designing the plumbing
that a unit may be removed later, e.g. for service or maintenance.
To de-install units with metal ferrule compression fittings (for example Swagelok) the tubing
must be moved away some millimeters in axial direction whereas VCR fittings allow the
instrument to be removed sidewards also out from complexive and stiff plumbing systems.
4. Allow adequate clearance for the cable connector.
5. Position the unit to provide access to the zero button and rotary switches for address
setting. Make sure that the status LED is visible.
6. The device dissipates considerable power, related to it’s small volume. Make sure that the
maximum specified ambient temperature close to the device is not exceeded, by providing
adequate cooling. The main temperature is radiated on the both sides of the device.

Chapter 3: Installation
19
Leak Integrity
We recommend to check leak tightness of all ports and connections of the plumbing with a helium
leak detector.
Pressure Drop Test
If a leak check at high pressure is intended then check for the highest allowable pressure for all
parts involved. Example: If a pressure based leak check at 5 bar (g) is done you will damage a
pressure transducer in the line if it is limited to 3.5 bar (g). In this case the pressure transducer (or
whatever component is affected) must be removed or protected by a suitable valve.
Dimensions
The overall outline dimensions (length, width, height) are identical for the analog, Profibus, RS 485
and USB Units.
(All dimensions are listed in millimeters. Conversion: 1 inch = 25.4 mm)
Figure 2 Side View - Dimensions (for 4 VCR, Sub D Connector and “single-part-body”; flow
from left to right)

Chapter 3: Installation
20
25,4
12,7
Ø14,3
Figure 3 Front View – Dimensions (4 VCR)
Figure 4 Top View – Dimensions (flow from left to right)
Order Code Fittings (compatible) L in mm
MF1 _ ___ ___ R _ _ 0 4 VCR male 118.74 ±1
MF1 _ ___ ___ S _ _ 0 1/4 “ Swagelok* 107.6 ±1
MF1 _ ___ ___ G _ _ 0 4 VCO male 110.6 ±1
MF1 _ ___ ___ D _ _ 0 DN 16 KF 118.73 ±1
MF1 _ ___ ___ S _ _ 0 6 mm Swagelok* 107.6 ±1
*) without nuts and ferrules
Table 1 Total length for different fittings