MKS 579A User manual

Y-1951579A
Digital Mass Flow Controller
Type 1579A/B
and
Digital Mass Flow Meter
579A/B
- Instruction Manual -
MASS-FLOW CONTROLLER
FLOW
MKS Instruments
Deutschland GmbH Edition 2010-07

Copyright © 2009 by MKS Instruments Deutschland GmbH.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or
mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be
expressly permitted in writing by MKS Instruments.
Printed in the Federal Republic of Germany
Mass-Flo®is a registered trademark of MKS Instruments, Inc., Andover, MA
Swagelok® , VCR®, and VCO®are registered trademarks of Swagelok Marketing Company, Solon, OH
Cajon® , VCR®, and VCO®are registered trademarks of Cajon Company, Macedonia, OH
Kalrez®and Viton®are registered trademarks of DuPont Dow Elastomers Inc., Wilmington, DE
Teflon®is a registered trademark of E. I. DuPont de Nemours and Co. Inc., Wilmington, DE
Kel-F®is a registered trademark of 3M, Minneapolis, MN
NUPRO®is a registered trademark of Crawford Fitting Company, Solon, OH

1579A/579A Table of Contents
iii
Table of Contents
Safety Information ...............................................................................................................................9
Symbols Used in This Instruction Manual...................................................................................9
Safety Procedures and Precautions .........................................................................................10
Chapter 1: General Information........................................................................................................13
Introduction ...............................................................................................................................13
Overview of Versions................................................................................................................13
Power Supply and Readout Units.....................................................................................14
Profibus Version........................................................................................................................14
CE and EMC Requirements......................................................................................................14
Instruction Manual.....................................................................................................................15
Contents............................................................................................................................15
Conventions......................................................................................................................15
Designations and Names..................................................................................................15
Chapter 2: Shipment ........................................................................................................................17
General......................................................................................................................................17
Unpacking.........................................................................................................................17
Unpacking Checklist..................................................................................................................17
Analog Units......................................................................................................................17
Profibus Units....................................................................................................................18
Label .................................................................................................................................19
Clean Room Packaging....................................................................................................19
Chapter 3: Connectors and Control Elements .................................................................................21
Analog Units..............................................................................................................................21
Potentiometer ZERO.........................................................................................................22
AUTOZERO......................................................................................................................22
RESET Switch ..................................................................................................................22
Connector SETUP ............................................................................................................22
Electrical Connector..................................................................................................................23
1579A/B / 579A/B, Analog Unit.........................................................................................23
Profibus Units............................................................................................................................24
Potentiometer ZERO.........................................................................................................25
AUTOZERO......................................................................................................................25
RESET Switch ..................................................................................................................25
Address and Mode switch A/B..........................................................................................25
Status LED STS................................................................................................................25

Table of Contents 1579A/579A
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Electrical Connectors ............................................................................................................... 26
1579A/B / 579A/B, Profibus Units, Connector ANALOG................................................. 26
1579A/B / 579A/B, Profibus Units, Connector PROFIBUS.............................................. 27
Chapter 4: Operation....................................................................................................................... 29
General Requirements............................................................................................................. 29
Environmental.................................................................................................................. 29
Location and Orientation.................................................................................................. 30
Leak Integrity.................................................................................................................... 30
Pressure Drop Test.......................................................................................................... 30
Dimensions............................................................................................................................... 31
Outline Dimensions.......................................................................................................... 31
Mounting Holes................................................................................................................ 32
Mounting Plate................................................................................................................. 33
Electrical Connections and Cables .......................................................................................... 33
Cables and Controllers by MKS....................................................................................... 33
Power Supply / Readout Units of other Manufacturers ................................................... 34
Non MKS Cables.............................................................................................................. 34
Finishing the Installation........................................................................................................... 34
Chapter 5: Operation (Analog Units)............................................................................................... 35
Start Up the Mass Flow Controller/Meter................................................................................. 35
Zero Adjust............................................................................................................................... 36
Override the Control Valve....................................................................................................... 37
Priority of Commands............................................................................................................... 37
Chapter 6: Operation (Profibus Units)............................................................................................. 39
Functions.................................................................................................................................. 39
Overview.......................................................................................................................... 39
Valve Override ................................................................................................................. 40
Auto Zero ......................................................................................................................... 40
Alarm Limits ..................................................................................................................... 40
Temperature Measurement ............................................................................................. 40
Valve Drive Level............................................................................................................. 40
User Span / Gas Correction............................................................................................. 41
User Zero......................................................................................................................... 41
Filter ................................................................................................................................. 41
Gas Tables....................................................................................................................... 41
Soft Start Rate.................................................................................................................. 41

1579A/579A Table of Contents
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Start Up the Mass Flow Controller............................................................................................42
Zeroing the Flow Controller.......................................................................................................43
Status LED STS........................................................................................................................44
Address and Mode Switch A/B .................................................................................................44
Switch Assignment............................................................................................................44
Mode B..............................................................................................................................44
Setting an Address............................................................................................................45
Mode A..............................................................................................................................45
Zero Modes.......................................................................................................................45
PROFIBUS Protocol..................................................................................................................46
Data Interface............................................................................................................................46
Send Data.........................................................................................................................47
Small Receive Data ..........................................................................................................48
Full Receive Data..............................................................................................................49
Small Setup.......................................................................................................................50
Full Setup..........................................................................................................................51
Small Diagnostics .............................................................................................................53
Full Diagnostics.................................................................................................................54
Calibration Table...............................................................................................................56
PROFIBUS Setup .....................................................................................................................57
GSD Files Usage..............................................................................................................57
Chapter 7: Theory of Operation .......................................................................................................59
Technique of Measurement and Control, Electronics...............................................................59
Flow Path..........................................................................................................................59
Measurement Technique..................................................................................................59
Control Circuitry................................................................................................................60
Control Valve.............................................................................................................................60
Chapter 8: Gas Correction Factor (GCF).........................................................................................61
The Gas Correction Factor (GCF): ...........................................................................................61
How To Calculate the GCF for Pure Gases .....................................................................61
How To Calculate the GCF for Gas Mixtures...................................................................62
Note ..........................................................................................................................62
Example............................................................................................................................63
Mass Flow Rate at a Different Reference Temperature...................................................63
Direct Reading of the Analog Output Signal.....................................................................64

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Chapter 9: MFC Sizing Guidelines.................................................................................................. 65
General..................................................................................................................................... 65
Determining the Flow Controller Range................................................................................... 66
Configurations for Low or High Differential Pressure ...................................................... 66
Chapter 10: Maintenance................................................................................................................ 67
General..................................................................................................................................... 67
Zero Adjustment............................................................................................................... 67
Checks and Recalibration................................................................................................ 67
Profibus Support Kit......................................................................................................... 68
Customer Support.................................................................................................................... 68
Troubleshooting........................................................................................................................ 69
Appendix A: Product Specifications ................................................................................................ 71
Specifications........................................................................................................................... 71
Environmental Specifications................................................................................................... 72
Electrical Specifications ........................................................................................................... 72
Physical Specifications............................................................................................................. 73
Appendix B: Model Codes............................................................................................................... 75
Model Code.............................................................................................................................. 75
Type Number (XXXXA).................................................................................................... 75
SEMI Gas Code (YYY) .................................................................................................... 76
Calibration Gas Flow Rate (ZZZ)..................................................................................... 76
Fittings (F)........................................................................................................................ 76
Valve (1)........................................................................................................................... 77
Electrical/Communication Connector (C)......................................................................... 77
Seals (E) .......................................................................................................................... 77
Ordering Examples................................................................................................................... 78
To order a Mass Flow Controller ..................................................................................... 78
To Order a Mass Flow Meter........................................................................................... 78
Appendix C: Gas Correction Factors .............................................................................................. 79
Appendix D: Binary Code................................................................................................................ 83
MKS Worldwide Calibration & Service Centers ............................................................................... 85
There is a Health and Safety Form on the last page of this instruction manual.

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List of Figures
Figure 1: Model Code Label.............................................................................................................19
Figure 2: 1579A/B / 579A/B Side View ............................................................................................21
Figure 3: 1579A/B / 579A/B Connector Side....................................................................................21
Figure 4: 1579A/B / 579A/B Gas Inlet Side.....................................................................................22
Figure 5: 15-pol. connector ..............................................................................................................23
Figure 6: 1579A/B / 579A/B Side View ...........................................................................................24
Figure 7: 1579A/B / 579A/B Connector Side...................................................................................24
Figure 8: 1579A/B / 579A/B Gas Inlet Side.....................................................................................25
Figure 9: 9-pol. Connector ...............................................................................................................26
Figure 10: Profibus Connector.........................................................................................................27
Figure 11: 1579A/B / 579A/B Dimensions (Side)...........................................................................31
Figure 12: Dimensions (Inlet/Outlet side).........................................................................................32
Figure 13: Mounting Holes...............................................................................................................32
Figure 14: Mounting Plate................................................................................................................33
Figure 15: Address and Mode Switch Map A/B...............................................................................44
Figure 16: Voltage Divider................................................................................................................64
List of Tables
Table 1: MKS Cables .......................................................................................................................33
Table 2: Troubleshooting..................................................................................................................69
Table 3: Binary Code........................................................................................................................83

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1579A/579A Safety Information
9
Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning!
The WARNING sign denotes a hazard. It calls attention to a
procedure, practice, condition, or the like, which, if not correctl
y
performed or adhered to, could result in injury to personnel.
Caution! The CAUTION sign denotes a hazard. It calls attention to an
operating procedure, practice, or the like, which, if not correctl
y
performed or adhered to, could result in damage to or destruction
of all or part of the product.
Note The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.

Safety Information 1579A/579A
10
Safety Procedures and Precautions
The following general safety precautions must be observed during all phases of operation of
this instrument. Failure to comply with these precautions or with specific warnings elsewhere in
this manual violates safety standards of intended use of the instrument and may impair the
protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the
customer’s failure to comply with these requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument. Return
the instrument to an MKS Calibration and Service Center for service and repair to ensure that all
safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not attempt component replacement and internal adjustments. Any
service must be made by qualified service personnel only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, observe the proper safety precautions, completely purge the
instrument when necessary, and ensure that the material used is compatible with the wetted
materials in this product, including any sealing materials.
PURGE THE INSTRUMENT
After installing the unit, or before removing it from a system, purge the unit completely with a clean,
dry gas to eliminate all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This instrument must be purged under a ventilation hood, and gloves must be worn for protection.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been
specifically certified for such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the
intended use of the instrument. Assemble and tighten fittings according to manufacturer’s
directions.
CHECK FOR LEAK-TIGHT FITTINGS
Carefully check all vacuum component connections to ensure leak-tight installation.

1579A/579A Safety Information
11
OPERATE AT SAFE INLET PRESSURES
Never operate at pressures higher than the rated maximum pressure (refer to the product
specifications for the maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, install a suitable burst disc in the vacuum system
to prevent system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants to enter the unit before or during use. Contamination such as dust, dirt,
lint, glass chips, and metal chips may permanently damage the unit or contaminate the process.
ALLOW THE UNIT TO WARM UP
If the unit is used to control dangerous gases, they should not be applied before the unit has
completely warmed up. Use a positive shutoff valve to ensure that no erroneous flow can occur
during warm up.

Safety Information 1579A/579A
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1579A/579A Chapter 1: General Information
13
Chapter 1: General Information
Introduction
The digital mass flow controllers of the 1579A/B series accurately measure and control the mass
flow rate of gases. The type 579A/B of this series, however, is a mass flow meter for mass flow
measurement only, therefore without a control valve.
Based upon a patented*MKS measurement technique, these instruments use a laminar flow
device whose precise indication of mass flow is achieved through the use of a laminar bypass
element in parallel with a sensor tube. The 1579A/B digital controllers use a PID algorithm which
compares the flow signal with an external setpoint command, thus creating a control signal which
is applied to a solenoid driven control valve to set the desired flow rate. The controllers also feature
in the analog mode the ability to accept TTL level commands to remotely open and close the
control valve. The control valve is located at the outlet of the meter section, also inside the metal
instrument housing. The flow signal as derived from the sensor and also the analog setpoint signal
are digitalized. Therefore linearization, flow control and handling of all other signals and commands
is operated by the microcomputer, in both digital and analog versions of the 1579A/B series. This
provides best accuracy and optimizes the controller’s response and stability.
The 1579B/579B are the RoHS compliant version of the 1579A/579A and differentiate in the
material selection of some components.
The 1579A/B controller and 579A/B meter employ a metal cover, providing excellent protection
against electromagnetic disturbances. The RF bypass capacitors virtually eliminate RFI and EMI
interference. The control valve of all mass flow controllers is a normally closed (NC) valve.
Overview of Versions
Type Function Features
1579A
-Analog- Mass Flow
Controller Standard flow control unit
Analog setpoint and analog flow signal 0 – 5 VDC
Control valve can be closed or opened remotely independent of
setpoint.
Full scale ranges (slm): 50, 100, 200, 300
1579A
-Profibus- Mass Flow
Controller Same as analog version but additional Profibus DP interface
Setpoint and flow information in engineering units.
579A
-Analog- Mass Flow
Meter Standard flow monitor unit
Flow signal analog 0 – 5 VDC
Ranges: same as 1579A
579A
-Profibus- Mass Flow
Meter Same as analog version but with additional Profibus DP interface
Flow information in engineering units.
1579B/579BRoHS compliant version of the of the 1579A/579A
* US Patent No 5461913

Chapter 1: General Information 1579A/579A
14
Power Supply and Readout Units
The analog versions of the 579A/B/1579A/B series can interface to complementary MKS
equipment which are available as single channel, dual channel, four and eight channel units to
display the flow signal and to provide the power and set point commands, where applicable. Almost
all control units are equipped with serial interface. Refer to the corresponding manuals for
requirements and instructions.
Profibus Version
The particular features of units with Profibus interface, setup and control are described in
Chapter 6, Operation.
Note: All Profibus versions can also be operated in analog mode, e.g. for diagnosis purposes. The
analog interface and profibus interface connector are described in Chapter 3 Connectors and
Control Elements.
The mechanical features and installation are the same for both the analog and profibus version.
CE and EMC Requirements
The instrument complies to EN61326-2-3 with the requirements for industrial applications with
continuous not monitored operation. Braided shielded cables must be used. The PROFIBUS cable
must be qualified.

1579A/579A Chapter 1: General Information
15
Instruction Manual
Contents
This manual provides instructions on setup, installation, operation and service of:
•Mass flow controller 1579A/B / analog version
•Mass flow controller 1579A/B / profibus version
•Mass flow meter 579A/B / analog version
•Mass flow meter 579A/B / profibus version
Conventions
If not explicitly expressed differently at the respective place in this handbook all data are
referenced to:
a) Temperature in °C
b) Gas type is nitrogen N2
c) Pressure
in mbar or bar with index (a) relating to absolute pressure whereas index (g) stands for
gage pressure, related to atmosphere.
Example: 1,7 bar (g) = 1,7 bar overpressure versus atmosphere (gage pressure).
0,5 bar (a) = 500 mbar absolute pressure.
d) Flow rates
are given in sccm** or slm*** related to nitrogen or dry air.
Designations and Names
The mass flow meter 579A/B will only be mentioned in particular where this is necessary, else wise
the instructions for the 1579A/B also apply for the meter 579A/B.
In some places the appendix for version A is not printed, e.g. 1579 instead of 1579A/B without any
restriction for functionality etc.
** 1 sccm = 1 standard cm3/ min ; standard conditions: 1013,25 mbar and 0 °C
*** 1 slm = 1 standard liter / min = 1000 sccm

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1579A/579A Chapter 2: Shipment
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Chapter 2: Shipment
General
Unpacking
MKS has carefully packed each unit so that it will reach you in perfect operating order. Upon
receiving the unit, however, you should check for defects, cracks, broken connectors, damaged
cables etc., to be certain that damage has not occurred during shipment.
Note Do not discard any packing materials until you have completed you
r
inspection and are sure the unit arrived safely.
If you find any damage, please notify your carrier and MKS immediately. If it is necessary to return
the unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Service Center before shipping. Please refer to the inside of the back cover of this manual for a list
of MKS Calibration and Service Centers.
Unpacking Checklist
Analog Units
Mass flow controller 1579A/B or mass flow monitor 579A/B, respectively
Accessory kit ZB-30 consisting of
•Mating connector D-type; 15 pin female
•2 mounting screws #8-32 UNF (MKS part no. 160-3973)
Manual (this book)
Calibration sheet
Optional:
Mounting plate
Diagnosis adapter kit, ordering code DMC-SUPPORT_ANA , consisting of:
•Adapter
•Software
•Cable
The adapter is also available separately. Ordering code: ADAPTER-DMC-ANA.

Chapter 2: Shipment 1579A/579A
18
Profibus Units
Mass flow controller 1579A/B or mass flow monitor 579A/B, respectively
Accessory kit ZB-27 consisting of
•Mating connector D-type; 9 pin female
•Mating connector D-type; 9 pin male
•2 mounting screws #8-32 UNF (MKS part no. 160-3973)
GSD file (3,5” disc)
Manual (this book)
Calibration sheet
Optional:
Profibus support kit, ordering code 1579-PB-SUPPORT consisting of:
1 Disc 3,5“
1 RS 232 cable
1 converter RS232/RS485
1 instructions

1579A/579A Chapter 2: Shipment
19
Label
The label shows the following information: See figure 1 as an example:
Model code 1579A/B, for other codes ref. to appendix
B
Sealing Viton
Range 200 slm
Gas type N2 (the range is related to this gas)
Serial number 560942G20
CE mark CE
Manufacturer MKS Instruments Deutschland GmbH
MKS Instruments Deutschland GmbH
200 slm / N2
1579A01322LR1BV / Viton
SN: 560942G20
Figure 1: Model Code Label
Across the housing and the meter/controller body there is an extra label to avoid access to the
inside by unauthorized people. Broken or removed label means lost of any warranty.
Clean Room Packaging
It is possible to get the flow controllers and meters delivered in clean room packaging (as an
option). When unpacking, follow these steps, please:
1. Remove the outer bag in an ante room (garmenting room) or transfer box.
Do not allow this outer bag to enter the clean room.
2. Wipe down the exterior of the inner bag with a clean room wipe.
This step reduces the contamination introduced into the clean room.
3. Remove the inner bag in the clean room.

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