
User Manual
F712T0002, valid for F-712.MA1 and F-712.MA2
Mma, BRo, 12/6/2019
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 2 / 45
Phone +49 721 4846
Contents
Customer Service 3
About this Document 4
Figures ................................................................................................................................................................. 4
Goal and Target Audience of this User Manual................................................................................................... 4
Symbols and Typographic Conventions............................................................................................................... 4
Other Applicable Documents .............................................................................................................................. 5
Safety 6
Intended Use ....................................................................................................................................................... 6
Safety................................................................................................................................................................... 7
General Safety Instructions.............................................................................................................................................7
Organizational Measures ................................................................................................................................................ 7
Safety Instructions for P-616K001 NanoCube® Nanopositioners ...................................................................................8
Safety Instructions for M-122K025 Linear Stages ......................................................................................................... 10
System Overview 11
F-712.MA1 System Components....................................................................................................................... 11
F-712.MA2 System Components....................................................................................................................... 12
Details of the Mechanics ................................................................................................................................... 13
Axis Definitions .................................................................................................................................................. 14
F-712.MA1 Coordinate Systems and Axis Identifiers .................................................................................................... 14
F-712.MA2 Coordinate Systems and Axis Identifiers .................................................................................................... 15
Scope of Delivery............................................................................................................................................... 16
Optional Accessories ......................................................................................................................................... 16
Unpacking 17
Installation 17
Mounting the Mechanics................................................................................................................................... 17
Connecting the Mechanics to the Protective Earth Conductor......................................................................... 25
Interconnecting the System .............................................................................................................................. 26
Start-Up and Operation 30
Operating the System........................................................................................................................................ 30
Safety Shutdown................................................................................................................................................ 31
Discharging the NanoCube® Nanopositioner.................................................................................................... 31
Maintenance 32
Cleaning the Mechanics..................................................................................................................................... 32
Performing a Maintenance Run of the M-122K025 Linear Stage ..................................................................... 32
Packing the F-712 Alignment System for Transport.......................................................................................... 33