PI P--763 Series User manual

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
PZ258E
P-763 Nanopositioner
User Manual
Version: 1.1.0
Date: 17.06.2020
This document describes the following product:
P-763.22C
Compact XY nanopositioner with clear
aperture, 200 µm × 200 µm, direct position
measuring, capacitive sensors

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list:
https://www.physikinstrumente.com/en/about-pi/patents
© 2020 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. The use of any text, images and drawings is permitted only in part and only when indicating the
source.
Original instructions
First printing: 17.06.2020
Document number: PZ258E, CBo, Version 1.1.0
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Audience of this User Manual ................................................. 1
1.2 Symbols and Typographic Conventions ..................................................................... 1
1.3 Figures ........................................................................................................................ 2
1.4 Other Applicable Documents ..................................................................................... 2
1.5 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 7
3Product Description 9
3.1 Product View .............................................................................................................. 9
3.2 Product Labeling....................................................................................................... 10
3.3 Scope of Delivery...................................................................................................... 11
3.4 Suitable Electronics .................................................................................................. 11
3.5 Required Accessories................................................................................................ 11
3.6 Technical Features.................................................................................................... 12
3.6.1 PICMA® Piezo Actuators .............................................................................. 12
3.6.2 Flexure Guides ............................................................................................. 12
3.6.3 Capacitive Sensors....................................................................................... 12
3.6.4 ID Chip ......................................................................................................... 12
4Unpacking 13
5Installation 15
5.1 General Notes on Installation................................................................................... 15
5.2 Connecting the P-763 to the Protective Earth Conductor ....................................... 16
5.3 Mounting the P-763 ................................................................................................. 18
5.4 Fixing the Load.......................................................................................................... 19
6Startup and Operation 23
6.1 General Notes on Startup and Operation ................................................................ 23
6.2 Operating the P-763 ................................................................................................. 24
6.3 Discharging the P-763............................................................................................... 25
Contents

7Maintenance 27
7.1 General Notes on Maintenance ............................................................................... 27
7.2 Cleaning the P-763 ................................................................................................... 27
8Troubleshooting 29
9Customer Service 31
10 Technical Data 33
10.1 Specifications............................................................................................................ 33
10.1.1 Data Table.................................................................................................... 33
10.1.2 Maximum Ratings........................................................................................ 34
10.2 Ambient Conditions and Classifications ................................................................... 34
10.3 Dimensions ............................................................................................................... 35
10.4 Torque for Stainless Steel Screws (A2-70)................................................................ 36
10.5 Pin Assignment ......................................................................................................... 36
11 Old Equipment Disposal 39
12 EU Declaration of Conformity 41

1 About this Document
P-763 Nanopositioner PZ258E Version: 1.1.0 1
In this Chapter
Objective and Target Audience of this User Manual ..................................................................... 1
Symbols and Typographic Conventions......................................................................................... 1
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 2
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Audience of this User Manual
This manual contains the information required for using the P-763 as intended.
Basic knowledge of control technology, drive technologies, and suitable safety measures is
assumed.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
Failure to comply could lead to minor injury.
Precautionary measures for avoiding the risk.
NOTICE
Dangerous situation
Failure to comply could cause damage to equipment.
Precautionary measures for avoiding the risk.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 1.1.0 PZ258E P-763 Nanopositioner
Symbol/
Label
Meaning
1.
2.
Action consisting of several steps with strict sequential order
Action consisting of one or more steps without relevant sequential
order.
Bullet
p. 5
Cross-reference to page 5
RS-232
Label on the product indicating an operating element (example:
RS-232 interface socket)
Warning signs attached to the product that refer to detailed
information in this manual.
1.3 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.
1.4 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in
separate manuals.
The latest versions of the user manuals are available for download (p. 3) on our website.
Product Document
E-727.xF
Digital Multi-Channel Piezo Controller with
EtherCAT
E727T0005 User Manual
E-727.x • E-727.xAP
Digital Multi-Channel Piezo Controller
E727T0005 User Manual
PIMikroMove SM148E Software Manual
P-5xx / P-6xx / P-7xx Piezo Positioning Systems PZ240 Short Instructions

1 About this Document
P-763 Nanopositioner PZ258E Version: 1.1.0 3
1.5 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 31).
Downloading manuals
1. Open the website www.pi.ws.
2. Search the website for the product number (e.g., P-763) or the product family (e.g.,
Nanopositioner).
3. Click the corresponding product to open the product detail page.
4. Click Downloads.
The manuals are shown under Documentation.
5. Click the desired manual and fill out the inquiry form.
The download link will then be sent to the email address entered.


2 Safety
P-763 Nanopositioner PZ258E Version: 1.1.0 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions ........................................................................................................... 5
Organizational Measures ............................................................................................................... 7
2.1 Intended Use
The P-763 is a laboratory device as defined by DIN EN 61010-1. It is intended for indoor use and
use in an environment that is free of dirt, oil, and lubricants.
According to its design, the P-763 is intended for fine positioning as well as moving small
objects quickly and precisely. The specifications for the P-763 apply to horizontal mounting.
Movement is horizontal in two axes.
The P-763 can only be used as intended in conjunction with suitable electronics (p. 11) available
from PI. The electronics are not included in the P-763's scope of delivery.
The electronics must provide the required operating voltages. To ensure proper performance of
the servo control system, the electronics must also be able to read out and process the signals
from the position sensors.
2.2 General Safety Instructions
The P-763 is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the P-763.
Use the P-763 for its intended purpose only, and only when it is in perfect technical
condition.
Read the user manual.
Eliminate any malfunctions that may affect safety immediately.
The operator is responsible for the correct installation and operation of the P-763.
2
Safety

2 Safety
6 Version: 1.1.0 PZ258E P-763 Nanopositioner
The P-763 is driven by piezo actuators. Temperature changes and compressive stress can induce
charges in piezo actuators. Piezo actuators can remain charged for several hours after
disconnecting from the electronics. Touching or short-circuiting the contacts in the P-763's
connectors could lead to minor injuries from electric shock. The piezo actuators can be
destroyed by an abrupt contraction.
Do not open the P-763.
Discharge the P-763's piezo actuators before installing:
Connect the P-763 to the switched-off electronics from PI equipped with an internal
discharge resistor.
Do not pull the connectors out of the electronics during operation.
Do not touch the contacts in the connectors.
Use screws to secure the P-763's connectors against being pulled out of the electronics.
Mechanical forces can damage or misalign the P-763.
Avoid impacts that affect the P-763.
Do not drop the P-763.
Do not exceed the maximum permissible stress and load capacities according to the
specifications (p. 33).
Do not touch any sensitive parts (e.g., platform) when handling the P-763.
The P-763 is maintenance-free and achieves its positioning accuracy as a result of the optimal
alignment of mechanical components and piezo actuators. Loosened screws cause a loss in
positioning accuracy.
Loosen screws only when instructed in this manual.
Do not open the P-763.

2 Safety
P-763 Nanopositioner PZ258E Version: 1.1.0 7
2.3 Organizational Measures
User manual
Always keep this user manual together with the P-763.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the P-763 to a third party, include this user manual as well as other relevant
information provided by the manufacturer.
Do the work only if the user manual is complete. Missing information due to an
incomplete user manual can result in minor injury and damage to equipment.
Install and operate the P-763 only after you have read and understood this user
manual.
Personnel qualification
The P-763 may only be installed, started, operated, maintained, and cleaned by authorized and
appropriately qualified personnel.


3 Product Description
P-763 Nanopositioner PZ258E Version: 1.1.0 9
In this Chapter
Product View.................................................................................................................................. 9
Product Labeling .......................................................................................................................... 10
Scope of Delivery ......................................................................................................................... 11
Suitable Electronics...................................................................................................................... 11
Required Accessories ................................................................................................................... 11
Technical Features ....................................................................................................................... 12
3.1 Product View
The figure serves as an example and can differ from your positioner model.
Figure 1: Exemplary product view of the P-763
1
Base body
2Platform
3Cable exit (X axis)
4Protective earth connector
5Cable exit (Y axis)
X Positive direction of motion of the X axis
Y Positive direction of motion of the Y axis
3
Product Description

3 Product Description
10 Version: 1.1.0 PZ258E P-763 Nanopositioner
3.2 Product Labeling
Labeling Description
P-763.22C
Product number
123456789
Serial number (example), individual for each P-763
Meaning of each position (from the left):
1 = internal information
2 and 3 = year of manufacture
4 to 9 = consecutive number
Manufacturer's logo
Warning sign "Pay attention to the manual!"
Old equipment disposal (p. 39)
Country of origin: Germany Country of origin
WWW.PI.WS
Manufacturer's address (website)
CE conformity mark
Symbol for the protective earth conductor, marks the
protective earth connection of the P-763 (p. 16)
X
Cable exit of the X axis
Y
Cable exit of the Y axis
Arrow and letter X
Positive direction of motion of the X axis
Arrow and letter Y
Positive direction of motion of the Y axis
Figure 2: "Residual Voltage" warning sign on the connector of the P-763
"Residual Voltage" warning sign: Indicates risk of electric shock (p. 5)

3 Product Description
P-763 Nanopositioner PZ258E Version: 1.1.0 11
3.3 Scope of Delivery
Product number Description
P-763.22C Compact XY nanopositioner with clear aperture, 200 µm × 200 µm, direct
position measuring, capacitive sensors
000036450 M4 screw set for protective earth, consisting of:
One flat-head screw with cross recess, M4x8, ISO 7045
Two lock washers
Two flat washers
PZ240 Short instructions for P-5xx / P-6xx / P-7xx piezo positioning systems
3.4 Suitable Electronics
Product number Description
E-727.3CD* Digital multi-channel piezo controller, 3 axes, -30 to 130 V, capacitive
sensors, D-sub 25W3 socket
E-727.3CDA* Digital multi-channel piezo controller, 3 axes, -30 to 130 V, capacitive
sensors, D-sub 25W3 socket, analog inputs
E-727.3CDP*
Digital multi-channel piezo controller, 3 axes, -30 to 130 V, capacitive
sensors, D-sub 25W3 socket, 1.5 A peak output current
E-727.3CDAP*
Digital multi-channel piezo controller, 3 axes, -30 to 130 V, capacitive
sensors, D-sub 25W3 socket, 1.5 A peak output current, analog inputs
* P-895.2DDC adapter cable required
To order, contact our customer service department (p. 31).
3.5 Required Accessories
Product number Description
P-895.2DDC
Adapter cable 2× D-sub 7W2 (f) to D-sub 25W3 (m) for piezo actuator
nanopositioning systems with capacitive sensors, 2 channels, length: 0.3
m
To order, contact our customer service department (p. 31).

3 Product Description
12 Version: 1.1.0 PZ258E P-763 Nanopositioner
3.6 Technical Features
3.6.1 PICMA® Piezo Actuators
P-763 positioners are driven by PICMA® piezo actuators. PICMA® actuators have all-ceramic
insulation and their performance and lifetime are therefore far superior to conventional
actuators. The ceramic insulation layer protects the monolithic piezoceramic block against
humidity and failure due to increased leakage current. In this way, an especially high reliability
is achieved even under extreme ambient conditions. In contrast to motorized drives, there are
no rotating parts or friction. The piezo actuators are therefore free of backlash, maintenance,
and wear.
3.6.2 Flexure Guides
P-763 positioners have flexure guides for friction-free motion and high guiding accuracy.
A flexure guide is an element that is free of static and sliding friction. It is based on the elastic
deformation (bending) of a solid (e.g., steel) and does not have any rolling or sliding parts.
Flexure elements have a high stiffness and load capacity. Flexure guides are maintenance and
wear free. They are 100 % vacuum compatible, function in a wide temperature range and do
not require any lubricants.
3.6.3 Capacitive Sensors
Capacitive sensors measure the position directly on the platform (direct metrology) and work
without contact. Neither friction nor hysteresis interferes with the motion, which allows
excellent linearity values to be achieved together with the high position resolution. In
conjunction with suitable electronics, capacitive sensors achieve the best resolution, stability,
and bandwidth.
3.6.4 ID Chip
An ID chip is located in the D-sub connector of the P-763. When the P-763 is calibrated at the
factory with digital electronics, the calibration data is saved on the ID chip together with
specific product information. During switch-on, the digital electronics read the data from the
ID chip of the P-763 connected. A P-763 with an ID chip containing calibration data can
therefore be connected to any suitable digital electronics without renewed calibration.
For more information on the ID chip, see the manual of the controller used.

4 Unpacking
P-763 Nanopositioner PZ258E Version: 1.1.0 13
NOTICE
Mechanical overload due to incorrect handling!
An impermissible mechanical load on the platform of the P-763 can cause damage to the piezo
actuators, sensors, and flexures of the P-763 as well as loss of accuracy.
Do not touch any sensitive parts (e.g., platform) when handling the P-763.
1. Unpack the P-763 with care.
2. Compare the contents with the scope of delivery according to the contract and the
delivery note.
3. Inspect the contents for signs of damage. If any parts are damaged or missing, contact
our customer service department (p. 31) immediately.
4. Keep all packaging materials in case the product needs to be returned.
4
Unpacking


5 Installation
P-763 Nanopositioner PZ258E Version: 1.1.0 15
In this Chapter
General Notes on Installation ...................................................................................................... 15
Connecting the P-763 to the Protective Earth Conductor........................................................... 16
Mounting the P-763..................................................................................................................... 18
Fixing the Load ............................................................................................................................. 19
5.1 General Notes on Installation
CAUTION
Dangerous voltage and residual charge in piezo actuators!
The P-763 is driven by piezo actuators. Temperature changes and compressive stress can
induce charges in piezo actuators. Piezo actuators can remain charged for several hours after
disconnecting from the electronics. Touching or short-circuiting the contacts in the P-763's
connectors could lead to minor injuries from electric shock. The piezo actuators can be
destroyed by an abrupt contraction.
Do not open the P-763.
Discharge the P-763's piezo actuators before installing:
Connect the P-763 to the switched-off electronics from PI equipped with an internal
discharge resistor.
Do not pull the connectors out of the electronics during operation.
Touching the contacts in the connectors can lead to an electric shock (max. 130 V DC) and
minor injuries.
Do not touch the contacts in the connectors.
Use screws to secure the P-763's connectors against being pulled out of the electronics.
NOTICE
Mechanical overload due to incorrect handling!
An impermissible mechanical load on the platform of the P-763 can cause damage to the piezo
actuators, sensors, and flexures of the P-763 as well as loss of accuracy.
Do not touch any sensitive parts (e.g., platform) when handling the P-763.
5
Installation

5 Installation
16 Version: 1.1.0 PZ258E P-763 Nanopositioner
NOTICE
Damage due to unsuitable cables!
Unsuitable cables can damage the P-763 and the electronics.
Use cables provided by PI only to connect the P-763 to the electronics.
NOTICE
Damage due to improper mounting!
Improper mounting of the P-763 or incorrectly mounted parts can damage the P-763.
Only use the holes or threads intended for the purpose of fixing the P-763 and loads.
Install the P-763 so that the platform and all parts attached to it can move freely within the
entire travel range.
NOTICE
Damage due to incorrectly tightened screws!
Incorrectly tightened screws can cause damage.
Pay attention to the torque range (p. 36) specified for the screws used during installation.
INFORMATION
Extension cables can reduce the positioning accuracy of the P-763 or affect sensor processing
by the electronics.
Do not use extension cables. If you need longer cables, contact our customer service
department (p. 31).
5.2 Connecting the P-763 to the Protective Earth Conductor
INFORMATION
In the case of P-763 positioners with D-sub connectors, ground loops can occur when the
positioner is grounded via its protective earth connector as well as via the connecting cable's
shielding for the electronics.
If a ground loop occurs, contact our customer service department (p. 31).
INFORMATION
Pay attention to the applicable standards for connecting the protective earth conductor.
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