PI E-651.1S User manual

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
PZ129E Operating Manual
E-651 / E-614 Controller / Amplifier
for Multilayer Bending Actuators
Release: 6.1.0 Date: 2019-11-18
This document describes the
following Product(s):
E-651.1S
Piezo amplifier / servo controller for bending
actuators, 1 channel, 0 to 60 V, strain gauge
sensor, benchtop device
E-651.2S
Piezo amplifier / servo controller for bending
actuators, 2 channels, 0 to 60 V, strain gauge
sensor, benchtop device
E-614.2BS
Piezo amplifier / servo controller for bending
actuators, 2 channels, 0 to 60 V, strain gauge
sensor, OEM module

For the E-651 / E-614, an EU Declaration of Conformity has been issued in accordance with the
following European directives:
EMC Directive
RoHS Directive
The applied standards certifying the conformity are listed below.
Safety: EN 61010-1
EMC: EN 61326-1
RoHS: EN 50581
If an electrical operating device is designed to be integrated in another electrical operating
device: The operator is responsible for a standards compliant integration of the electrical device
into the overall system.
©1999–2019 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text,
photographs, and drawings in this manual are protected by copyright. With regard thereto,
Physik Instrumente (PI) GmbH & Co. KG retains all the rights. The use of any text, images and
drawings is permitted only in part and only when indicating the source.
First printing 2019-11-18
Document Number PZ129E, Release 6.1.0
E-651_E-614_User_PZ129E610.doc
Subject to change without notice. This manual is superseded by any new release. The latest
respective release is available for download on our website (www.pi.ws).

Contents
1Safety 3
1.1 Intended Use ............................................................................3
1.2 General Safety Instructions.......................................................3
1.3 Organizational Measures ..........................................................5
1.4 Personnel Qualification.............................................................5
2About this Document 6
2.1 Other Applicable Documents.....................................................6
2.2 Downloading Manuals...............................................................6
3Product Description 7
3.1 Control of Bending Actuators ....................................................7
3.2 Model Overview........................................................................8
3.3 Scope of Delivery......................................................................8
3.4 Product View.............................................................................8
4Operation 11
4.1 Getting Started........................................................................11
4.2 Operating Modes ....................................................................12
4.2.1 Closed-Loop Operation............................................................ 12
4.2.2 Open-Loop Operation .............................................................. 13
4.3 On-Board Submodules............................................................13
4.3.1 E-801 Submodule for Strain Gauge Sensor Processing ......... 13
4.3.2 E-802 Position Servo-Control Submodule...............................13
5Calibration 14
5.1 Equipment Needed.................................................................14
5.2 Zero-Point Adjustment ............................................................14
6Troubleshooting 16
6.1 Typical Problems ....................................................................16
6.2 Opening the E-651 Housing....................................................17
7Technical Data 18
7.1 Specifications..........................................................................18
7.2 Maximum Ratings...................................................................19

Contents
7.3 Ambient Conditions and Classifications ..................................20
7.4 Pin Assignment.......................................................................20
7.4.1 E-651 PZT & SENSOR connector ........................................... 20
7.4.2 C-501.15050H Power Supply...................................................21
8Cleaning 22
9Customer Service 23
10 Old Equipment Disposal 24

Safety
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1 Safety
1.1 Intended Use
The E-651 / E-614 is a laboratory device according to DIN EN
61010-1. It is intended to be used in interior spaces and in an
environment which is free of dirt, oil and lubricants.
The E-651 / E-614 is designed and intended for driving of
PICMA®multilayer bending actuators (i.e., capacitive loads)
such as the PL-112 to PL-140, and P-871 from PI.
For closed-loop operation, the actuators must be equipped with
strain gauge sensors, as this is the case with P-871 actuators.
The E-651 / E-614 must not be used for purposes other than
those named in this user manual. In particular, the E-651 / E-
614 must not be used to drive ohmic or inductive loads.
The E-651 / E-614 can be used for static as well as dynamic
applications.
1.2 General Safety Instructions
The E-651 / E-614 is built according to state-of-the-art
technology and recognized safety standards. Improper use can
result in personal injury and/or damage to the E-651 / E-614.
Only use the E-651 / E-614 for its intended purpose, and
only use it if it is in a good working order.
Read the user documentation (user manuals, Technical
Notes).
Immediately eliminate any faults and malfunctions that
are likely to affect safety.
The operator is responsible for the correct installation and
operation of the E-651 / E-614.
Install the E-651 / E-614 near the power source so that
the power plug can be quickly and easily disconnected
from the
mains.
Use the supplied components to connect the E-651 / E-
614 to the power source.
If one of the supplied components for connecting to the
power source has to be replaced, use a sufficiently
dimensioned component.
Only use cables and connections that meet local safety
regulations.

Safety
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Any resonant operation of the bending actuators should
generally be avoided. Due to self-heating effects, the specified
operating temperature range of the actuator could be exceeded
rapidly and irreparable damage may occur.
Power off the actuator immediately if you hear or see
any resonant behavior. For the unloaded resonant
frequency see the documentation of the actuator.
If an E-614 OEM module is operated without a housing, live
parts will be accessible. Touching the live parts can result in
minor injury. Electrical, magnetic and electromagnetic fields
emitted by live parts can disturb the E-614 OEM module and/or
the environment.
Only operate the E-614 OEM module when it is installed
in a shielded housing that securely encloses all live
parts and fulfills the requirements of electromagnetic
compatibility.
Since parts of the circuit will store charge, precautions
must also be taken when the E-614 OEM module is not
powered. After switching off the E-614 OEM module,
wait a minute before you touch parts of the E-614 OEM
module to be sure that any residual voltage has
dissipated.
If the E-651 benchtop device is operated with an open housing,
live parts are accessible. Touching the live parts can result in
minor injury.
Only open the E-651 housing when you are authorized
and have the corresponding qualifications.
Before opening the housing, remove the E-651 from the
power source by pulling the power plug.
When operating with an open housing, do not touch any
components in the housing aside from the adjustment
elements mentioned in this user manual.
The E-651 / E-614 contains electrostatic-sensitive devices
(ESD) that can be damaged if handled improperly.
Avoid touching assemblies, pins and PCB traces.
Before you touch the E-651 / E-614, discharge yourself
of any electric charges, e.g., by wearing an antistatic
wrist strap.
Only handle and store the E-651 / E-614 in
environments that dissipate existing static charges to
earth in a controlled way and prevent electrostatic

Safety
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charges (ESD protected workstation or electrostatically
protected area, in short EPA).
Before cleaning, disconnect the E-651 / E-614 from the
power source by removing the mains plug.
1.3 Organizational Measures
User documentation (user manual, Technical Notes):
Always keep this user documentation available by the E-
651 / E-614.
The latest versions of the user documentation are
available from PI.
Add all information given by the manufacturer to the
user documentation, for example supplements or
Technical Notes.
If you pass the E-651 / E-614 on to other users, also
turn over the user documentation as well as other
relevant information provided by the manufacturer.
Only use the device on the basis of the complete user
documentation. Missing information due to an
incomplete user documentation can result in minor injury
as well as property damage.
Only install and operate the E-651 / E-614 after having
read and understood this user manual.
1.4 Personnel Qualification
The E-651 / E-614 may only be installed, started up, operated,
and cleaned by authorized and qualified staff.

About this Document
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2 About this Document
This user manual contains information on the intended use of
the E-651 / E-614.
It assumes that the reader has a fundamental understanding of
basic servo systems as well as motion control concepts and
applicable safety procedures.
2.1 Other Applicable Documents
Component Document
E-801 Sensor Submodule PZ117E User Manual
E-802 Servo-Control
Submodule PZ150E User Manual
E-614.2BS OEM module E614T0003 Technical Note
2.2 Downloading Manuals
1 Open the website www.pi.ws.
2 Search for the product number (e.g., P-871) or the
product family (e.g., PICMA® Bending) on the website.
3 Click on the product to open the product detail page.
4 Click on Downloads.
The manuals are shown under Documentation.
5 Click on the desired manual and fill in the inquiry form.
6 The download link will be sent to the e-mail address
you entered.
If a manual is missing on our website or if there are problems in
downloading:
Contact our customer service department (p. 23).

Product Description
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3 Product Description
3.1 Control of Bending Actuators
The E-651 / E-614 is designed and intended for driving of
PICMA®multilayer bending actuators such as the PL-112 to
PL-140, and P-871 from PI.
The PICMA®bending actuators require full differential-voltage
control with constant voltages of 0 V and +60 V and a variable
voltage from 0 V to +60 V (see Fig. 1). Note that a control input
voltage of 5 V corresponds to a PZT variable output of about
+30 V, which puts the actuator in the middle position (i.e.
deflection ≈0 μm).
Fig. 1. PICMA® multilayer bending actuator with full
differential-voltage control,
Pin assignment: 1 0 V [or GND]
2 0 V to +60 V
3 +60 V

Product Description
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3.2 Model Overview
E-651.1S Piezo amplifier / servo controller for bending
actuators, 1 channel, 0 to 60 V, strain gauge
sensor, benchtop device
E-651.2S Piezo amplifier / servo controller for bending
actuators, 2 channels, 0 to 60 V, strain gauge
sensor, benchtop device
E-614.2BS Piezo amplifier / servo controller for bending
actuators, 2 channels, 0 to 60 V, strain gauge
sensor, OEM module
Provides the same functionality as the E-
651.2S 2-channel controller, but on a printed
circuit board.
3.3 Scope of Delivery
PZ129E User manual for E-651 / E-614, this
document
E-651 benchtop devices only:
C-501.15050H Wide-range, 15 V power supply, 50 W,
with power cord (#3763)
E500T0011 Technical note for the analog driver for
NI LabVIEW
E-614 OEM modules only:
E614T0003 Technical note showing the board’s
component and connection locations
PZ150E User manual for the E-802 servo-
controller submodule
PZ117E User manual for the E-801 sensor
submodule
3.4 Product View
This section describes the operating elements of the E-651
benchtop devices. A description of the E-614 OEM modules
can be found in the E614T0003 technical note.

Product Description
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Fig. 2: E-651 front panel; elements for channel 2 are not present on
single-channel models
Common elements:
ON (Power) LED Power on/off indicator
Elements provided once per channel:
OFL LED Lights up if the output voltage is outside
the nominal output voltage range of the
controller
SERVO ON/OFF Switch for changing between open-loop
(off) and closed-loop mode (on)
CONTROL IN BNC connector for the analog control
signal, -5 V to +5 V
SENSOR MONITOR BNC connector for reading out the
sensor signal (0 to 10 V)
NOTICE
Do not apply any input voltage to the
SENSOR MONITOR socket. This could
cause damage to the electronics.
ZERO This potentiometer shifts the output of
the sensor processing circuitry
PZT & SENSOR 7-conductor LEMO connector with PZT
outputs (constant +60 V and power-amp
output 0 to +60 V), as well as sensor
excitation (5 V DC) and sensor signal

Product Description
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Fig. 3: E-651 rear panel details
POWER ON/OFF switch
14 to 16V DC INPUT Operating power input, socket for the
barrel connector from the C-501.15050H
power supply (included)

Operation
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4 Operation
Note that upon delivery the system is ready for operation: all of
PI's piezo positioning systems are delivered with performance
test documents to verify the system performance, and
calibration of the controller is done prior to delivery in our lab.
Actuators and assigned controller channels are matched and
should be kept together as a unit. The serial number of the
assigned actuator is marked on the associated controller
channel.
Normally, you do not need to calibrate the system. Only if the
actuator, mechanical setup, cables to the bending actuator are
replaced, or if a large change in operating temperature occurs,
is recalibration necessary. Should you ever need to make a
new full calibration, read “Calibration” on page 14.
4.1 Getting Started
This section gives instructions for the E-651 benchtop devices.
Instructions for E-614 OEM modules can be found in the
E614T0003 technical note.
Do not interchange controller and/or actuators; they are
matched and calibrated together. Respect the
assignment of the actuators to the individual controller
channels, as indicated by the serial numbers on the
labels affixed to the devices.
Carry out the following steps to put the motion system into
operation:
1 Connect the actuators to the proper controller
channel(s) using the PZT & SENSOR socket(s).
Handle the actuators with care and avoid any kind of
mechanical shock.
2 Optionally: If you want to read out the sensor signal for
a channel, connect a voltmeter (not included) to the
appropriate SENSOR MONITOR socket.
3 With the POWER switch on the rear panel set to OFF,
connect the controller to the C-501.15050H power
supply (included) using the 14 to 16 VDC INPUT
socket, and connect the power supply to the line power
(100–240 VAC, 50/60 Hz).

Operation
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4 Select the operating mode for each channel using the
corresponding SERVO ON/OFF switch on the
controller.
If SERVO is ON (closed-loop mode), the control input
voltage is used as the target position value for the
servo-control circuit, and determines the position of the
bending. If SERVO is OFF (open-loop mode), the
output voltage for the bending actuator is in direct
linear relation to the control input voltage.
5 Connect a control-input voltage source (-5 V to +5 V
DC) to the CONTROL INPUT socket for each controller
channel.
6 Power up the E-651 controller using the POWER
switch on the rear panel. The POWER LED on the front
panel lights up.
7 Deflect the actuator(s): apply a control input voltage in
the range from -5 V to +5 V to the channel(s).
You can monitor the actuator deflection with the
SENSOR MONITOR signal (see step 2; 0 V to 10 V),
even when the system is in open-loop mode.
If the output voltage corresponding to the control input
signal is outside the output voltage range (0 to 60 V),
the OFL (overflow) LED for the channel lights and
remains on as long as the overflow condition persists.
4.2 Operating Modes
E-651 / E-614 controller/amplifiers can be operated in closed-
loop or open-loop mode.
The position signal is available in either operating mode in the
form of a sensor monitor signal from 0 to 10 V. Note that +5 V
corresponds to mid-position of the actuator.
4.2.1 Closed-Loop Operation
In closed-loop mode, it is the deflection (position) of the
actuator that is controlled by the control input signal, which is
processed by the E-802 servo-control submodule (see section
4.3.2).
A channel of an E-651 benchtop device is in closed-loop mode
if the corresponding SERVO switch on the front panel is set to
ON.
For information on E-614 OEM modules, see the E614T0003
technical note.

Operation
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4.2.2 Open-Loop Operation
In open-loop mode the variable output voltage for the actuator
is controlled by the control input signal (this output voltage for
the actuator is in direct linear relation to the control input
voltage).
A channel of an E-651 benchtop device is in open-loop mode if
the corresponding SERVO switch on the front panel is set to
OFF.
For information on E-614 OEM modules, see the E614T0003
technical note.
4.3 On-Board Submodules
Each E-651 / E-614 channel is equipped with submodules for
sensor processing (E-801) and servo-control (E-802).
4.3.1 E-801 Submodule for Strain Gauge Sensor Processing
This submodule is used for excitation and evaluation of one
strain gauge sensor (SGS). It is designed as a plug-in
submodule to be used on different PCBs.
The submodule supplies the strain gauge with a DC voltage
and generates a signal proportional to the expansion changes
of the strain gauge. Located on the submodule is a sensor gain
adjustment and settings for a low-pass filter.
See the SGS portions of the E-801 User Manual (PZ117E) for
details.
4.3.2 E-802 Position Servo-Control Submodule
The E-802 submodule produces an analog control signal for the
power amplifier driving the actuator. Slew rate limitation, notch
filter and servo-control loop are all implemented on the E-802.
The servo-loop logic compares the control voltage input (target)
and the sensor signal (current position) to generate the
amplifier control signal using an analog proportional-integral
(P-I) algorithm.
For calibration procedures, see “Calibration” and the E-802
Servo-Control Submodule User Manual (PZ150E).

Calibration
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5 Calibration
Note that upon delivery the system is ready for operation: all of
PI's positioning systems with a piezo actuator are delivered with
performance test documents to verify the system performance,
and calibration of the controller is done prior to delivery in our
lab. Actuators and assigned controller channels are matched
and should be kept together as a unit. The serial number of the
actuator assigned to each channel is marked on the individual
controller.
Normally there is no need for you to recalibrate the system.
Only exchanging the actuator, the mechanical setup, replacing
the cables on the actuator or making a large change in the
operating temperature, may make recalibration necessary.
The only procedure which is necessary from time to time is the
zero-point adjustment (see below). All other calibration
procedures—static gain adjustment1and dynamic calibration2—
require special equipment and should only be done by qualified
personnel and are required only in special circumstances. See
the user manuals for the sensor processing and servo-control
submodules (E-801 and E-802) for details regarding those
procedures.
5.1 Equipment Needed
Zero-point adjustment requires a voltmeter and a small straight-
bladed screw driver.
5.2 Zero-Point Adjustment
Proper zero-point adjustment ensures that the full output
voltage swing of the amplifier can be used without reaching the
output voltage limits of the amplifier and causing overflow
conditions, both in open-loop and closed-loop operation. If an
overflow condition occurs (OFL LED lights up for the channel), it
can often be prevented by re-adjusting the ZERO point.
The zero-point of each channel is adjusted with the appropriate
ZERO potentiometer (E-651: ZERO potentiometer for each
1The objective of static gain adjustment is to ensure that the actuator
expands to its nominal expansion in "positive" direction when a control signal
input of +5 V is applied (with DC-offset disabled).
2Dynamic calibration optimizes step response and suppresses resonance,
overshoot, and oscillation.

Calibration
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channel accessible through the front panel, p. 8; E-614: R132
for channel 1, R133 for channel 2). This potentiometer shifts the
output of the sensor processing circuitry and hence the values
on the sensor monitor output (E-651: front panel; E-614: MON-
DMS1 and MON-DMS2 test points) and sensor-input lines of
the servo-loop submodule.
For the operating elements of the E-651 benchtop devices see
p. 8.
For the location of the potentiometers, connectors, switches
and jumpers of the E-614 OEM board see the E614T0003
technical note.
To adjust the zero-point for a channel proceed as follows:
1 Before powering up the system, make sure the actuator
is mounted in the same way and with the same load as
during normal operations in the application. In multi-
axis systems, make sure the actuators are always
connected to the same controller channels.
2 Make sure the analog control input (E-651: front panel;
E-614: connector X20) is at 0 V.
3 Set the channel to open-loop mode (E-651: SERVO
OFF; E-614: EC/VC switch to VC)
4 E-614 only: close jumper X7 (channel 2) and X10
(channel 1) to disable any DC offset potentiometer.
5 Power up the system.
6 Deflect the actuator over its full range by sweeping the
control input signal over the range of -5 V to +5 V.
7 Hold the control input signal at -5 V.
8 Adjust the ZERO potentiometer so that the sensor-
monitor signal is 0 V.
Normally the zero-point adjustment can be finished at this point.
Now you can switch the channel to closed-loop mode and
deflect the actuator over the full range by applying a control
input voltage of -5 to +5 V. The overflow LED should not light
up. If the overflow LED does light, repeat steps 2 to 8.
Failure of the zero-point re-adjustment (i.e. overflow LED still
lights up) could indicate a serious problem. See "Calibration" for
information on how to proceed.

Troubleshooting
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6 Troubleshooting
6.1 Typical Problems
Problem
Possible Causes
Solutions
Actuator
does not
move
Cables not
connected or
connected to wrong
socket
Check the connecting
cables
Cable is defective
Contact our customer
service department
(p. 23).
Bending actuator
defective
Replace actuator with a
working one, to test a
new combination of
actuator and controller
(note that if you want to
use the new actuator in
regular operation a fully
recalibration of the
system is required) and
contact our customer
service department
(p. 23).
Control input voltage
source defective
Repair or replace
voltage source
Controller will not
power up
Check POWER LED
(with E-614 not
included), power supply
and line voltage
connection
Overflow
LED lights
up
Commanded output
voltage outside the
allowed range (0 to
+60 V)
Re-adjust the zero-point
(see p. 14). If this is not
successful, contact our
customer service
department (p. 23).
Control input signal
outside the allowed
range (-5 V to +5 V)
Use a suitable control
input signal

Troubleshooting
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6.2 Opening the E-651 Housing
Should it ever be necessary to open the E-651 housing, e.g. for
a static gain adjustment procedure, proceed as follows:
1 Switch off the controller and disconnect the power
supply.
2 Use a Torx 8 driver to unscrew the 2 screws in the blue
frame on the rear panel and carefully remove the rear
panel.
3 Use the Torx 8 driver to unscrew the 2 screws in the
blue frame on the front panel. Carefully remove the
front panel, which also pulls the PCB out of the housing
(the rear panel must be turned and pulled carefully
through the housing too).
4 Reconnect the power supply to the socket on the rear
panel. Keep the system powered down.
Note that some adjustment elements on the main board and on
the E-801 and E-802 submodules are covered with sealing
lacquer. Damage to the seal will void the warranty except in
consultation with PI.

Technical Data
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7 Technical Data
7.1 Specifications
E-651.1S E-651.2S / E-614.2BS
Function Piezo amplifier and position
controller for multilayer
bending actuators, benchtop
device
Piezo amplifier and position
controller for multilayer
bending actuators
E-651.2S: benchtop device
E-614.2BS: OEM module
Channels 1 2
Sensor
Controller type P-I (analog) P-I (analog)
Sensor type SGS SGS
Sensor bandwidth Low-pass filter frequency:
300 Hz / 1 kHz / 3 kHz
selectable
Low-pass filter frequency:
300 Hz / 1 kHz / 3 kHz
selectable
Amplifier
Input voltage range -5 to 5 V -5 to 5 V
Min. output voltage 0 to 60 V, additional fixed
voltage of 60 V 0 to 60 V, additional fixed voltage of 60 V
Max. output power
(<5 ms) 1 W 1 W / channel
Average output power 0.5 W 0.5 W / channel
Peak current (<5 ms) 36 mA 36 mA / channel
Average output current 18 mA 18 mA / channel
Current limitation Short-circuit proof Short-circuit proof
Voltage gain 6 6
Input impedance 100 kΩ 100 kΩ