MKS Mass-Flo 1679B User manual

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118719-P1
Rev B, 12/97
Instruction Manual
MKS Type 1679B
Mass-Flo®Controller
Six Shattuck Road
Andover, MA 01810-2449
[phone] or [phone]
Fax: [phone]
E-mail: [e-mail]
Web site: http://www.mksinst.com
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WARRANTY
Type 1679B Equipment
MKS Instruments, Inc. (MKS) warrants that for two years from the date of shipment
the equipment described above (the “equipment”) manufactured by MKS shall be
free from defects in materials and workmanship and will correctly perform all date-
related operations, including without limitation accepting data entry, sequencing,
sorting, comparing, and reporting, regardless of the date the operation is performed
or the date involved in the operation, provided that, if the equipment exchanges
data or is otherwise used with equipment, software, or other products of others,
such products of others themselves correctly perform all date-related operations
and store and transmit dates and date-related data in a format compatible with
MKS equipment. THIS WARRANTY IS MKS’SOLE WARRANTY CONCERNING
DATE-RELATED OPERATIONS.
For the period commencing with the date of shipment of this equipment and ending
two years later, MKS will, at its option, either repair or replace any part which is
defective in materials or workmanship or with respect to the date-related operations
warranty without charge to the purchaser. The foregoing shall constitute the
exclusive and sole remedy of the purchaser for any breach by MKS of this
warranty.
The purchaser, before returning any equipment covered by this warranty, which is
asserted to be defective by the purchaser, shall make specific written arrange-
ments with respect to the responsibility for shipping the equipment and handling
any other incidental charges with the MKS sales representative or distributor from
which the equipment was purchased or, in the case of a direct purchase from MKS,
with the MKS home office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and
used in accordance with the specifications recommended by MKS for the proper
and normal use of the equipment. MKS shall not be liable under any circumstances
for indirect, special, consequential, or incidental damages in connection with, or
arising out of, the sale, performance, or use of the equipment covered by this
warranty.
MKS recommends that all MKS pressure and flow products be calibrated
periodically (typically every 6 to 12 months) to ensure accurate readings. When a
product is returned to MKS for this periodic re-calibration it is considered normal
preventative maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES,
EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF
MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A
PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF
ANY PATENT.
11-98 118719-P1
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118719-P1
REV B, 12/97
MKS Type 1679B
Mass-Flo®Controller
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Copyright © 1997 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by MKS
Instruments, Inc.
Mass-Flo®is a registered trademark of MKS Instruments, Inc., Andover, MA
Cajon®is a registered trademark of Cajon Company, Macedonia, OH
Swagelok®, VCR®, and VCO®are registered trademarks Swagelok Co., Solon, OH
Kalrez®and Viton® are registered trademarks of E. I. DuPont de Nemours and Co. Inc.,
Wilmington, DE
NUPRO®is a registered trademark of Crawford Fitting Company, Solon, OH
Kel-F®is a registered trademark of 3M, Minneapolis, MN
Protected by U.S. Patent Numbers 5,314,164 and 5,461,913; foreign patents pending
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Table of Contents
iii
Table of Contents
Mass Flow Controller Safety Information............................................................................... 1
Symbols Used in This Instruction Manual.................................................................. 1
Symbols Found on the Unit ....................................................................................... 2
Safety Procedures and Precautions............................................................................. 3
Chapter One: General Information......................................................................................... 5
Introduction............................................................................................................... 5
Design Features............................................................................................. 6
Reliability ..................................................................................................... 6
Cleanliness Features...................................................................................... 6
How This Manual is Organized.................................................................................. 7
Customer Support...................................................................................................... 8
Chapter Two: Installation......................................................................................................9
How To Unpack the Type 1679 Controller................................................................. 9
Opening the Package..................................................................................... 9
Unpacking Checklist.................................................................................................. 10
Environmental Requirements..................................................................................... 10
Setup ......................................................................................................................... 11
Dimensions ................................................................................................... 12
Gas Line Connections................................................................................................ 13
Standard Fittings........................................................................................... 13
Optional Fittings ........................................................................................... 13
Mounting a Type 1679 MFC...................................................................................... 14
Chapter Three: Overview....................................................................................................... 15
Interface Cables ......................................................................................................... 15
Generic Shielded Cable Description ..............................................................16
Example 1: Preferred Method To Connect Cable.......................................... 17
Example 2: Alternate Method To Connect Cable.......................................... 17
Electrical Connections ............................................................................................... 18
Type “D”Connector...................................................................................... 18
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Table of Contents
iv
P. C. Edge Card Connector............................................................................20
The Gas Correction Factor (GCF)...............................................................................21
How To Read the Flow Output Directly .....................................................................22
Chapter Four: Operation ........................................................................................................23
How To Start Up the Flow Controller.........................................................................23
How To Zero the Flow Controller ..............................................................................24
How To Adjust the Controller Gain............................................................................25
How To Override the Valve........................................................................................26
Priority of the Commands..............................................................................26
Chapter Five: Theory of Operation.........................................................................................27
General Information ...................................................................................................27
Flow Path...................................................................................................................27
Measurement Technique.............................................................................................27
Control Circuitry........................................................................................................28
Chapter Six: Maintenance......................................................................................................29
General.......................................................................................................................29
Zero Adjustment ........................................................................................................29
Repair ........................................................................................................................30
Chapter Seven: Troubleshooting............................................................................................31
Troubleshooting Chart................................................................................................31
Appendix A: Product Specifications.......................................................................................33
Performance Specifications ........................................................................................33
Environmental Specifications.....................................................................................34
Electrical Specifications .............................................................................................34
Physical Specifications...............................................................................................35
Appendix B: Gas Correction Factors......................................................................................37
Appendix C: MFC Sizing Guidelines.....................................................................................41
General Information ...................................................................................................41
How To Determine the Flow Controller Range...........................................................42
How To Determine the Valve Configuration...............................................................43
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Table of Contents
v
Appendix D: Model Code Explanation.................................................................................. 45
Model Code............................................................................................................... 45
Index...................................................................................................................................... 49
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Table of Contents
vi
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List of Fi
g
ures and Tables
vii
List of Figures and Tables
Figures
Figure 1: Outline Dimensions of the 1679 Flow Controller.................................................... 12
Figure 2: Side View of the 1679 Flow Controller .................................................................. 13
Figure 3: Mounting Dimensions of the 1679 Flow Controller................................................ 14
Figure 4: Preferred Method.................................................................................................... 17
Figure 5: Alternate Method To Use When Cable Clamp is Not Available.............................. 17
Figure 6: Wiring Diagram for an Input Divider...................................................................... 22
Tables
Table 1: Definition of Symbols Found on the Unit .....................................................................2
Table 2: MKS Cables...............................................................................................................15
Table 3: 9-Pin Type “D”Connector Pinout...............................................................................18
Table 4: 15-Pin Type “D”Connector Pinout.............................................................................19
Table 5: 20-Pin Edge Card Connector Pinout ...........................................................................20
Table 6: Troubleshooting Chart................................................................................................31
Table 7: CvPressure Factors....................................................................................................43
Table 8: Valve Configuration Selection Guide..........................................................................44
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List of Figures and Tables
viii
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Mass Flow Controller Safety Information S
y
mbols Used in This Instruction Manual
1
Mass Flow Controller Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning The WARNING sign denotes a hazard to personnel. It calls
attention to a procedure, practice, condition, or the like,
which, if not correctly performed or adhered to, could result
in injury to personnel.
Caution The CAUTION sign denotes a hazard to equipment. It calls
attention to an operating procedure, practice, or the like, which, if
not correctly performed or adhered to, could result in damage to or
destruction of all or part of the product.
Note The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.
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Symbols Found on the Unit Mass Flow Controller Safet
y
Information
2
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No.5007 Off (Supply)
IEC 417, No.5008 Earth (
g
round)
IEC 417, No.5017
Protective earth
(
g
round)
IEC 417, No.5019
Frame or chassis
IEC 417, No.5020 Equipotentiality IEC 417, No.5021 Direct current IEC 417, No.5031 Alternatin
g
current
IEC 417, No.5032
Both direct and
alternatin
g
current
IEC 417, No.5033-a Class ll equipment
IEC 417, No.5172-a
Three phase
alternatin
g
current
IEC 617-2 No.020206
Caution, refer to
accompanyin
g
documents
ISO 3864, No.B.3.1
Caution, risk of
electric shock
ISO 3864, No.B.3.6 Caution, hot surface
IEC 417, No.5041
Table 1: Definition of Symbols Found on the Unit
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Mass Flow Controller Safety Information Safet
y
Procedures and Precautions
3
Safety Procedures and Precautions
The following general safety precautions must be observed during all phases of operation of this
instrument. Failure to comply with these precautions or with specific warnings elsewhere in
this manual violates safety standards of intended use of the instrument and may impair the
protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the
customer’s failure to comply with these requirements.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument.
Return the instrument to an MKS Calibration and Service Center for service and repair to ensure
that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not attempt component replacement and internal adjustments. Any
service must be made by qualified service personnel only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, observe the proper safety precautions, completely purge the
instrument when necessary, and ensure that the material used is compatible with the wetted
materials in this product, including any sealing materials.
PURGE THE INSTRUMENT
After installing the unit, or before removing it from a system, purge the unit completely with a
clean, dry gas to eliminate all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This instrument must be purged under a ventilation hood, and gloves must be worn for
protection.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been
specifically certified for such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the
intended use of the instrument. Assemble and tighten fittings according to manufacturer's
directions.
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Safety Procedures and Precautions Mass Flow Controller Safet
y
Information
4
CHECK FOR LEAK-TIGHT FITTINGS
Carefully check all vacuum component connections to ensure leak-tight installation.
OPERATE AT SAFE INLET PRESSURES
Never operate at pressures higher than the rated maximum pressure (refer to the product
specifications for the maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, install a suitable burst disc in the vacuum system
to prevent system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants to enter the unit before or during use. Contamination such as dust,
dirt, lint, glass chips, and metal chips may permanently damage the unit or contaminate the
process.
ALLOW THE UNIT TO WARM UP
If the unit is used to control dangerous gases, they should not be applied before the unit has
completely warmed up. Use a positive shutoff valve to ensure that no erroneous flow can occur
during warm up.
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Chapter One: General Information Introduction
5
Chapter One: General Information
Introduction
The Type 1679B All Metal Mass-Flo®controller accurately measures and controls the mass flow
rates of gases, largely independent of gas pressure or temperature. Based upon a patented MKS
measurement technique, the instrument is a laminar flow device whose precise indication of mass
flow is achieved through the use of a bypass element in parallel with a sensor tube. It is designed
for use in gas flow applications that require the delivery of high purity and/or corrosive gases.
The all metal design eliminates the permeation, outgassing, and particle generation problems
inherent to all elastomeric-sealed flow controllers.
The 1679 controller has a three-inch footprint and features the ability to accept TTL level
commands to remotely open and close the control valve. The controller includes a metal cover
and RF bypass capacitors, and incorporates a design that virtually eliminates RFI and EMI
interference. This all metal instrument is designed to provide maximum performance, reliability,
and cleanliness.
The 1679 mass flow controller (MFC) can interface to complementary MKS equipment (Types
147/647, 160, 246, 247) to display the reading and to provide the power, and set point
commands. (Additionally, the 167 unit can be used as a readout and set point generator, but it
does not supply power; the 660 unit can be used as a power supply and readout, though it cannot
send a set point to the flow controller.) Refer to the corresponding manuals for requirements and
instructions.
The 1679 flow controller is available in a variety of types and configurations to suit specific
needs. The options that must be specified when you order the flow controller include:
•Connector: Type “D”connector or recessed P.C. Edge Card connector
•Range: 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10,000, sccm (N2equivalent)
•Fittings: Cajon®4-VCR®male compatible and ¼inch Swagelok®compatible
All 1679 flow controllers have normally closed valves.
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Introduction Cha
p
ter One: General Information
6
Design Features
The design of the 1679 flow controller incorporates an advanced flow sensor, a new control
valve, and an optimized bypass. (U.S. and Foreign Patents on the sensor and valve)1. The latest
generation two-element sensing circuit provides accurate, repeatable performance even in low
flow ranges (< 10 sccm).
Low temperature effect from ambient temperature change and a low attitude sensitivity effect are
also ensured. The new diaphragm actuated valve provides significant benefits over traditional
solenoid valves in that there is a faster response time, less vibration sensitivity, and less
sensitivity to changing line pressure. The newly optimized sensor/bypass arrangement provides a
small flow splitting error for gases with different densities, which dramatically improves
measurement accuracy when gases other than the calibration gas are used. The surface mount
electronics feature optional pin-to-pin compatibility with other manufacturer’s flow controllers.
In addition, the variable valve control electronics provides for fast response to any set point.
Reliability
To help provide excellent reliability, the design contains a low mechanical and electronic
components count and has successfully passed the following tests:
•STRIFE, including temperature cycling and vibration (sine and random tests)
and with an overall metal braided shielded cable, properly grounded at both ends:
•EMC Directive 89/336/EEC (Type “D”connectors only)
Cleanliness Features
The all metal sealed design of the flow controller ensures extremely low external leakage and
eliminates a possible cause of particle generation. The design also incorporates minimal wetted
surface area, zero dead space, and a unidirectional gas flow path. To further ensure its
cleanliness, the 1679 controller is manufactured from 316L SCQ (double vacuum melted)
stainless steel, and undergoes precision machining as well as a proprietary cleaning process. The
instrument is assembled in a Class 100 clean room, cycled and purged to eliminate possible
contaminants, tested to verify the release of no particles greater than 0.2µ meters, and metal-
capped and double-bagged in an inert nitrogen environment.
1Protected by U.S. Patent Numbers 5,314,164 and 5,461,913 —Foreign Patents Pending.
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Chapter One: General Information How This Manual is Or
g
anized
7
How This Manual is Organized
This manual is designed to provide instructions on how to set up and install a Type 1679 unit.
Before installing your Type 1679 unit in a system and/or operating it, carefully read and
familiarize yourself with all precautionary notes in the Safety Messages and Procedures
section at the front of this manual. In addition, observe and obey all WARNING and
CAUTION notes provided throughout the manual.
Chapter One: General Information, (this chapter) introduces the product and describes the
organization of the manual.
Chapter Two: Installation, explains environmental requirements and practical considerations to
take into account when selecting the proper setting for the mass flow controller.
Chapter Three: Overview, describes, in a general way, how the flow controller operates in a gas
flow system. This chapter also provides information on how to use a Gas Correction Factor
when interpreting the output signal for a gas other than the calibration gas.
Chapter Four: Operation, explains how to start up and operate the mass flow controller. It also
discusses how to override the control valve.
Chapter Five: Theory of Operation, provides additional information on how the flow controller
operates.
Chapter Six: Maintenance, lists a few general practices to follow to ensure that the flow
controller will perform optimally.
Chapter Seven: Troubleshooting, includes a table of hints for reference in the event that your
flow controller malfunctions.
Appendix A: Product Specifications, lists the specifications of the instrument.
Appendix B: Gas Correction Factors, provides a table listing the gas correction factors for the
most commonly used gases.
Appendix C: MFC Sizing Guidelines, is provided for reference and describes how to calculate
the correct size MFC for an application. This information is useful if you need to purchase
another MFC or if you plan to use your MFC in another, different application.
Appendix D: Model Code Explanation, provides model code information for the 1679 unit.
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Customer Support Cha
p
ter One: General Information
8
Customer Support
Standard maintenance and repair services are available at all of our regional MKS Calibration
and Service Centers, listed on the back cover. In addition, MKS accepts the instruments of other
manufacturers for recalibration using the Primary and Transfer Standard calibration equipment
located at all of our regional service centers. Should any difficulties arise in the use of your Type
1679 instrument, or to obtain information about companion products MKS offers, contact any
authorized MKS Calibration and Service Center. If it is necessary to return the instrument to
MKS, please obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Calibration and Service Center before shipping. The ERA Number expedites handling and
ensures proper servicing of your instrument.
Please refer to the inside of the back cover of this manual for a list of MKS Calibration and
Service Centers.
Warning All returns to MKS Instruments must be free of harmful,
corrosive, radioactive, or toxic materials.
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Chapter Two: Installation How To Un
p
ack the T
yp
e 1679 Controlle
r
9
Chapter Two: Installation
How To Unpack the Type 1679 Controller
MKS has carefully packed the 1679 flow controller so that it will reach you in perfect operating
order. Upon receiving the unit, however, you should check for defects, cracks, broken
connectors, etc., to be certain that damage has not occurred during shipment.
Note Do not discard any packing materials until you have completed your
inspection and are sure the unit arrived safely.
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the
unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Service Center before shipping. Please refer to the inside of the back cover of this manual for a
list of MKS Calibration and Service Centers.
Opening the Package
The Type 1679 controller is assembled, leak tested with helium, and calibrated in a clean room
environment. The instrument is double-bagged in this environment to ensure maintenance of its
particle free condition during shipment. It is very important to remove the bags according to
clean room practices. To maintain at least a minimal level of clean room standards, follow the
instructions below.
1. Remove the outer bag in an ante room (garmenting room) or transfer box.
Do not allow this outer bag to enter the clean room.
2. Remove the inner bag in the clean room.
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